相關申請的交叉引用

本專(zhuan)(zhuan)利(li)申請要求美(mei)國(guo)臨時專(zhuan)(zhuan)利(li)申請no.62/066,484(2014年10月21日(ri)提交)和62/197,992(2015年7月28日(ri)提交)的(de)優先(xian)權，這兩篇(pian)美(mei)國(guo)臨時專(zhuan)(zhuan)利(li)申請被(bei)引入作(zuo)為(wei)參考。

背景技術：

在集成電(dian)路及(ji)其它電(dian)子器(qi)件的(de)(de)制造中(zhong)，多個導(dao)電(dian)、半導(dao)電(dian)及(ji)介電(dian)的(de)(de)材(cai)(cai)料(liao)層沉積(ji)至(zhi)基(ji)(ji)(ji)板(ban)(ban)表(biao)(biao)(biao)(biao)(biao)面(mian)(mian)上或自(zi)基(ji)(ji)(ji)板(ban)(ban)表(biao)(biao)(biao)(biao)(biao)面(mian)(mian)移除(chu)。隨著材(cai)(cai)料(liao)層依序地(di)沉積(ji)至(zhi)基(ji)(ji)(ji)板(ban)(ban)上及(ji)自(zi)基(ji)(ji)(ji)板(ban)(ban)移除(chu)，基(ji)(ji)(ji)板(ban)(ban)的(de)(de)最上部表(biao)(biao)(biao)(biao)(biao)面(mian)(mian)可變得非(fei)平(ping)(ping)(ping)坦(tan)(tan)且需要進(jin)行平(ping)(ping)(ping)坦(tan)(tan)化。對(dui)表(biao)(biao)(biao)(biao)(biao)面(mian)(mian)進(jin)行平(ping)(ping)(ping)坦(tan)(tan)化或對(dui)表(biao)(biao)(biao)(biao)(biao)面(mian)(mian)進(jin)行“拋光(guang)”是(shi)這樣的(de)(de)工藝(yi)，通(tong)過該工藝(yi)，自(zi)基(ji)(ji)(ji)板(ban)(ban)的(de)(de)表(biao)(biao)(biao)(biao)(biao)面(mian)(mian)移除(chu)材(cai)(cai)料(liao)以形成總(zong)體上均勻平(ping)(ping)(ping)坦(tan)(tan)的(de)(de)表(biao)(biao)(biao)(biao)(biao)面(mian)(mian)。平(ping)(ping)(ping)坦(tan)(tan)化可用于(yu)移除(chu)不合乎期望的(de)(de)表(biao)(biao)(biao)(biao)(biao)面(mian)(mian)形貌(topography)及(ji)表(biao)(biao)(biao)(biao)(biao)面(mian)(mian)缺陷，諸如粗糙表(biao)(biao)(biao)(biao)(biao)面(mian)(mian)、經團(tuan)聚的(de)(de)材(cai)(cai)料(liao)、晶(jing)格損傷、刮痕、以及(ji)受(shou)污染(ran)的(de)(de)層或材(cai)(cai)料(liao)。平(ping)(ping)(ping)坦(tan)(tan)化也可用于(yu)通(tong)過移除(chu)過量的(de)(de)沉積(ji)材(cai)(cai)料(liao)而在基(ji)(ji)(ji)板(ban)(ban)上形成特(te)征(zheng)(zheng)，該沉積(ji)材(cai)(cai)料(liao)用于(yu)填充所述特(te)征(zheng)(zheng)并提供用于(yu)后續的(de)(de)加工及(ji)金(jin)屬化水平(ping)(ping)(ping)的(de)(de)均勻表(biao)(biao)(biao)(biao)(biao)面(mian)(mian)。

用(yong)(yong)于對基板表面進(jin)(jin)行平坦化(hua)(hua)(hua)或(huo)拋(pao)(pao)(pao)光(guang)(guang)的組(zu)合(he)(he)(he)物(wu)(wu)及方法在本領域中(zhong)是公知的。化(hua)(hua)(hua)學(xue)(xue)機(ji)械(xie)平坦化(hua)(hua)(hua)或(huo)化(hua)(hua)(hua)學(xue)(xue)機(ji)械(xie)拋(pao)(pao)(pao)光(guang)(guang)(cmp)是用(yong)(yong)于使基板平坦化(hua)(hua)(hua)的常用(yong)(yong)技(ji)術。cmp采用(yong)(yong)被(bei)稱(cheng)為cmp組(zu)合(he)(he)(he)物(wu)(wu)或(huo)更簡單地被(bei)稱(cheng)為拋(pao)(pao)(pao)光(guang)(guang)組(zu)合(he)(he)(he)物(wu)(wu)(也被(bei)稱(cheng)作拋(pao)(pao)(pao)光(guang)(guang)漿料(liao))的化(hua)(hua)(hua)學(xue)(xue)組(zu)合(he)(he)(he)物(wu)(wu)以用(yong)(yong)于自基板選擇(ze)性地移除材料(liao)。典型地，通過使基板的表面與飽含拋(pao)(pao)(pao)光(guang)(guang)組(zu)合(he)(he)(he)物(wu)(wu)的拋(pao)(pao)(pao)光(guang)(guang)墊(例(li)(li)如，拋(pao)(pao)(pao)光(guang)(guang)布(bu)或(huo)拋(pao)(pao)(pao)光(guang)(guang)盤)接觸而將拋(pao)(pao)(pao)光(guang)(guang)組(zu)合(he)(he)(he)物(wu)(wu)施加至基板。典型地，通過拋(pao)(pao)(pao)光(guang)(guang)組(zu)合(he)(he)(he)物(wu)(wu)的化(hua)(hua)(hua)學(xue)(xue)活性和/或(huo)懸(xuan)浮于拋(pao)(pao)(pao)光(guang)(guang)組(zu)合(he)(he)(he)物(wu)(wu)中(zhong)或(huo)結合(he)(he)(he)到拋(pao)(pao)(pao)光(guang)(guang)墊(例(li)(li)如，固(gu)定研磨(mo)劑(ji)式拋(pao)(pao)(pao)光(guang)(guang)墊)中(zhong)的研磨(mo)劑(ji)的機(ji)械(xie)活性而進(jin)(jin)一(yi)步輔助(zhu)基板的拋(pao)(pao)(pao)光(guang)(guang)。

鈷(gu)(gu)正在(zai)成為用于集(ji)成到先進集(ji)成電路器件中的(de)(de)金屬。鈷(gu)(gu)的(de)(de)有效集(ji)成將要求具有高(gao)移除(chu)速率、良好平(ping)坦化效率、低(di)凹陷(xian)與侵(qin)蝕及(ji)(ji)低(di)缺陷(xian)率的(de)(de)cmp方法。在(zai)ph9.5及(ji)(ji)高(gao)于ph9.5下(xia)，鈷(gu)(gu)形(xing)成不可溶(rong)的(de)(de)鈍化氧(yang)化物(wu)-氫氧(yang)化物(wu)包覆(fu)物(wu)。低(di)于該(gai)ph，則鈷(gu)(gu)易于與水(shui)(shui)反應以形(xing)成可溶(rong)的(de)(de)水(shui)(shui)合co(ii)物(wu)質。美國專利申請公開(kai)2014/0243250a1公開(kai)了在(zai)ph9.0及(ji)(ji)高(gao)于ph9.0下(xia)展現適(shi)度(du)的(de)(de)鈷(gu)(gu)移除(chu)速率的(de)(de)拋光(guang)組合物(wu)，但要求高(gao)的(de)(de)顆粒(li)加載(zai)量以及(ji)(ji)高(gao)的(de)(de)下(xia)壓力，這(zhe)從經濟和加工的(de)(de)觀點(dian)來(lai)看是不利的(de)(de)。

因此(ci)，在(zai)本(ben)領(ling)域中仍(reng)需要(yao)提供高的(de)(de)鈷移除速率同時展現可(ke)接受的(de)(de)凹陷(xian)(xian)和侵蝕以及低的(de)(de)缺陷(xian)(xian)率的(de)(de)拋光組合物。

技術實現要素：

本發明提供化學機械拋光組合物，包含：(a)研磨劑顆粒；(b)鈷促進劑，其選自：具有式nr¹r²r³的化合物，其中，r¹、r²及r³獨立地選自氫、羧基烷基、經取代的羧基烷基、羥基烷基、經取代的羥基烷基及氨基羰基烷基，其中r¹、r²及r³中(zhong)沒有一(yi)個是(shi)氫或者其(qi)中(zhong)之一(yi)為氫；二羧基(ji)(ji)雜(za)環(huan)；雜(za)環(huan)基(ji)(ji)烷(wan)基(ji)(ji)-α-氨基(ji)(ji)酸；n-(酰氨基(ji)(ji)烷(wan)基(ji)(ji))氨基(ji)(ji)酸；未(wei)經(jing)取(qu)代(dai)的雜(za)環(huan)；經(jing)烷(wan)基(ji)(ji)取(qu)代(dai)的雜(za)環(huan)；以經(jing)取(qu)代(dai)的烷(wan)基(ji)(ji)取(qu)代(dai)的雜(za)環(huan)；n-氨基(ji)(ji)烷(wan)基(ji)(ji)-α-氨基(ji)(ji)酸；及(ji)其(qi)組(zu)合；(c)鈷(gu)腐(fu)蝕抑制(zhi)劑(ji)(ji)；(d)對鈷(gu)進行氧(yang)化的氧(yang)化劑(ji)(ji)；及(ji)(e)水(shui)，其(qi)中(zhong)，該拋光組(zu)合物具有約3至約8.5的ph。

本發明還提供化學機械拋光基板的方法，包括：(i)使基板與拋光墊及化學機械拋光組合物接觸，該化學機械拋光組合物包含：(a)研磨劑顆粒；(b)鈷促進劑，其選自：具有式nr¹r²r³的化合物，其中，r¹、r²及r³獨立地選自氫、羧基烷基、經取代的羧基烷基、羥基烷基、經取代的羥基烷基及氨基羰基烷基，其中r¹、r²及r³中(zhong)沒有一個是氫或者(zhe)其(qi)中(zhong)之一為氫；二(er)羧基(ji)(ji)(ji)(ji)雜(za)環；雜(za)環基(ji)(ji)(ji)(ji)烷(wan)基(ji)(ji)(ji)(ji)-α-氨(an)基(ji)(ji)(ji)(ji)酸；n-(酰氨(an)基(ji)(ji)(ji)(ji)烷(wan)基(ji)(ji)(ji)(ji))氨(an)基(ji)(ji)(ji)(ji)酸；未(wei)經(jing)取(qu)代的(de)雜(za)環；經(jing)烷(wan)基(ji)(ji)(ji)(ji)取(qu)代的(de)雜(za)環；以經(jing)取(qu)代的(de)烷(wan)基(ji)(ji)(ji)(ji)取(qu)代的(de)雜(za)環；n-氨(an)基(ji)(ji)(ji)(ji)烷(wan)基(ji)(ji)(ji)(ji)-α-氨(an)基(ji)(ji)(ji)(ji)酸；及(ji)(ji)其(qi)組(zu)合；(c)鈷腐蝕抑(yi)制劑；(d)對鈷進行氧(yang)化(hua)的(de)氧(yang)化(hua)劑；及(ji)(ji)(e)水，其(qi)中(zhong)，該(gai)拋(pao)光組(zu)合物具有約3至約8.5的(de)ph；(ii)相對于該(gai)基(ji)(ji)(ji)(ji)板(ban)移動該(gai)拋(pao)光墊及(ji)(ji)該(gai)化(hua)學機(ji)械拋(pao)光組(zu)合物；及(ji)(ji)(iii)磨除(chu)該(gai)基(ji)(ji)(ji)(ji)板(ban)的(de)至少一部分以拋(pao)光該(gai)基(ji)(ji)(ji)(ji)板(ban)。

具體實施方式

本發明提供化學機械拋光組合物，其包含以下物質、基本上由以下物質組成或由以下物質組成：(a)研磨劑顆粒；(b)鈷促進劑，其選自：具有式nr¹r²r³的化合物，其中，r¹、r²及r³獨立地選自氫、羧基烷基、經取代的羧基烷基、羥基烷基、經取代的羥基烷基及氨基羰基烷基，其中r¹、r²及r³中沒有(you)一(yi)(yi)個是氫或者其(qi)中之一(yi)(yi)為氫；二羧基(ji)(ji)雜環(huan)；雜環(huan)基(ji)(ji)烷(wan)(wan)基(ji)(ji)-α-氨(an)(an)基(ji)(ji)酸(suan)；n-(酰氨(an)(an)基(ji)(ji)烷(wan)(wan)基(ji)(ji))氨(an)(an)基(ji)(ji)酸(suan)；未經(jing)取代(dai)的雜環(huan)；經(jing)烷(wan)(wan)基(ji)(ji)取代(dai)的雜環(huan)；以經(jing)取代(dai)的烷(wan)(wan)基(ji)(ji)取代(dai)的雜環(huan)；n-氨(an)(an)基(ji)(ji)烷(wan)(wan)基(ji)(ji)-α-氨(an)(an)基(ji)(ji)酸(suan)；及其(qi)組合；(c)鈷(gu)腐蝕(shi)抑制劑(ji)；(d)對鈷(gu)進行氧化的氧化劑(ji)；及(e)水(shui)，其(qi)中，該(gai)拋光組合物(wu)具(ju)有(you)約3至約8.5的ph。

拋光組(zu)合(he)(he)物(wu)包含(han)研(yan)(yan)磨劑(即(ji)(ji)，一種或(huo)(huo)(huo)多種研(yan)(yan)磨劑)。研(yan)(yan)磨劑可為呈顆(ke)粒(li)(li)(li)(li)的(de)(de)形(xing)式的(de)(de)任(ren)何適(shi)合(he)(he)的(de)(de)研(yan)(yan)磨劑或(huo)(huo)(huo)研(yan)(yan)磨劑組(zu)合(he)(he)。研(yan)(yan)磨劑可為任(ren)何適(shi)合(he)(he)的(de)(de)研(yan)(yan)磨劑，例如，研(yan)(yan)磨劑可為天然的(de)(de)或(huo)(huo)(huo)合(he)(he)成(cheng)的(de)(de)，且可包含(han)金屬(shu)氧(yang)(yang)(yang)(yang)化(hua)(hua)(hua)(hua)(hua)物(wu)、碳化(hua)(hua)(hua)(hua)(hua)物(wu)、氮化(hua)(hua)(hua)(hua)(hua)物(wu)、金剛(gang)砂、金剛(gang)石等。研(yan)(yan)磨劑也可為聚合(he)(he)物(wu)顆(ke)粒(li)(li)(li)(li)或(huo)(huo)(huo)經涂布的(de)(de)顆(ke)粒(li)(li)(li)(li)。研(yan)(yan)磨劑合(he)(he)乎(hu)期望(wang)地(di)包含(han)金屬(shu)氧(yang)(yang)(yang)(yang)化(hua)(hua)(hua)(hua)(hua)物(wu)、基(ji)本上(shang)由金屬(shu)氧(yang)(yang)(yang)(yang)化(hua)(hua)(hua)(hua)(hua)物(wu)組(zu)成(cheng)或(huo)(huo)(huo)由金屬(shu)氧(yang)(yang)(yang)(yang)化(hua)(hua)(hua)(hua)(hua)物(wu)組(zu)成(cheng)。典型(xing)地(di)，金屬(shu)氧(yang)(yang)(yang)(yang)化(hua)(hua)(hua)(hua)(hua)物(wu)選自：氧(yang)(yang)(yang)(yang)化(hua)(hua)(hua)(hua)(hua)硅(silica)、氧(yang)(yang)(yang)(yang)化(hua)(hua)(hua)(hua)(hua)鋁(lv)(lv)(lv)(例如，α氧(yang)(yang)(yang)(yang)化(hua)(hua)(hua)(hua)(hua)鋁(lv)(lv)(lv)顆(ke)粒(li)(li)(li)(li)(即(ji)(ji)，α-氧(yang)(yang)(yang)(yang)化(hua)(hua)(hua)(hua)(hua)鋁(lv)(lv)(lv))、γ氧(yang)(yang)(yang)(yang)化(hua)(hua)(hua)(hua)(hua)鋁(lv)(lv)(lv)顆(ke)粒(li)(li)(li)(li)(即(ji)(ji)，γ-氧(yang)(yang)(yang)(yang)化(hua)(hua)(hua)(hua)(hua)鋁(lv)(lv)(lv))、δ氧(yang)(yang)(yang)(yang)化(hua)(hua)(hua)(hua)(hua)鋁(lv)(lv)(lv)顆(ke)粒(li)(li)(li)(li)(即(ji)(ji)，δ-氧(yang)(yang)(yang)(yang)化(hua)(hua)(hua)(hua)(hua)鋁(lv)(lv)(lv))、或(huo)(huo)(huo)熱解氧(yang)(yang)(yang)(yang)化(hua)(hua)(hua)(hua)(hua)鋁(lv)(lv)(lv)顆(ke)粒(li)(li)(li)(li))、二氧(yang)(yang)(yang)(yang)化(hua)(hua)(hua)(hua)(hua)鈰、氧(yang)(yang)(yang)(yang)化(hua)(hua)(hua)(hua)(hua)鋯、其共形(xing)成(cheng)產物(wu)、以及它們的(de)(de)組(zu)合(he)(he)。在優選實施方式中(zhong)，研(yan)(yan)磨劑顆(ke)粒(li)(li)(li)(li)合(he)(he)乎(hu)期望(wang)地(di)為帶負(fu)電荷的(de)(de)(anionic)。

優選地，化(hua)學機械拋光組合(he)物包含氧(yang)化(hua)硅(gui)(gui)研磨劑。氧(yang)化(hua)硅(gui)(gui)可為(wei)任何適合(he)的氧(yang)化(hua)硅(gui)(gui)，例如，氧(yang)化(hua)硅(gui)(gui)可為(wei)濕法氧(yang)化(hua)硅(gui)(gui)或熱解氧(yang)化(hua)硅(gui)(gui)。優選地，氧(yang)化(hua)硅(gui)(gui)為(wei)濕法氧(yang)化(hua)硅(gui)(gui)。

濕法(fa)氧化(hua)硅(gui)可(ke)為任(ren)何適(shi)合的(de)(de)濕法(fa)氧化(hua)硅(gui)。舉例而言，濕法(fa)氧化(hua)硅(gui)可(ke)為經縮(suo)聚(ju)的(de)(de)氧化(hua)硅(gui)。經縮(suo)聚(ju)的(de)(de)氧化(hua)硅(gui)顆(ke)(ke)粒(li)典型地通過縮(suo)合si(oh)4以形成膠(jiao)體(ti)顆(ke)(ke)粒(li)而制備(bei)，其中(zhong)，膠(jiao)體(ti)被定義為具(ju)有介于約(yue)1nm與約(yue)1000nm之(zhi)間的(de)(de)平均(jun)粒(li)度。這(zhe)樣的(de)(de)研磨(mo)劑顆(ke)(ke)粒(li)可(ke)根(gen)據美國專利5,230,833而制備(bei)，或可(ke)作為各種市售(shou)產品(pin)中(zhong)的(de)(de)任(ren)一者而獲得，諸如(ru)akzo-nobelbindzil50/80產品(pin)及(ji)(ji)nalco1050、1060、2327及(ji)(ji)2329產品(pin)，以及(ji)(ji)可(ke)購自dupont、bayer、appliedresearch、nissanchemical、fuso及(ji)(ji)clariant的(de)(de)其它(ta)相似產品(pin)。

研(yan)(yan)磨(mo)(mo)劑(ji)(ji)(ji)顆(ke)(ke)粒(li)可具(ju)有(you)任何適(shi)合的(de)(de)(de)(de)(de)(de)(de)表(biao)(biao)面電(dian)(dian)(dian)荷(he)。優選(xuan)地，研(yan)(yan)磨(mo)(mo)劑(ji)(ji)(ji)顆(ke)(ke)粒(li)為帶(dai)(dai)負電(dian)(dian)(dian)荷(he)的(de)(de)(de)(de)(de)(de)(de)研(yan)(yan)磨(mo)(mo)劑(ji)(ji)(ji)顆(ke)(ke)粒(li)。“帶(dai)(dai)負電(dian)(dian)(dian)荷(he)的(de)(de)(de)(de)(de)(de)(de)”意指研(yan)(yan)磨(mo)(mo)劑(ji)(ji)(ji)顆(ke)(ke)粒(li)在拋(pao)光(guang)(guang)組(zu)合物的(de)(de)(de)(de)(de)(de)(de)ph下具(ju)有(you)負的(de)(de)(de)(de)(de)(de)(de)表(biao)(biao)面電(dian)(dian)(dian)荷(he)。研(yan)(yan)磨(mo)(mo)劑(ji)(ji)(ji)顆(ke)(ke)粒(li)可在其(qi)天然(ran)狀態(tai)下在拋(pao)光(guang)(guang)組(zu)合物的(de)(de)(de)(de)(de)(de)(de)ph下為帶(dai)(dai)負電(dian)(dian)(dian)荷(he)的(de)(de)(de)(de)(de)(de)(de)，或(huo)者，可使(shi)用(yong)本領域普通技術人員已知的(de)(de)(de)(de)(de)(de)(de)任意方法來使(shi)研(yan)(yan)磨(mo)(mo)劑(ji)(ji)(ji)顆(ke)(ke)粒(li)在拋(pao)光(guang)(guang)組(zu)合物的(de)(de)(de)(de)(de)(de)(de)ph下為帶(dai)(dai)負電(dian)(dian)(dian)荷(he)的(de)(de)(de)(de)(de)(de)(de)，所述方法諸如(ru)(例(li)如(ru))通過(guo)表(biao)(biao)面金(jin)屬摻雜(例(li)如(ru)，通過(guo)使(shi)用(yong)鋁離子的(de)(de)(de)(de)(de)(de)(de)摻雜)，或(huo)通過(guo)運用(yong)系(xi)栓(tethered)有(you)機酸(suan)(suan)(suan)、系(xi)栓的(de)(de)(de)(de)(de)(de)(de)基于(yu)硫的(de)(de)(de)(de)(de)(de)(de)酸(suan)(suan)(suan)或(huo)系(xi)栓的(de)(de)(de)(de)(de)(de)(de)基于(yu)磷的(de)(de)(de)(de)(de)(de)(de)酸(suan)(suan)(suan)的(de)(de)(de)(de)(de)(de)(de)表(biao)(biao)面處理。

研(yan)磨(mo)劑(ji)(ji)可具(ju)有(you)任何適(shi)合(he)的(de)(de)(de)平(ping)(ping)均粒(li)(li)度(du)(即，平(ping)(ping)均粒(li)(li)徑)。研(yan)磨(mo)劑(ji)(ji)可具(ju)有(you)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)5nm或(huo)(huo)(huo)更(geng)(geng)(geng)(geng)(geng)大(da)的(de)(de)(de)平(ping)(ping)均粒(li)(li)度(du)，例如(ru)(ru)(ru)，約(yue)(yue)(yue)(yue)(yue)(yue)(yue)10nm或(huo)(huo)(huo)更(geng)(geng)(geng)(geng)(geng)大(da)、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)15nm或(huo)(huo)(huo)更(geng)(geng)(geng)(geng)(geng)大(da)、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)20nm或(huo)(huo)(huo)更(geng)(geng)(geng)(geng)(geng)大(da)、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)25nm或(huo)(huo)(huo)更(geng)(geng)(geng)(geng)(geng)大(da)、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)30nm或(huo)(huo)(huo)更(geng)(geng)(geng)(geng)(geng)大(da)、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)35nm或(huo)(huo)(huo)更(geng)(geng)(geng)(geng)(geng)大(da)、或(huo)(huo)(huo)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)40nm或(huo)(huo)(huo)更(geng)(geng)(geng)(geng)(geng)大(da)。可選(xuan)擇地，或(huo)(huo)(huo)者(zhe)此外(wai)，研(yan)磨(mo)劑(ji)(ji)可具(ju)有(you)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)150nm或(huo)(huo)(huo)更(geng)(geng)(geng)(geng)(geng)小的(de)(de)(de)平(ping)(ping)均粒(li)(li)度(du)，例如(ru)(ru)(ru)，約(yue)(yue)(yue)(yue)(yue)(yue)(yue)140nm或(huo)(huo)(huo)更(geng)(geng)(geng)(geng)(geng)小、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)130nm或(huo)(huo)(huo)更(geng)(geng)(geng)(geng)(geng)小、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)120nm或(huo)(huo)(huo)更(geng)(geng)(geng)(geng)(geng)小、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)110nm或(huo)(huo)(huo)更(geng)(geng)(geng)(geng)(geng)小、或(huo)(huo)(huo)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)100nm或(huo)(huo)(huo)更(geng)(geng)(geng)(geng)(geng)小。因此，研(yan)磨(mo)劑(ji)(ji)可具(ju)有(you)在由以上(shang)端點中的(de)(de)(de)任兩者(zhe)界定的(de)(de)(de)粒(li)(li)度(du)分布(bu)中的(de)(de)(de)最大(da)值。舉例而(er)言，研(yan)磨(mo)劑(ji)(ji)可具(ju)有(you)如(ru)(ru)(ru)下平(ping)(ping)均粒(li)(li)度(du)：約(yue)(yue)(yue)(yue)(yue)(yue)(yue)5nm至(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)150nm、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)10nm至(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)140nm、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)15nm至(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)130nm、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)20nm至(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)120nm、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)20nm至(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)110nm、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)20nm至(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)100nm、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)30nm至(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)150nm、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)30nm至(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)140nm、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)30nm至(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)130nm、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)30nm至(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)120nm、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)30nm至(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)110nm、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)30nm至(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)100nm、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)35nm至(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)150nm、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)35nm至(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)140nm、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)35nm至(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)130nm、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)35nm至(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)120nm、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)35nm至(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)110nm、或(huo)(huo)(huo)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)35nm至(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)100nm。對于球形研(yan)磨(mo)劑(ji)(ji)顆(ke)(ke)粒(li)(li)，顆(ke)(ke)粒(li)(li)的(de)(de)(de)大(da)小為(wei)顆(ke)(ke)粒(li)(li)的(de)(de)(de)直(zhi)徑。對于非球形研(yan)磨(mo)劑(ji)(ji)顆(ke)(ke)粒(li)(li)，顆(ke)(ke)粒(li)(li)的(de)(de)(de)大(da)小為(wei)包圍(wei)該顆(ke)(ke)粒(li)(li)的(de)(de)(de)最小球體的(de)(de)(de)直(zhi)徑。可使用(yong)任何適(shi)合(he)的(de)(de)(de)技(ji)(ji)術(例如(ru)(ru)(ru)，使用(yong)激光(guang)衍(yan)射技(ji)(ji)術)來量(liang)測研(yan)磨(mo)劑(ji)(ji)的(de)(de)(de)粒(li)(li)度(du)。適(shi)合(he)的(de)(de)(de)粒(li)(li)度(du)量(liang)測儀(yi)器可購自(例如(ru)(ru)(ru))malverninstruments(malvern,uk)。

研磨劑顆粒(li)(li)優選地(di)在(zai)(zai)本發明的(de)(de)(de)拋(pao)光組(zu)合物中是膠(jiao)體穩(wen)定的(de)(de)(de)。術語膠(jiao)體是指顆粒(li)(li)在(zai)(zai)液(ye)體載(zai)劑(例如(ru)，水)中的(de)(de)(de)懸浮(fu)(fu)液(ye)。膠(jiao)體穩(wen)定性是指懸浮(fu)(fu)液(ye)隨(sui)時(shi)間的(de)(de)(de)保持性。在(zai)(zai)本發明的(de)(de)(de)上(shang)下(xia)文中，若出現(xian)如(ru)下(xia)情形(xing)便認為研磨劑是膠(jiao)體穩(wen)定的(de)(de)(de)：當將研磨劑置(zhi)于(yu)(yu)100ml量筒(tong)中且(qie)使其無干擾(rao)地(di)靜置(zhi)兩小時(shi)之時(shi)，量筒(tong)的(de)(de)(de)底(di)部(bu)50ml中的(de)(de)(de)顆粒(li)(li)濃(nong)(nong)度([b]，以g/ml為單(dan)位)與量筒(tong)的(de)(de)(de)頂部(bu)50ml中的(de)(de)(de)顆粒(li)(li)濃(nong)(nong)度([t]，以g/ml為單(dan)位)之間的(de)(de)(de)差值除以研磨劑組(zu)合物中顆粒(li)(li)的(de)(de)(de)初始濃(nong)(nong)度([c]，以g/ml為單(dan)位)小于(yu)(yu)或等于(yu)(yu)0.5(即(ji)，{[b]-[t]}/[c]≤0.5)。更優選地(di)，[b]-[t]/[c]的(de)(de)(de)值小于(yu)(yu)或等于(yu)(yu)0.3，且(qie)最優選地(di)小于(yu)(yu)或等于(yu)(yu)0.1。

拋(pao)(pao)光(guang)(guang)(guang)(guang)組(zu)合(he)(he)(he)(he)物(wu)(wu)可(ke)(ke)包(bao)(bao)(bao)含(han)(han)(han)任何適合(he)(he)(he)(he)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)的(de)(de)(de)研(yan)磨(mo)(mo)劑(ji)顆(ke)粒。若本發明的(de)(de)(de)拋(pao)(pao)光(guang)(guang)(guang)(guang)組(zu)合(he)(he)(he)(he)物(wu)(wu)包(bao)(bao)(bao)含(han)(han)(han)過(guo)少(shao)(shao)(shao)的(de)(de)(de)研(yan)磨(mo)(mo)劑(ji)，則組(zu)合(he)(he)(he)(he)物(wu)(wu)可(ke)(ke)能(neng)未展現出足夠的(de)(de)(de)移(yi)除速率。與此對比，若拋(pao)(pao)光(guang)(guang)(guang)(guang)組(zu)合(he)(he)(he)(he)物(wu)(wu)包(bao)(bao)(bao)含(han)(han)(han)過(guo)多(duo)(duo)的(de)(de)(de)研(yan)磨(mo)(mo)劑(ji)，則拋(pao)(pao)光(guang)(guang)(guang)(guang)組(zu)合(he)(he)(he)(he)物(wu)(wu)可(ke)(ke)能(neng)展現出不合(he)(he)(he)(he)乎期望的(de)(de)(de)拋(pao)(pao)光(guang)(guang)(guang)(guang)性(xing)能(neng)和/或(huo)(huo)(huo)(huo)(huo)(huo)(huo)可(ke)(ke)能(neng)不是(shi)成(cheng)本有效的(de)(de)(de)和/或(huo)(huo)(huo)(huo)(huo)(huo)(huo)可(ke)(ke)能(neng)缺(que)乏穩定(ding)性(xing)。拋(pao)(pao)光(guang)(guang)(guang)(guang)組(zu)合(he)(he)(he)(he)物(wu)(wu)可(ke)(ke)包(bao)(bao)(bao)含(han)(han)(han)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)10重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％或(huo)(huo)(huo)(huo)(huo)(huo)(huo)更(geng)(geng)(geng)(geng)少(shao)(shao)(shao)的(de)(de)(de)研(yan)磨(mo)(mo)劑(ji)，例(li)如，約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)9重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％或(huo)(huo)(huo)(huo)(huo)(huo)(huo)更(geng)(geng)(geng)(geng)少(shao)(shao)(shao)、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)8重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％或(huo)(huo)(huo)(huo)(huo)(huo)(huo)更(geng)(geng)(geng)(geng)少(shao)(shao)(shao)、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)7重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％或(huo)(huo)(huo)(huo)(huo)(huo)(huo)更(geng)(geng)(geng)(geng)少(shao)(shao)(shao)、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)6重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％或(huo)(huo)(huo)(huo)(huo)(huo)(huo)更(geng)(geng)(geng)(geng)少(shao)(shao)(shao)、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)5重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％或(huo)(huo)(huo)(huo)(huo)(huo)(huo)更(geng)(geng)(geng)(geng)少(shao)(shao)(shao)、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)4重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％或(huo)(huo)(huo)(huo)(huo)(huo)(huo)更(geng)(geng)(geng)(geng)少(shao)(shao)(shao)、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)3重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％或(huo)(huo)(huo)(huo)(huo)(huo)(huo)更(geng)(geng)(geng)(geng)少(shao)(shao)(shao)、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)2重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％或(huo)(huo)(huo)(huo)(huo)(huo)(huo)更(geng)(geng)(geng)(geng)少(shao)(shao)(shao)、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)1.5重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％或(huo)(huo)(huo)(huo)(huo)(huo)(huo)更(geng)(geng)(geng)(geng)少(shao)(shao)(shao)、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)1重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％或(huo)(huo)(huo)(huo)(huo)(huo)(huo)更(geng)(geng)(geng)(geng)少(shao)(shao)(shao)、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)0.9重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％或(huo)(huo)(huo)(huo)(huo)(huo)(huo)更(geng)(geng)(geng)(geng)少(shao)(shao)(shao)、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)0.8重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％或(huo)(huo)(huo)(huo)(huo)(huo)(huo)更(geng)(geng)(geng)(geng)少(shao)(shao)(shao)、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)0.7重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％或(huo)(huo)(huo)(huo)(huo)(huo)(huo)更(geng)(geng)(geng)(geng)少(shao)(shao)(shao)、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)0.6重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％或(huo)(huo)(huo)(huo)(huo)(huo)(huo)更(geng)(geng)(geng)(geng)少(shao)(shao)(shao)、或(huo)(huo)(huo)(huo)(huo)(huo)(huo)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)0.5重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％或(huo)(huo)(huo)(huo)(huo)(huo)(huo)更(geng)(geng)(geng)(geng)少(shao)(shao)(shao)的(de)(de)(de)研(yan)磨(mo)(mo)劑(ji)。可(ke)(ke)選(xuan)擇(ze)地，或(huo)(huo)(huo)(huo)(huo)(huo)(huo)者此外，拋(pao)(pao)光(guang)(guang)(guang)(guang)組(zu)合(he)(he)(he)(he)物(wu)(wu)可(ke)(ke)包(bao)(bao)(bao)含(han)(han)(han)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)0.05重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％或(huo)(huo)(huo)(huo)(huo)(huo)(huo)更(geng)(geng)(geng)(geng)多(duo)(duo)的(de)(de)(de)研(yan)磨(mo)(mo)劑(ji)，例(li)如，約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)0.1重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％或(huo)(huo)(huo)(huo)(huo)(huo)(huo)更(geng)(geng)(geng)(geng)多(duo)(duo)、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)0.2重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％或(huo)(huo)(huo)(huo)(huo)(huo)(huo)更(geng)(geng)(geng)(geng)多(duo)(duo)、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)0.3重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％或(huo)(huo)(huo)(huo)(huo)(huo)(huo)更(geng)(geng)(geng)(geng)多(duo)(duo)、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)0.4重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％或(huo)(huo)(huo)(huo)(huo)(huo)(huo)更(geng)(geng)(geng)(geng)多(duo)(duo)、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)0.5重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％或(huo)(huo)(huo)(huo)(huo)(huo)(huo)更(geng)(geng)(geng)(geng)多(duo)(duo)、或(huo)(huo)(huo)(huo)(huo)(huo)(huo)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)1重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％或(huo)(huo)(huo)(huo)(huo)(huo)(huo)更(geng)(geng)(geng)(geng)多(duo)(duo)。因(yin)此，拋(pao)(pao)光(guang)(guang)(guang)(guang)組(zu)合(he)(he)(he)(he)物(wu)(wu)可(ke)(ke)包(bao)(bao)(bao)含(han)(han)(han)由(you)前述(shu)端點中的(de)(de)(de)任兩(liang)者界定(ding)的(de)(de)(de)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)的(de)(de)(de)研(yan)磨(mo)(mo)劑(ji)。舉(ju)例(li)而(er)言，拋(pao)(pao)光(guang)(guang)(guang)(guang)組(zu)合(he)(he)(he)(he)物(wu)(wu)可(ke)(ke)包(bao)(bao)(bao)含(han)(han)(han)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)0.05重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％至(zhi)(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)10重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％的(de)(de)(de)研(yan)磨(mo)(mo)劑(ji)，例(li)如，0.1重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％至(zhi)(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)10重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)0.1重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％至(zhi)(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)9重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)0.1重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％至(zhi)(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)8重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)0.1重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％至(zhi)(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)7重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)0.1重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％至(zhi)(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)6重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)0.1重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％至(zhi)(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)5重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)0.1重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％至(zhi)(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)4重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)0.1重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％至(zhi)(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)3重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)0.1重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％至(zhi)(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)2重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)0.2重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％至(zhi)(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)2重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)0.3重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％至(zhi)(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)2重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)0.4重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％至(zhi)(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)2重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)0.5重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％至(zhi)(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)2重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)0.1重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％至(zhi)(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)1.5重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)0.2重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％至(zhi)(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)1.5重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)0.3重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％至(zhi)(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)1.5重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)0.4重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％至(zhi)(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)1.5重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)0.5重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％至(zhi)(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)1.5重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)0.1重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％至(zhi)(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)1重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)0.2重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％至(zhi)(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)1重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)0.3重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％至(zhi)(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)1重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)0.4重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％至(zhi)(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)1重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％、或(huo)(huo)(huo)(huo)(huo)(huo)(huo)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)0.5重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％至(zhi)(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)1重(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)(zhong)量(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)(liang)％的(de)(de)(de)研(yan)磨(mo)(mo)劑(ji)。

拋光組合物包含鈷促進劑，其選自：具有式nr¹r²r³的化合物，其中，r¹、r²及r³獨立地選自氫、羧基烷基、經取代的羧基烷基、羥基烷基、經取代的羥基烷基及氨基羰基烷基，其中r¹、r²及r³中沒有一(yi)個是(shi)氫或者其中之一(yi)為氫；二羧(suo)基(ji)(ji)(ji)雜(za)環(huan)；雜(za)環(huan)基(ji)(ji)(ji)烷(wan)基(ji)(ji)(ji)-α-氨(an)基(ji)(ji)(ji)酸；n-(酰(xian)氨(an)基(ji)(ji)(ji)烷(wan)基(ji)(ji)(ji))氨(an)基(ji)(ji)(ji)酸；未(wei)經取代(dai)的(de)雜(za)環(huan)；經烷(wan)基(ji)(ji)(ji)取代(dai)的(de)雜(za)環(huan)；以經取代(dai)的(de)烷(wan)基(ji)(ji)(ji)取代(dai)的(de)雜(za)環(huan)；n-氨(an)基(ji)(ji)(ji)烷(wan)基(ji)(ji)(ji)-α-氨(an)基(ji)(ji)(ji)酸；及其組合。

鈷(gu)促進(jin)劑可為選自本文中(zhong)所敘述的(de)(de)(de)化合(he)(he)物的(de)(de)(de)種(zhong)類的(de)(de)(de)任何(he)適合(he)(he)的(de)(de)(de)鈷(gu)促進(jin)劑。在優選實施方式中(zhong)，鈷(gu)促進(jin)劑為亞氨(an)(an)(an)基(ji)(ji)二乙(yi)(yi)酸(suan)(suan)、2-[雙(2-羥基(ji)(ji)乙(yi)(yi)基(ji)(ji))氨(an)(an)(an)基(ji)(ji)]-2-(羥基(ji)(ji)甲(jia)基(ji)(ji))-1,3-丙二醇、二羥乙(yi)(yi)基(ji)(ji)甘氨(an)(an)(an)酸(suan)(suan)(bicine)、吡(bi)啶甲(jia)酸(suan)(suan)、二吡(bi)啶甲(jia)酸(suan)(suan)、組(zu)(zu)氨(an)(an)(an)酸(suan)(suan)、[(2-氨(an)(an)(an)基(ji)(ji)-2-氧基(ji)(ji)乙(yi)(yi)基(ji)(ji))氨(an)(an)(an)基(ji)(ji)]乙(yi)(yi)酸(suan)(suan)、咪(mi)唑、n-甲(jia)基(ji)(ji)咪(mi)唑、賴(lai)氨(an)(an)(an)酸(suan)(suan)、或者它們的(de)(de)(de)組(zu)(zu)合(he)(he)。

鈷促(cu)進(jin)(jin)劑可(ke)(ke)以(yi)(yi)任何適合(he)的(de)濃度(du)(du)存(cun)在(zai)于(yu)拋(pao)光(guang)(guang)組(zu)(zu)合(he)物(wu)中(zhong)(zhong)。典型地，鈷促(cu)進(jin)(jin)劑可(ke)(ke)以(yi)(yi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)5mm或(huo)(huo)(huo)更(geng)(geng)(geng)大(da)(da)的(de)濃度(du)(du)存(cun)在(zai)于(yu)拋(pao)光(guang)(guang)組(zu)(zu)合(he)物(wu)中(zhong)(zhong)，例(li)如(ru)(ru)，約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)10mm或(huo)(huo)(huo)更(geng)(geng)(geng)大(da)(da)、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)15mm或(huo)(huo)(huo)更(geng)(geng)(geng)大(da)(da)、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)20mm或(huo)(huo)(huo)更(geng)(geng)(geng)大(da)(da)、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)25mm或(huo)(huo)(huo)更(geng)(geng)(geng)大(da)(da)、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)30mm或(huo)(huo)(huo)更(geng)(geng)(geng)大(da)(da)、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)35mm或(huo)(huo)(huo)更(geng)(geng)(geng)大(da)(da)、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)40mm或(huo)(huo)(huo)更(geng)(geng)(geng)大(da)(da)、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)45mm或(huo)(huo)(huo)更(geng)(geng)(geng)大(da)(da)、或(huo)(huo)(huo)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)50mm或(huo)(huo)(huo)更(geng)(geng)(geng)大(da)(da)。可(ke)(ke)選擇地，或(huo)(huo)(huo)者此外，鈷促(cu)進(jin)(jin)劑可(ke)(ke)以(yi)(yi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)100mm或(huo)(huo)(huo)更(geng)(geng)(geng)小(xiao)(xiao)的(de)濃度(du)(du)存(cun)在(zai)于(yu)拋(pao)光(guang)(guang)組(zu)(zu)合(he)物(wu)中(zhong)(zhong)，例(li)如(ru)(ru)，約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)95mm或(huo)(huo)(huo)更(geng)(geng)(geng)小(xiao)(xiao)、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)90mm或(huo)(huo)(huo)更(geng)(geng)(geng)小(xiao)(xiao)、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)85mm或(huo)(huo)(huo)更(geng)(geng)(geng)小(xiao)(xiao)、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)80mm或(huo)(huo)(huo)更(geng)(geng)(geng)小(xiao)(xiao)、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)75mm或(huo)(huo)(huo)更(geng)(geng)(geng)小(xiao)(xiao)、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)70mm或(huo)(huo)(huo)更(geng)(geng)(geng)小(xiao)(xiao)、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)65mm或(huo)(huo)(huo)更(geng)(geng)(geng)小(xiao)(xiao)、或(huo)(huo)(huo)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)60mm或(huo)(huo)(huo)更(geng)(geng)(geng)小(xiao)(xiao)。因此，鈷促(cu)進(jin)(jin)劑可(ke)(ke)以(yi)(yi)由前(qian)述端點中(zhong)(zhong)的(de)任兩者界(jie)定的(de)濃度(du)(du)存(cun)在(zai)于(yu)拋(pao)光(guang)(guang)組(zu)(zu)合(he)物(wu)中(zhong)(zhong)。舉例(li)而言，鈷促(cu)進(jin)(jin)劑可(ke)(ke)以(yi)(yi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)5mm至(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)100mm的(de)濃度(du)(du)存(cun)在(zai)于(yu)拋(pao)光(guang)(guang)組(zu)(zu)合(he)物(wu)中(zhong)(zhong)，例(li)如(ru)(ru)，約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)5mm至(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)90mm、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)5mm至(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)80mm、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)5mm至(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)70mm、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)5mm至(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)60mm、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)10mm至(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)100mm、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)10mm至(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)90mm、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)10mm至(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)80mm、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)10mm至(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)70mm、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)10mm至(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)60mm、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)20mm至(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)100mm、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)20mm至(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)90mm、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)20mm至(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)80mm、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)20mm至(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)70mm、或(huo)(huo)(huo)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)20mm至(zhi)(zhi)(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)60mm。

拋光(guang)組合(he)(he)物包(bao)(bao)(bao)含(han)鈷(gu)腐(fu)蝕(shi)抑(yi)(yi)制(zhi)劑(ji)(ji)(ji)。鈷(gu)腐(fu)蝕(shi)抑(yi)(yi)制(zhi)劑(ji)(ji)(ji)可(ke)(ke)為(wei)任何適合(he)(he)的(de)(de)(de)(de)(de)(de)鈷(gu)腐(fu)蝕(shi)抑(yi)(yi)制(zhi)劑(ji)(ji)(ji)。在實(shi)施方式中(zhong)，鈷(gu)腐(fu)蝕(shi)抑(yi)(yi)制(zhi)劑(ji)(ji)(ji)包(bao)(bao)(bao)含(han)陰(yin)(yin)離(li)(li)子(zi)(zi)型(xing)頭(tou)基(ji)(ji)(ji)(ji)(ji)以及(ji)c8-c14脂(zhi)族(zu)(zu)尾(wei)(wei)基(ji)(ji)(ji)(ji)(ji)，例(li)如，c8-c14烷(wan)(wan)基(ji)(ji)(ji)(ji)(ji)或(huo)(huo)(huo)(huo)(huo)c8-c14烯(xi)(xi)基(ji)(ji)(ji)(ji)(ji)尾(wei)(wei)基(ji)(ji)(ji)(ji)(ji)。陰(yin)(yin)離(li)(li)子(zi)(zi)型(xing)頭(tou)基(ji)(ji)(ji)(ji)(ji)可(ke)(ke)為(wei)任何適合(he)(he)的(de)(de)(de)(de)(de)(de)陰(yin)(yin)離(li)(li)子(zi)(zi)型(xing)頭(tou)基(ji)(ji)(ji)(ji)(ji)。在優(you)選實(shi)施方式中(zhong)，鈷(gu)腐(fu)蝕(shi)抑(yi)(yi)制(zhi)劑(ji)(ji)(ji)包(bao)(bao)(bao)含(han)具(ju)(ju)有結構(gou)r-con(ch3)ch2cooh的(de)(de)(de)(de)(de)(de)肌(ji)氨(an)酸(suan)衍生(sheng)(sheng)物，其(qi)中(zhong)，con(ch3)ch2cooh形(xing)成(cheng)頭(tou)基(ji)(ji)(ji)(ji)(ji)，且r形(xing)成(cheng)尾(wei)(wei)基(ji)(ji)(ji)(ji)(ji)。r基(ji)(ji)(ji)(ji)(ji)團典型(xing)地為(wei)c8-c13脂(zhi)族(zu)(zu)基(ji)(ji)(ji)(ji)(ji)，且可(ke)(ke)為(wei)c8-c13烷(wan)(wan)基(ji)(ji)(ji)(ji)(ji)或(huo)(huo)(huo)(huo)(huo)c8-c13烯(xi)(xi)基(ji)(ji)(ji)(ji)(ji)，例(li)如，c8烷(wan)(wan)基(ji)(ji)(ji)(ji)(ji)、c9烷(wan)(wan)基(ji)(ji)(ji)(ji)(ji)、c10烷(wan)(wan)基(ji)(ji)(ji)(ji)(ji)、c11烷(wan)(wan)基(ji)(ji)(ji)(ji)(ji)、c12烷(wan)(wan)基(ji)(ji)(ji)(ji)(ji)、c13烷(wan)(wan)基(ji)(ji)(ji)(ji)(ji)、c8烯(xi)(xi)基(ji)(ji)(ji)(ji)(ji)、c9烯(xi)(xi)基(ji)(ji)(ji)(ji)(ji)、c10烯(xi)(xi)基(ji)(ji)(ji)(ji)(ji)、c11烯(xi)(xi)基(ji)(ji)(ji)(ji)(ji)、c12烯(xi)(xi)基(ji)(ji)(ji)(ji)(ji)、或(huo)(huo)(huo)(huo)(huo)c13烯(xi)(xi)基(ji)(ji)(ji)(ji)(ji)。在其(qi)中(zhong)鈷(gu)腐(fu)蝕(shi)抑(yi)(yi)制(zhi)劑(ji)(ji)(ji)為(wei)肌(ji)氨(an)酸(suan)衍生(sheng)(sheng)物的(de)(de)(de)(de)(de)(de)優(you)選實(shi)施方式中(zhong)，出于(yu)碳計(ji)數(shu)的(de)(de)(de)(de)(de)(de)目(mu)的(de)(de)(de)(de)(de)(de)，尾(wei)(wei)基(ji)(ji)(ji)(ji)(ji)的(de)(de)(de)(de)(de)(de)常(chang)規命名包(bao)(bao)(bao)括其(qi)上連接有r基(ji)(ji)(ji)(ji)(ji)團的(de)(de)(de)(de)(de)(de)羰基(ji)(ji)(ji)(ji)(ji)。因此，c12肌(ji)氨(an)酸(suan)酯是指肌(ji)氨(an)酸(suan)月桂酰基(ji)(ji)(ji)(ji)(ji)酯。當尾(wei)(wei)基(ji)(ji)(ji)(ji)(ji)為(wei)烯(xi)(xi)基(ji)(ji)(ji)(ji)(ji)(其(qi)中(zhong)雙鍵(jian)不(bu)在尾(wei)(wei)基(ji)(ji)(ji)(ji)(ji)的(de)(de)(de)(de)(de)(de)末端處)時，烯(xi)(xi)基(ji)(ji)(ji)(ji)(ji)可(ke)(ke)具(ju)(ju)有e構(gou)型(xing)或(huo)(huo)(huo)(huo)(huo)z構(gou)型(xing)，或(huo)(huo)(huo)(huo)(huo)可(ke)(ke)為(wei)e異構(gou)體(ti)與z異構(gou)體(ti)的(de)(de)(de)(de)(de)(de)混(hun)合(he)(he)。鈷(gu)腐(fu)蝕(shi)抑(yi)(yi)制(zhi)劑(ji)(ji)(ji)可(ke)(ke)為(wei)單一化(hua)合(he)(he)物，或(huo)(huo)(huo)(huo)(huo)可(ke)(ke)為(wei)兩(liang)種(zhong)或(huo)(huo)(huo)(huo)(huo)更(geng)(geng)多(duo)種(zhong)具(ju)(ju)有陰(yin)(yin)離(li)(li)子(zi)(zi)型(xing)頭(tou)基(ji)(ji)(ji)(ji)(ji)以及(ji)c8-c20脂(zhi)族(zu)(zu)尾(wei)(wei)基(ji)(ji)(ji)(ji)(ji)的(de)(de)(de)(de)(de)(de)化(hua)合(he)(he)物的(de)(de)(de)(de)(de)(de)混(hun)合(he)(he)物或(huo)(huo)(huo)(huo)(huo)兩(liang)種(zhong)或(huo)(huo)(huo)(huo)(huo)更(geng)(geng)多(duo)種(zhong)如本文中(zhong)所描述(shu)的(de)(de)(de)(de)(de)(de)具(ju)(ju)有c7-c19脂(zhi)族(zu)(zu)r基(ji)(ji)(ji)(ji)(ji)團的(de)(de)(de)(de)(de)(de)肌(ji)氨(an)酸(suan)衍生(sheng)(sheng)物的(de)(de)(de)(de)(de)(de)混(hun)合(he)(he)物，其(qi)限制(zhi)條件為(wei)約(yue)75重(zhong)量(liang)％或(huo)(huo)(huo)(huo)(huo)更(geng)(geng)多(duo)(例(li)如，約(yue)80重(zhong)量(liang)％或(huo)(huo)(huo)(huo)(huo)更(geng)(geng)多(duo)、約(yue)85重(zhong)量(liang)％或(huo)(huo)(huo)(huo)(huo)更(geng)(geng)多(duo)、約(yue)90重(zhong)量(liang)％或(huo)(huo)(huo)(huo)(huo)更(geng)(geng)多(duo)、或(huo)(huo)(huo)(huo)(huo)約(yue)95重(zhong)量(liang)％或(huo)(huo)(huo)(huo)(huo)更(geng)(geng)多(duo))的(de)(de)(de)(de)(de)(de)所述(shu)化(hua)合(he)(he)物包(bao)(bao)(bao)含(han)陰(yin)(yin)離(li)(li)子(zi)(zi)型(xing)頭(tou)基(ji)(ji)(ji)(ji)(ji)以及(ji)c8-c14脂(zhi)族(zu)(zu)尾(wei)(wei)基(ji)(ji)(ji)(ji)(ji)或(huo)(huo)(huo)(huo)(huo)為(wei)具(ju)(ju)有c8-c13脂(zhi)族(zu)(zu)r基(ji)(ji)(ji)(ji)(ji)團的(de)(de)(de)(de)(de)(de)肌(ji)氨(an)酸(suan)衍生(sheng)(sheng)物。

拋(pao)光組(zu)合(he)物(wu)可(ke)包(bao)含(han)(han)任何適合(he)量的(de)(de)(de)鈷腐(fu)蝕抑制劑(ji)(ji)。拋(pao)光組(zu)合(he)物(wu)可(ke)包(bao)含(han)(han)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)1ppm或(huo)(huo)更(geng)多的(de)(de)(de)鈷腐(fu)蝕抑制劑(ji)(ji)，例如，約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)5ppm或(huo)(huo)更(geng)多、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)10ppm或(huo)(huo)更(geng)多、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)20ppm或(huo)(huo)更(geng)多、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)30ppm或(huo)(huo)更(geng)多、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)40ppm或(huo)(huo)更(geng)多、或(huo)(huo)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)50ppm或(huo)(huo)更(geng)多。可(ke)選擇地(di)，或(huo)(huo)者(zhe)此外，拋(pao)光組(zu)合(he)物(wu)可(ke)包(bao)含(han)(han)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)1000ppm或(huo)(huo)更(geng)少(shao)(shao)的(de)(de)(de)鈷腐(fu)蝕抑制劑(ji)(ji)，例如，約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)900ppm或(huo)(huo)更(geng)少(shao)(shao)、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)800ppm或(huo)(huo)更(geng)少(shao)(shao)、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)700ppm或(huo)(huo)更(geng)少(shao)(shao)、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)600ppm或(huo)(huo)更(geng)少(shao)(shao)、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)500ppm或(huo)(huo)更(geng)少(shao)(shao)、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)400ppm或(huo)(huo)更(geng)少(shao)(shao)、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)300ppm或(huo)(huo)更(geng)少(shao)(shao)、或(huo)(huo)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)200ppm或(huo)(huo)更(geng)少(shao)(shao)。因此，拋(pao)光組(zu)合(he)物(wu)可(ke)包(bao)含(han)(han)由前(qian)述端點中(zhong)的(de)(de)(de)任兩者(zhe)界定的(de)(de)(de)量的(de)(de)(de)鈷腐(fu)蝕抑制劑(ji)(ji)。舉例而言，拋(pao)光組(zu)合(he)物(wu)可(ke)包(bao)含(han)(han)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)1ppm至(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)1000ppm的(de)(de)(de)鈷腐(fu)蝕抑制劑(ji)(ji)、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)10ppm至(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)900ppm、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)10ppm至(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)800ppm、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)10ppm至(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)700ppm、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)10ppm至(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)600ppm、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)10ppm至(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)500ppm、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)10ppm至(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)400ppm、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)20ppm至(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)300ppm、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)30ppm至(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)200ppm、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)30ppm至(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)150ppm、約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)30ppm至(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)100ppm、或(huo)(huo)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)50ppm至(zhi)(zhi)約(yue)(yue)(yue)(yue)(yue)(yue)(yue)(yue)100ppm。

應當理解，取決于拋光組(zu)合物的(de)ph，前述肌氨酸(suan)衍生(sheng)物可以鹽(yan)(例如，金(jin)屬鹽(yan)、銨鹽(yan)或(huo)(huo)其(qi)(qi)(qi)類似者(zhe))的(de)形(xing)式、酸(suan)的(de)形(xing)式或(huo)(huo)作為其(qi)(qi)(qi)酸(suan)與鹽(yan)的(de)混合物而存(cun)在。肌氨酸(suan)衍生(sheng)物的(de)酸(suan)或(huo)(huo)鹽(yan)形(xing)式或(huo)(huo)其(qi)(qi)(qi)混合物適(shi)合用于制備(bei)拋光組(zu)合物。

拋光組合(he)物(wu)包含使過渡(du)金屬氧(yang)(yang)化(hua)的(de)氧(yang)(yang)化(hua)劑(ji)(ji)(ji)(ji)。優選(xuan)地，氧(yang)(yang)化(hua)劑(ji)(ji)(ji)(ji)使鈷(gu)氧(yang)(yang)化(hua)。氧(yang)(yang)化(hua)劑(ji)(ji)(ji)(ji)可為在拋光組合(he)物(wu)的(de)ph下具有(you)足夠(gou)量值的(de)氧(yang)(yang)化(hua)電(dian)位(wei)以(yi)使鈷(gu)氧(yang)(yang)化(hua)的(de)任何適合(he)的(de)氧(yang)(yang)化(hua)劑(ji)(ji)(ji)(ji)。在優選(xuan)實施方(fang)式中(zhong)，氧(yang)(yang)化(hua)劑(ji)(ji)(ji)(ji)為過氧(yang)(yang)化(hua)氫。

拋光組合物可包含任何適合量(liang)的氧化劑。拋光組合物優(you)選地(di)包含約(yue)(yue)10重(zhong)量(liang)％或(huo)(huo)更少(shao)(shao)(例如，約(yue)(yue)8重(zhong)量(liang)％或(huo)(huo)更少(shao)(shao)、約(yue)(yue)6重(zhong)量(liang)％或(huo)(huo)更少(shao)(shao)、約(yue)(yue)4重(zhong)量(liang)％或(huo)(huo)更少(shao)(shao)、約(yue)(yue)2重(zhong)量(liang)％或(huo)(huo)更少(shao)(shao)、約(yue)(yue)1重(zhong)量(liang)％或(huo)(huo)更少(shao)(shao)、或(huo)(huo)約(yue)(yue)0.5重(zhong)量(liang)％或(huo)(huo)更少(shao)(shao))的過氧化氫。

拋(pao)光(guang)組合(he)(he)(he)物(wu)(wu)可(ke)(ke)具有(you)任何適合(he)(he)(he)的ph。典型地，拋(pao)光(guang)組合(he)(he)(he)物(wu)(wu)可(ke)(ke)具有(you)約(yue)(yue)(yue)(yue)(yue)(yue)3或(huo)(huo)(huo)(huo)(huo)(huo)更(geng)(geng)(geng)(geng)(geng)大的ph，例(li)如(ru)，約(yue)(yue)(yue)(yue)(yue)(yue)3.5或(huo)(huo)(huo)(huo)(huo)(huo)更(geng)(geng)(geng)(geng)(geng)大、約(yue)(yue)(yue)(yue)(yue)(yue)4或(huo)(huo)(huo)(huo)(huo)(huo)更(geng)(geng)(geng)(geng)(geng)大、約(yue)(yue)(yue)(yue)(yue)(yue)4.5或(huo)(huo)(huo)(huo)(huo)(huo)更(geng)(geng)(geng)(geng)(geng)大、約(yue)(yue)(yue)(yue)(yue)(yue)5或(huo)(huo)(huo)(huo)(huo)(huo)更(geng)(geng)(geng)(geng)(geng)大、約(yue)(yue)(yue)(yue)(yue)(yue)5.5或(huo)(huo)(huo)(huo)(huo)(huo)更(geng)(geng)(geng)(geng)(geng)大、約(yue)(yue)(yue)(yue)(yue)(yue)6或(huo)(huo)(huo)(huo)(huo)(huo)更(geng)(geng)(geng)(geng)(geng)大、約(yue)(yue)(yue)(yue)(yue)(yue)6.5或(huo)(huo)(huo)(huo)(huo)(huo)更(geng)(geng)(geng)(geng)(geng)大、或(huo)(huo)(huo)(huo)(huo)(huo)約(yue)(yue)(yue)(yue)(yue)(yue)7或(huo)(huo)(huo)(huo)(huo)(huo)更(geng)(geng)(geng)(geng)(geng)大。可(ke)(ke)選擇地，或(huo)(huo)(huo)(huo)(huo)(huo)者此外，拋(pao)光(guang)組合(he)(he)(he)物(wu)(wu)可(ke)(ke)具有(you)約(yue)(yue)(yue)(yue)(yue)(yue)8.5或(huo)(huo)(huo)(huo)(huo)(huo)更(geng)(geng)(geng)(geng)(geng)小(xiao)(xiao)(xiao)的ph，例(li)如(ru)，約(yue)(yue)(yue)(yue)(yue)(yue)8.4或(huo)(huo)(huo)(huo)(huo)(huo)更(geng)(geng)(geng)(geng)(geng)小(xiao)(xiao)(xiao)、約(yue)(yue)(yue)(yue)(yue)(yue)8.3或(huo)(huo)(huo)(huo)(huo)(huo)更(geng)(geng)(geng)(geng)(geng)小(xiao)(xiao)(xiao)、約(yue)(yue)(yue)(yue)(yue)(yue)8.2或(huo)(huo)(huo)(huo)(huo)(huo)更(geng)(geng)(geng)(geng)(geng)小(xiao)(xiao)(xiao)、約(yue)(yue)(yue)(yue)(yue)(yue)8.1或(huo)(huo)(huo)(huo)(huo)(huo)更(geng)(geng)(geng)(geng)(geng)小(xiao)(xiao)(xiao)、或(huo)(huo)(huo)(huo)(huo)(huo)約(yue)(yue)(yue)(yue)(yue)(yue)8或(huo)(huo)(huo)(huo)(huo)(huo)更(geng)(geng)(geng)(geng)(geng)小(xiao)(xiao)(xiao)。因此，拋(pao)光(guang)組合(he)(he)(he)物(wu)(wu)可(ke)(ke)具有(you)由針對(dui)拋(pao)光(guang)組合(he)(he)(he)物(wu)(wu)所敘(xu)述的以上端(duan)點中的任兩者界定的ph。舉例(li)而言，拋(pao)光(guang)組合(he)(he)(he)物(wu)(wu)可(ke)(ke)具有(you)約(yue)(yue)(yue)(yue)(yue)(yue)3至約(yue)(yue)(yue)(yue)(yue)(yue)8.5的ph，例(li)如(ru)，約(yue)(yue)(yue)(yue)(yue)(yue)3.5至約(yue)(yue)(yue)(yue)(yue)(yue)8.5、約(yue)(yue)(yue)(yue)(yue)(yue)4至約(yue)(yue)(yue)(yue)(yue)(yue)8.5、約(yue)(yue)(yue)(yue)(yue)(yue)4.5至約(yue)(yue)(yue)(yue)(yue)(yue)8.5、約(yue)(yue)(yue)(yue)(yue)(yue)5至約(yue)(yue)(yue)(yue)(yue)(yue)8.5、約(yue)(yue)(yue)(yue)(yue)(yue)5.5至約(yue)(yue)(yue)(yue)(yue)(yue)8.5、約(yue)(yue)(yue)(yue)(yue)(yue)6至約(yue)(yue)(yue)(yue)(yue)(yue)8.5、約(yue)(yue)(yue)(yue)(yue)(yue)6.5至約(yue)(yue)(yue)(yue)(yue)(yue)8.5、約(yue)(yue)(yue)(yue)(yue)(yue)6.5至約(yue)(yue)(yue)(yue)(yue)(yue)8.4、約(yue)(yue)(yue)(yue)(yue)(yue)6.5至約(yue)(yue)(yue)(yue)(yue)(yue)8.3、約(yue)(yue)(yue)(yue)(yue)(yue)6.5至約(yue)(yue)(yue)(yue)(yue)(yue)8.2、約(yue)(yue)(yue)(yue)(yue)(yue)6.5至約(yue)(yue)(yue)(yue)(yue)(yue)8.1、或(huo)(huo)(huo)(huo)(huo)(huo)約(yue)(yue)(yue)(yue)(yue)(yue)6.5至約(yue)(yue)(yue)(yue)(yue)(yue)8。

可使用任何(he)適(shi)合的(de)(de)酸或堿(jian)來調整(zheng)拋光組合物的(de)(de)ph。適(shi)合的(de)(de)酸的(de)(de)非(fei)(fei)限制(zhi)性(xing)實例(li)包(bao)括(kuo)硝(xiao)酸、硫酸、磷酸、以及諸(zhu)如(ru)乙酸的(de)(de)有(you)機酸。適(shi)合的(de)(de)堿(jian)的(de)(de)非(fei)(fei)限制(zhi)性(xing)實例(li)包(bao)括(kuo)氫氧(yang)化鈉(na)、氫氧(yang)化鉀(jia)、及氫氧(yang)化銨。

化學機械拋光組(zu)合(he)物任選地進一步包含(han)一種或(huo)多(duo)種添加(jia)劑(ji)。示例性(xing)的添加(jia)劑(ji)包括調理(li)劑(ji)、酸(例如(ru)，磺(huang)酸)、絡合(he)劑(ji)(例如(ru)，陰(yin)離子(zi)型聚合(he)物絡合(he)劑(ji))、螯合(he)劑(ji)、殺生物劑(ji)、阻垢劑(ji)、分散劑(ji)等。

當存在時，殺生物(wu)(wu)(wu)劑可(ke)為(wei)(wei)任何(he)適(shi)合(he)的(de)殺生物(wu)(wu)(wu)劑且可(ke)以任何(he)適(shi)合(he)的(de)量(liang)(liang)存在于拋光組合(he)物(wu)(wu)(wu)中。適(shi)合(he)的(de)殺生物(wu)(wu)(wu)劑為(wei)(wei)異噻唑啉酮殺生物(wu)(wu)(wu)劑。殺生物(wu)(wu)(wu)劑在拋光組合(he)物(wu)(wu)(wu)中的(de)量(liang)(liang)典型(xing)地為(wei)(wei)約(yue)1ppm至約(yue)50ppm，優(you)選地為(wei)(wei)約(yue)10ppm至約(yue)40ppm，更優(you)選地為(wei)(wei)約(yue)20ppm至約(yue)30ppm。

可(ke)通(tong)過任何(he)適合(he)(he)的(de)(de)(de)技(ji)術來制(zhi)備拋(pao)光組(zu)(zu)(zu)(zu)(zu)合(he)(he)物(wu)，其(qi)中(zhong)許多技(ji)術是本(ben)(ben)領域技(ji)術人員已知的(de)(de)(de)。可(ke)以(yi)分批或(huo)連續工(gong)藝來制(zhi)備拋(pao)光組(zu)(zu)(zu)(zu)(zu)合(he)(he)物(wu)。通(tong)常，可(ke)通(tong)過以(yi)任何(he)次序組(zu)(zu)(zu)(zu)(zu)合(he)(he)拋(pao)光組(zu)(zu)(zu)(zu)(zu)合(he)(he)物(wu)的(de)(de)(de)組(zu)(zu)(zu)(zu)(zu)分來制(zhi)備拋(pao)光組(zu)(zu)(zu)(zu)(zu)合(he)(he)物(wu)。如(ru)(ru)本(ben)(ben)文中(zhong)所使用的(de)(de)(de)術語“組(zu)(zu)(zu)(zu)(zu)分”包括(kuo)單獨的(de)(de)(de)成(cheng)分(例如(ru)(ru)，研(yan)磨(mo)劑(ji)(ji)、鈷(gu)促進(jin)劑(ji)(ji)、鈷(gu)腐(fu)蝕抑制(zhi)劑(ji)(ji)、氧化劑(ji)(ji)、任選的(de)(de)(de)ph調節劑(ji)(ji)等(deng))以(yi)及(ji)成(cheng)分(例如(ru)(ru)，研(yan)磨(mo)劑(ji)(ji)、鈷(gu)促進(jin)劑(ji)(ji)、鈷(gu)腐(fu)蝕抑制(zhi)劑(ji)(ji)、氧化劑(ji)(ji)、任選的(de)(de)(de)ph調節劑(ji)(ji)等(deng))的(de)(de)(de)任何(he)組(zu)(zu)(zu)(zu)(zu)合(he)(he)。

舉例(li)而言(yan)，可(ke)將(jiang)研磨劑(ji)分(fen)散于水中(zhong)(zhong)。然(ran)后，可(ke)通過(guo)能夠將(jiang)組分(fen)結(jie)合(he)到拋(pao)光(guang)組合(he)物(wu)中(zhong)(zhong)的(de)任(ren)何方法來添(tian)(tian)(tian)加及混合(he)鈷(gu)促進劑(ji)和鈷(gu)腐(fu)蝕抑制(zhi)劑(ji)。可(ke)在制(zhi)備(bei)(bei)拋(pao)光(guang)組合(he)物(wu)期間的(de)任(ren)何時(shi)刻(ke)添(tian)(tian)(tian)加氧化(hua)劑(ji)。可(ke)在使用(yong)之前(qian)制(zhi)備(bei)(bei)拋(pao)光(guang)組合(he)物(wu)，其中(zhong)(zhong)恰(qia)好在使用(yong)之前(qian)(例(li)如(ru)，在使用(yong)之前(qian)約1分(fen)鐘(zhong)內(nei)，或(huo)在使用(yong)之前(qian)約1小(xiao)時(shi)內(nei)，在使用(yong)之前(qian)約7天(tian)內(nei)，或(huo)在使用(yong)之前(qian)約14天(tian)內(nei))將(jiang)一種或(huo)多種組分(fen)(諸如(ru)氧化(hua)劑(ji))添(tian)(tian)(tian)加至(zhi)拋(pao)光(guang)組合(he)物(wu)。也可(ke)通過(guo)在拋(pao)光(guang)操作(zuo)期間將(jiang)組分(fen)混合(he)于基板的(de)表面處來制(zhi)備(bei)(bei)拋(pao)光(guang)組合(he)物(wu)。

可(ke)(ke)將(jiang)(jiang)拋(pao)(pao)光組(zu)(zu)(zu)(zu)合(he)(he)(he)物(wu)作(zuo)為包含研磨劑(ji)(ji)(ji)、鈷促進劑(ji)(ji)(ji)、鈷腐蝕抑制劑(ji)(ji)(ji)、氧(yang)化劑(ji)(ji)(ji)、任選(xuan)(xuan)的(de)(de)(de)ph調節(jie)劑(ji)(ji)(ji)及水(shui)的(de)(de)(de)單(dan)包裝體系供(gong)應(ying)。可(ke)(ke)選(xuan)(xuan)擇地，可(ke)(ke)將(jiang)(jiang)研磨劑(ji)(ji)(ji)作(zuo)為在(zai)(zai)(zai)水(shui)中的(de)(de)(de)分(fen)散(san)體供(gong)應(ying)于第一容(rong)(rong)(rong)器(qi)(qi)中，且可(ke)(ke)將(jiang)(jiang)鈷促進劑(ji)(ji)(ji)、鈷腐蝕抑制劑(ji)(ji)(ji)、氧(yang)化劑(ji)(ji)(ji)、及任選(xuan)(xuan)的(de)(de)(de)ph調節(jie)劑(ji)(ji)(ji)以干(gan)燥形(xing)(xing)式或作(zuo)為在(zai)(zai)(zai)水(shui)中的(de)(de)(de)溶(rong)液或分(fen)散(san)體供(gong)應(ying)于第二容(rong)(rong)(rong)器(qi)(qi)中。合(he)(he)(he)意的(de)(de)(de)是(shi)，相對(dui)于拋(pao)(pao)光組(zu)(zu)(zu)(zu)合(he)(he)(he)物(wu)的(de)(de)(de)其(qi)(qi)(qi)它(ta)組(zu)(zu)(zu)(zu)分(fen)單(dan)獨地供(gong)應(ying)氧(yang)化劑(ji)(ji)(ji)，且在(zai)(zai)(zai)使(shi)(shi)用前不久(例如，在(zai)(zai)(zai)使(shi)(shi)用之(zhi)前2周或2周內(nei)(nei)，在(zai)(zai)(zai)使(shi)(shi)用之(zhi)前1周或1周內(nei)(nei)，在(zai)(zai)(zai)使(shi)(shi)用之(zhi)前1天或1天內(nei)(nei)，在(zai)(zai)(zai)使(shi)(shi)用之(zhi)前1小(xiao)時或1小(xiao)時內(nei)(nei)，在(zai)(zai)(zai)使(shi)(shi)用之(zhi)前10分(fen)鐘(zhong)或10分(fen)鐘(zhong)內(nei)(nei)，或在(zai)(zai)(zai)使(shi)(shi)用之(zhi)前1分(fen)鐘(zhong)或1分(fen)鐘(zhong)內(nei)(nei))例如由最終使(shi)(shi)用者(zhe)(zhe)將(jiang)(jiang)之(zhi)與拋(pao)(pao)光組(zu)(zu)(zu)(zu)合(he)(he)(he)物(wu)的(de)(de)(de)其(qi)(qi)(qi)它(ta)組(zu)(zu)(zu)(zu)分(fen)進行組(zu)(zu)(zu)(zu)合(he)(he)(he)。第一或第二容(rong)(rong)(rong)器(qi)(qi)中的(de)(de)(de)組(zu)(zu)(zu)(zu)分(fen)可(ke)(ke)呈干(gan)燥形(xing)(xing)式，而其(qi)(qi)(qi)它(ta)容(rong)(rong)(rong)器(qi)(qi)中的(de)(de)(de)組(zu)(zu)(zu)(zu)分(fen)可(ke)(ke)呈水(shui)性分(fen)散(san)體形(xing)(xing)式。此外，適合(he)(he)(he)的(de)(de)(de)是(shi)使(shi)(shi)第一及第二容(rong)(rong)(rong)器(qi)(qi)中的(de)(de)(de)組(zu)(zu)(zu)(zu)分(fen)具(ju)有(you)不同的(de)(de)(de)ph值，或者(zhe)(zhe)，可(ke)(ke)選(xuan)(xuan)擇地，具(ju)有(you)基(ji)本上相似或甚(shen)至相等的(de)(de)(de)ph值。拋(pao)(pao)光組(zu)(zu)(zu)(zu)合(he)(he)(he)物(wu)的(de)(de)(de)各組(zu)(zu)(zu)(zu)分(fen)的(de)(de)(de)其(qi)(qi)(qi)它(ta)的(de)(de)(de)兩個(ge)容(rong)(rong)(rong)器(qi)(qi)組(zu)(zu)(zu)(zu)合(he)(he)(he)、或者(zhe)(zhe)三(san)個(ge)或更多個(ge)容(rong)(rong)(rong)器(qi)(qi)組(zu)(zu)(zu)(zu)合(he)(he)(he)在(zai)(zai)(zai)本領域普通(tong)技術(shu)人員的(de)(de)(de)知識范圍內(nei)(nei)。

本發(fa)明的(de)(de)(de)(de)(de)(de)拋(pao)(pao)光組(zu)(zu)(zu)合(he)(he)物(wu)(wu)(wu)還(huan)可(ke)作為(wei)濃(nong)(nong)(nong)縮物(wu)(wu)(wu)提供，該濃(nong)(nong)(nong)縮物(wu)(wu)(wu)意圖在(zai)使(shi)用(yong)之前用(yong)適(shi)(shi)量(liang)(liang)的(de)(de)(de)(de)(de)(de)水(shui)稀釋(shi)。在(zai)這(zhe)樣的(de)(de)(de)(de)(de)(de)實施(shi)方式中，拋(pao)(pao)光組(zu)(zu)(zu)合(he)(he)物(wu)(wu)(wu)濃(nong)(nong)(nong)縮物(wu)(wu)(wu)可(ke)包含(han)研(yan)(yan)磨劑(ji)(ji)(ji)(ji)(ji)、鈷(gu)促進劑(ji)(ji)(ji)(ji)(ji)、鈷(gu)腐蝕(shi)抑(yi)(yi)制劑(ji)(ji)(ji)(ji)(ji)及(ji)任選(xuan)的(de)(de)(de)(de)(de)(de)ph調節(jie)劑(ji)(ji)(ji)(ji)(ji)、具有(you)或(huo)不具有(you)氧(yang)化(hua)劑(ji)(ji)(ji)(ji)(ji)，其量(liang)(liang)使(shi)得(de)在(zai)用(yong)適(shi)(shi)量(liang)(liang)的(de)(de)(de)(de)(de)(de)水(shui)及(ji)氧(yang)化(hua)劑(ji)(ji)(ji)(ji)(ji)(如(ru)果尚(shang)未以適(shi)(shi)當的(de)(de)(de)(de)(de)(de)量(liang)(liang)存(cun)在(zai)的(de)(de)(de)(de)(de)(de)話)稀釋(shi)濃(nong)(nong)(nong)縮物(wu)(wu)(wu)時，拋(pao)(pao)光組(zu)(zu)(zu)合(he)(he)物(wu)(wu)(wu)的(de)(de)(de)(de)(de)(de)各(ge)(ge)組(zu)(zu)(zu)分(fen)(fen)就將(jiang)以在(zai)上(shang)文針(zhen)對(dui)各(ge)(ge)組(zu)(zu)(zu)分(fen)(fen)的(de)(de)(de)(de)(de)(de)所(suo)敘述(shu)的(de)(de)(de)(de)(de)(de)適(shi)(shi)當范圍(wei)內的(de)(de)(de)(de)(de)(de)量(liang)(liang)存(cun)在(zai)于拋(pao)(pao)光組(zu)(zu)(zu)合(he)(he)物(wu)(wu)(wu)中。舉(ju)例而(er)言，研(yan)(yan)磨劑(ji)(ji)(ji)(ji)(ji)、鈷(gu)促進劑(ji)(ji)(ji)(ji)(ji)、鈷(gu)腐蝕(shi)抑(yi)(yi)制劑(ji)(ji)(ji)(ji)(ji)及(ji)任選(xuan)的(de)(de)(de)(de)(de)(de)ph調節(jie)劑(ji)(ji)(ji)(ji)(ji)可(ke)各(ge)(ge)自以上(shang)文針(zhen)對(dui)各(ge)(ge)組(zu)(zu)(zu)分(fen)(fen)所(suo)敘述(shu)的(de)(de)(de)(de)(de)(de)濃(nong)(nong)(nong)度的(de)(de)(de)(de)(de)(de)約(yue)(yue)2倍(bei)(例如(ru)，約(yue)(yue)3倍(bei)、約(yue)(yue)4倍(bei)、或(huo)約(yue)(yue)5倍(bei))大的(de)(de)(de)(de)(de)(de)量(liang)(liang)的(de)(de)(de)(de)(de)(de)濃(nong)(nong)(nong)度而(er)存(cun)在(zai)，使(shi)得(de)當用(yong)等體積(ji)(ji)的(de)(de)(de)(de)(de)(de)(例如(ru)，分(fen)(fen)別(bie)用(yong)2倍(bei)等體積(ji)(ji)的(de)(de)(de)(de)(de)(de)水(shui)、3倍(bei)等體積(ji)(ji)的(de)(de)(de)(de)(de)(de)水(shui)、或(huo)4倍(bei)等體積(ji)(ji)的(de)(de)(de)(de)(de)(de)水(shui))以及(ji)適(shi)(shi)當量(liang)(liang)的(de)(de)(de)(de)(de)(de)氧(yang)化(hua)劑(ji)(ji)(ji)(ji)(ji)稀釋(shi)濃(nong)(nong)(nong)縮物(wu)(wu)(wu)時，各(ge)(ge)組(zu)(zu)(zu)分(fen)(fen)將(jiang)以在(zai)上(shang)文針(zhen)對(dui)各(ge)(ge)組(zu)(zu)(zu)分(fen)(fen)所(suo)闡述(shu)的(de)(de)(de)(de)(de)(de)范圍(wei)內的(de)(de)(de)(de)(de)(de)量(liang)(liang)存(cun)在(zai)于拋(pao)(pao)光組(zu)(zu)(zu)合(he)(he)物(wu)(wu)(wu)中。此外，如(ru)本領域(yu)普通(tong)技術(shu)人員(yuan)將(jiang)理(li)解的(de)(de)(de)(de)(de)(de)，濃(nong)(nong)(nong)縮物(wu)(wu)(wu)可(ke)含(han)有(you)存(cun)在(zai)于最終(zhong)拋(pao)(pao)光組(zu)(zu)(zu)合(he)(he)物(wu)(wu)(wu)中的(de)(de)(de)(de)(de)(de)適(shi)(shi)當分(fen)(fen)率的(de)(de)(de)(de)(de)(de)水(shui)，以便確保其它組(zu)(zu)(zu)分(fen)(fen)至少部分(fen)(fen)地(di)或(huo)完全地(di)溶解于濃(nong)(nong)(nong)縮物(wu)(wu)(wu)中。

本(ben)發明(ming)還提供化(hua)學機械拋(pao)光(guang)基(ji)板(ban)的方法，包(bao)括(kuo)：(i)使基(ji)板(ban)與如(ru)本(ben)文中(zhong)所描述的拋(pao)光(guang)墊(dian)(dian)及(ji)化(hua)學機械拋(pao)光(guang)組(zu)合物(wu)接觸；(ii)相(xiang)對(dui)于基(ji)板(ban)移(yi)動拋(pao)光(guang)墊(dian)(dian)，其中(zhong)化(hua)學機械拋(pao)光(guang)組(zu)合物(wu)在拋(pao)光(guang)墊(dian)(dian)與基(ji)板(ban)之間(jian)；及(ji)(iii)磨除(chu)基(ji)板(ban)的至少(shao)一部(bu)分(fen)以拋(pao)光(guang)該基(ji)板(ban)。

待(dai)使用(yong)本發(fa)明的(de)(de)(de)(de)(de)方法拋光的(de)(de)(de)(de)(de)基(ji)(ji)(ji)(ji)板可為(wei)任何適(shi)合(he)(he)的(de)(de)(de)(de)(de)基(ji)(ji)(ji)(ji)板，尤其(qi)是含(han)有(you)鈷(gu)的(de)(de)(de)(de)(de)基(ji)(ji)(ji)(ji)板。優選(xuan)的(de)(de)(de)(de)(de)基(ji)(ji)(ji)(ji)板包含(han)至(zhi)少一個層(ceng)，尤其(qi)是用(yong)于拋光的(de)(de)(de)(de)(de)暴露(lu)層(ceng)，其(qi)包含(han)鈷(gu)、基(ji)(ji)(ji)(ji)本上由(you)鈷(gu)組(zu)成(cheng)或(huo)(huo)(huo)由(you)鈷(gu)組(zu)成(cheng)，使得至(zhi)少一部(bu)分的(de)(de)(de)(de)(de)鈷(gu)被磨除(chu)(即移除(chu))以(yi)拋光該基(ji)(ji)(ji)(ji)板。特別(bie)適(shi)合(he)(he)的(de)(de)(de)(de)(de)基(ji)(ji)(ji)(ji)板包括(kuo)但(dan)不限(xian)于用(yong)于半導體工業中的(de)(de)(de)(de)(de)晶(jing)片(pian)(pian)。晶(jing)片(pian)(pian)典型(xing)地(di)包含(han)(例(li)如)以(yi)下(xia)物(wu)(wu)(wu)(wu)質或(huo)(huo)(huo)由(you)(例(li)如)以(yi)下(xia)物(wu)(wu)(wu)(wu)質組(zu)成(cheng)：金(jin)屬(shu)(shu)、金(jin)屬(shu)(shu)氧化物(wu)(wu)(wu)(wu)、金(jin)屬(shu)(shu)氮化物(wu)(wu)(wu)(wu)、金(jin)屬(shu)(shu)復合(he)(he)物(wu)(wu)(wu)(wu)、金(jin)屬(shu)(shu)合(he)(he)金(jin)、低(di)介電(dian)材(cai)料、或(huo)(huo)(huo)者它們的(de)(de)(de)(de)(de)組(zu)合(he)(he)。本發(fa)明的(de)(de)(de)(de)(de)方法也可用(yong)于拋光包含(han)鈷(gu)及(ji)鈷(gu)合(he)(he)金(jin)的(de)(de)(de)(de)(de)基(ji)(ji)(ji)(ji)板，其(qi)可用(yong)于燃氣輪機及(ji)噴氣式飛機發(fa)動機用(yong)的(de)(de)(de)(de)(de)渦(wo)輪葉(xie)片(pian)(pian)、整(zheng)形(xing)外科(ke)植(zhi)入物(wu)(wu)(wu)(wu)、修(xiu)(xiu)復用(yong)部(bu)件(諸如髖(kuan)部(bu)及(ji)膝部(bu)的(de)(de)(de)(de)(de)替換物(wu)(wu)(wu)(wu))、牙齒修(xiu)(xiu)復物(wu)(wu)(wu)(wu)、高(gao)速鋼(gang)鉆頭及(ji)永磁(ci)鐵中。

本(ben)發明的(de)(de)(de)拋(pao)(pao)光方法特(te)別適于結合(he)(he)化(hua)學機(ji)械(xie)拋(pao)(pao)光(cmp)裝(zhuang)置(zhi)而(er)使用。典型地，該裝(zhuang)置(zhi)包括：平臺(tai)(tai)，其在(zai)使用中(zhong)時處于運(yun)(yun)動(dong)(dong)中(zhong)且(qie)具(ju)有由軌道、線性或圓周運(yun)(yun)動(dong)(dong)引起的(de)(de)(de)速度(du)；拋(pao)(pao)光墊(dian)(dian)，其與平臺(tai)(tai)接(jie)觸且(qie)在(zai)運(yun)(yun)動(dong)(dong)中(zhong)時隨(sui)著平臺(tai)(tai)而(er)移動(dong)(dong)；及(ji)載體，其固(gu)持待通過(guo)接(jie)觸拋(pao)(pao)光墊(dian)(dian)的(de)(de)(de)表面(mian)且(qie)相(xiang)對于拋(pao)(pao)光墊(dian)(dian)的(de)(de)(de)表面(mian)移動(dong)(dong)而(er)拋(pao)(pao)光的(de)(de)(de)基(ji)板(ban)。基(ji)板(ban)的(de)(de)(de)拋(pao)(pao)光通過(guo)如下方式進行(xing)：將基(ji)板(ban)置(zhi)放成與拋(pao)(pao)光墊(dian)(dian)及(ji)本(ben)發明的(de)(de)(de)拋(pao)(pao)光組合(he)(he)物(wu)接(jie)觸，且(qie)然(ran)后使拋(pao)(pao)光墊(dian)(dian)相(xiang)對于基(ji)板(ban)移動(dong)(dong)，以便磨除基(ji)板(ban)的(de)(de)(de)至少一部分(fen)以拋(pao)(pao)光該基(ji)板(ban)。

基板(ban)可利(li)用該化(hua)學(xue)機械拋(pao)光(guang)組合(he)(he)物以及(ji)任何適(shi)宜的(de)(de)拋(pao)光(guang)墊(例(li)如(ru)，拋(pao)光(guang)表面(mian))來平坦化(hua)或拋(pao)光(guang)。適(shi)宜的(de)(de)拋(pao)光(guang)墊包(bao)括(例(li)如(ru))紡織及(ji)非紡織的(de)(de)拋(pao)光(guang)墊。而且(qie)，適(shi)宜的(de)(de)拋(pao)光(guang)墊可包(bao)含(han)具有(you)各種密(mi)度(du)、硬度(du)、厚度(du)、壓縮(suo)性、壓縮(suo)回彈能力(li)、及(ji)壓縮(suo)模量的(de)(de)任何適(shi)宜的(de)(de)聚(ju)(ju)(ju)(ju)(ju)(ju)合(he)(he)物。適(shi)宜的(de)(de)聚(ju)(ju)(ju)(ju)(ju)(ju)合(he)(he)物包(bao)括(例(li)如(ru))聚(ju)(ju)(ju)(ju)(ju)(ju)氯乙烯(xi)(xi)(xi)(xi)、聚(ju)(ju)(ju)(ju)(ju)(ju)氟(fu)乙烯(xi)(xi)(xi)(xi)、尼龍(long)、氟(fu)碳化(hua)合(he)(he)物、聚(ju)(ju)(ju)(ju)(ju)(ju)碳酸酯、聚(ju)(ju)(ju)(ju)(ju)(ju)酯、聚(ju)(ju)(ju)(ju)(ju)(ju)丙烯(xi)(xi)(xi)(xi)酸酯、聚(ju)(ju)(ju)(ju)(ju)(ju)醚、聚(ju)(ju)(ju)(ju)(ju)(ju)乙烯(xi)(xi)(xi)(xi)、聚(ju)(ju)(ju)(ju)(ju)(ju)酰胺、聚(ju)(ju)(ju)(ju)(ju)(ju)氨酯、聚(ju)(ju)(ju)(ju)(ju)(ju)苯乙烯(xi)(xi)(xi)(xi)、聚(ju)(ju)(ju)(ju)(ju)(ju)丙烯(xi)(xi)(xi)(xi)、聚(ju)(ju)(ju)(ju)(ju)(ju)異氰脲酸酯、其共形成產物、及(ji)其混合(he)(he)物。

合(he)意的是，該cmp裝(zhuang)置進(jin)一步包括(kuo)原位拋(pao)光(guang)終點(dian)檢測系(xi)統，其中(zhong)的許多是本領(ling)域(yu)中(zhong)已知的。通過分析從(cong)工(gong)(gong)件(jian)表面反(fan)射的光(guang)或其它輻射來檢查和監控(kong)拋(pao)光(guang)過程(cheng)(cheng)的技術是本領(ling)域(yu)中(zhong)已知的。這樣(yang)的方法描述(shu)于(yu)例如美(mei)(mei)國(guo)(guo)(guo)(guo)專(zhuan)利(li)5,196,353、美(mei)(mei)國(guo)(guo)(guo)(guo)專(zhuan)利(li)5,433,651、美(mei)(mei)國(guo)(guo)(guo)(guo)專(zhuan)利(li)5,609,511、美(mei)(mei)國(guo)(guo)(guo)(guo)專(zhuan)利(li)5,643,046、美(mei)(mei)國(guo)(guo)(guo)(guo)專(zhuan)利(li)5,658,183、美(mei)(mei)國(guo)(guo)(guo)(guo)專(zhuan)利(li)5,730,642、美(mei)(mei)國(guo)(guo)(guo)(guo)專(zhuan)利(li)5,838,447、美(mei)(mei)國(guo)(guo)(guo)(guo)專(zhuan)利(li)5,872,633、美(mei)(mei)國(guo)(guo)(guo)(guo)專(zhuan)利(li)5,893,796、美(mei)(mei)國(guo)(guo)(guo)(guo)專(zhuan)利(li)5,949,927及美(mei)(mei)國(guo)(guo)(guo)(guo)專(zhuan)利(li)5,964,643中(zhong)。合(he)意的是，對于(yu)正被拋(pao)光(guang)的工(gong)(gong)件(jian)的拋(pao)光(guang)過程(cheng)(cheng)的進(jin)展的檢查或監控(kong)使得(de)能夠確定拋(pao)光(guang)終點(dian)，即，確定何(he)時終止對特(te)定工(gong)(gong)件(jian)的拋(pao)光(guang)過程(cheng)(cheng)。

可以許多種方式來(lai)表征化學機械拋光過程，諸如在(zai)基板的移(yi)除速率、凹陷及侵(qin)蝕(shi)方面。

可使(shi)用(yong)(yong)任何適合的(de)技(ji)術來測(ce)(ce)定基(ji)(ji)板(ban)的(de)移(yi)(yi)(yi)除(chu)(chu)速(su)率(lv)。用(yong)(yong)于測(ce)(ce)定基(ji)(ji)板(ban)的(de)移(yi)(yi)(yi)除(chu)(chu)速(su)率(lv)的(de)適合的(de)技(ji)術的(de)實例(li)包括：在使(shi)用(yong)(yong)本發明的(de)拋(pao)光方(fang)法(fa)之前及(ji)之后稱(cheng)重(zhong)基(ji)(ji)板(ban)以測(ce)(ce)定每(mei)單位(wei)(wei)(wei)拋(pao)光時(shi)(shi)間(jian)所移(yi)(yi)(yi)除(chu)(chu)的(de)基(ji)(ji)板(ban)的(de)量，其可在每(mei)單位(wei)(wei)(wei)拋(pao)光時(shi)(shi)間(jian)所移(yi)(yi)(yi)除(chu)(chu)的(de)基(ji)(ji)板(ban)的(de)厚度方(fang)面與移(yi)(yi)(yi)除(chu)(chu)速(su)率(lv)相關(guan)；及(ji)在使(shi)用(yong)(yong)本發明的(de)拋(pao)光方(fang)法(fa)之前及(ji)之后測(ce)(ce)定基(ji)(ji)板(ban)的(de)厚度以直接地量測(ce)(ce)每(mei)單位(wei)(wei)(wei)拋(pao)光時(shi)(shi)間(jian)的(de)基(ji)(ji)板(ban)的(de)移(yi)(yi)(yi)除(chu)(chu)率(lv)。

不希望受限于任何具體理論，據信，在3至8.5的ph范圍內，鈷表面由薄的氧化物-氫氧化物層構成。co²⁺表(biao)面(mian)可(ke)經水解(jie)(jie)以形成(cheng)co(oh)2，其為(wei)可(ke)如下解(jie)(jie)離(li)成(cheng)鈷陽(yang)離(li)子和氫氧(yang)根陰離(li)子的弱堿：

coo+h2o→co(oh)2→co²⁺+2oh^-。

有效的鈷促進劑被認為螯合co²⁺且另外(wai)有(you)效地中(zhong)和所形成的氫氧根，從而避免了ph的增(zeng)大以及伴隨(sui)的鈍化鈷表面(mian)的形成。包含胺官能(neng)團的促進劑可如下與鈷反應：

co²⁺+2oh^-+2rnh→co(rn)2+2h2o。

因此，含氨基的促進劑可螯合或以其它方式配位co²⁺且另外還有效地中和所形成的氫氧根。

另外，在(zai)(zai)(zai)3至8.5的ph范圍內，鈷表面被認為是(shi)帶正電(dian)荷的。包(bao)含陰離子型頭基以(yi)及脂族尾(wei)基的腐(fu)蝕抑(yi)制(zhi)劑(ji)被認為是(shi)經由靜電(dian)引力而在(zai)(zai)(zai)鈷表面處(chu)組(zu)合(assemble)。在(zai)(zai)(zai)該特定(ding)實施方式中，有效的鈷促進劑(ji)在(zai)(zai)(zai)拋(pao)光組(zu)合物的ph下具有凈負電(dian)荷，以(yi)便(bian)與在(zai)(zai)(zai)鈷表面處(chu)的鈷腐(fu)蝕抑(yi)制(zhi)劑(ji)競爭，且因(yin)此(ci)允(yun)許增大的鈷移除(chu)速(su)率。

通過(guo)以下實施方式來例示(shi)本發(fa)明：

1.化學機械拋光組合物，包含：

(a)研磨劑顆粒，

(b)鈷促進劑，其選自：具有式nr¹r²r³的化合物，其中，r¹、r²及r³獨立地選自氫、羧基烷基、經取代的羧基烷基、羥基烷基、經取代的羥基烷基及氨基羰基烷基，其中r¹、r²及r³中(zhong)沒(mei)有一個(ge)是氫(qing)或者其(qi)(qi)中(zhong)之一為氫(qing)；二羧基(ji)(ji)(ji)雜環(huan)；雜環(huan)基(ji)(ji)(ji)烷(wan)基(ji)(ji)(ji)-α-氨(an)(an)基(ji)(ji)(ji)酸(suan)；n-(酰(xian)氨(an)(an)基(ji)(ji)(ji)烷(wan)基(ji)(ji)(ji))氨(an)(an)基(ji)(ji)(ji)酸(suan)；未(wei)經(jing)取代(dai)(dai)的(de)雜環(huan)；經(jing)烷(wan)基(ji)(ji)(ji)取代(dai)(dai)的(de)雜環(huan)；以(yi)經(jing)取代(dai)(dai)的(de)烷(wan)基(ji)(ji)(ji)取代(dai)(dai)的(de)雜環(huan)；n-氨(an)(an)基(ji)(ji)(ji)烷(wan)基(ji)(ji)(ji)-α-氨(an)(an)基(ji)(ji)(ji)酸(suan)；及其(qi)(qi)組合(he)，

(c)鈷腐蝕抑制劑，

(d)對鈷進行氧化的(de)氧化劑(ji)，及

(e)水，

其中該拋光(guang)組合物具(ju)有約3至約8.5的(de)ph。

2.實施(shi)方式1的拋光組(zu)合(he)物，其中，該拋光組(zu)合(he)物包含(han)約0.1重量％至約2重量％的研磨劑顆粒。

3.實施方式1或2的拋(pao)光(guang)組合物(wu)，其(qi)中，該鈷促(cu)進(jin)劑選自亞氨基(ji)二(er)(er)乙(yi)酸(suan)(suan)(suan)、吡啶甲(jia)酸(suan)(suan)(suan)、二(er)(er)吡啶甲(jia)酸(suan)(suan)(suan)、二(er)(er)羥乙(yi)基(ji)甘(gan)氨酸(suan)(suan)(suan)、[(2-氨基(ji)-2-氧(yang)基(ji)乙(yi)基(ji))氨基(ji)]乙(yi)酸(suan)(suan)(suan)、賴氨酸(suan)(suan)(suan)、咪唑、組氨酸(suan)(suan)(suan)、2-[雙(shuang)(2-羥基(ji)乙(yi)基(ji))氨基(ji)]-2-(羥基(ji)甲(jia)基(ji))-1,3-丙(bing)二(er)(er)醇(chun)、及(ji)其(qi)組合。

4.實施方(fang)式1-3中任一項的拋(pao)光(guang)組合物，其(qi)中，該(gai)鈷促進劑以約5mm至約100mm的濃(nong)度(du)存(cun)在于該(gai)拋(pao)光(guang)組合物中。

5.實施方(fang)式(shi)1-4中任一(yi)項的拋光組(zu)合物，其中，該鈷(gu)腐蝕(shi)抑(yi)制(zhi)劑(ji)包(bao)含陰離(li)子型頭基(ji)以及c8-c14脂族尾基(ji)。

6.實施(shi)方(fang)式(shi)1的拋光組合(he)物(wu)，其(qi)中(zhong)，該鈷腐蝕抑制劑具有下(xia)式(shi)：rcon(ch3)cooh，其(qi)中(zhong)r為c8-c13脂族基。

7.實施(shi)方(fang)式1-6中任(ren)一項的拋光(guang)組合物(wu)，其中，該拋光(guang)組合物(wu)包含約10ppm至約1000ppm的該鈷腐蝕(shi)抑制劑。

8.實施方式1-7中任一(yi)項(xiang)的拋(pao)光組合物，其中，該氧(yang)化劑為(wei)過氧(yang)化氫。

9.實(shi)施方式1-8中(zhong)任一(yi)項(xiang)的(de)(de)拋(pao)光組合物(wu)，其(qi)中(zhong)，該拋(pao)光組合物(wu)具有(you)約7至約8的(de)(de)ph。

10.化(hua)學機械拋光基板的方法，包括：

(i)使基板與拋(pao)光墊及實施方式1-9中(zhong)任一(yi)項的(de)化學(xue)機械(xie)拋(pao)光組合物接觸，

(ii)相對(dui)于該基板移(yi)動該拋(pao)光墊及該化學(xue)機械拋(pao)光組合物，及

(iii)磨(mo)除該(gai)基板的(de)至少一(yi)部(bu)分以拋光(guang)該(gai)基板。

11.實施方式10的方法，其中(zhong)，該(gai)(gai)基板包(bao)含鈷(gu)，而且，該(gai)(gai)鈷(gu)的至少(shao)一部分被磨除以拋光該(gai)(gai)基板。

12.實施方(fang)式10或11的方(fang)法，其(qi)中，該基(ji)板包含(han)半導體器件。

以下實施(shi)例進(jin)一步說明本發明，但當(dang)然(ran)不應(ying)被認作以任何方式限(xian)制其范圍。

實施例1

該(gai)實施例(li)表(biao)明了由包含(han)鈷(gu)促進(jin)劑(ji)且無鈷(gu)腐蝕抑(yi)制劑(ji)的(de)(de)(de)(de)拋(pao)(pao)(pao)(pao)光(guang)(guang)組(zu)(zu)合(he)物展現出(chu)的(de)(de)(de)(de)鈷(gu)移除(chu)速(su)率(lv)。運(yun)用拋(pao)(pao)(pao)(pao)光(guang)(guang)組(zu)(zu)合(he)物1a至(zhi)(zhi)(zhi)1v來拋(pao)(pao)(pao)(pao)光(guang)(guang)包含(han)鈷(gu)毯覆層的(de)(de)(de)(de)單獨的(de)(de)(de)(de)基板(ban)。拋(pao)(pao)(pao)(pao)光(guang)(guang)組(zu)(zu)合(he)物1a至(zhi)(zhi)(zhi)1s為(wei)(wei)本發明的(de)(de)(de)(de)拋(pao)(pao)(pao)(pao)光(guang)(guang)組(zu)(zu)合(he)物。拋(pao)(pao)(pao)(pao)光(guang)(guang)組(zu)(zu)合(he)物1t至(zhi)(zhi)(zhi)1v為(wei)(wei)對(dui)比拋(pao)(pao)(pao)(pao)光(guang)(guang)組(zu)(zu)合(he)物。所(suo)(suo)有(you)的(de)(de)(de)(de)拋(pao)(pao)(pao)(pao)光(guang)(guang)組(zu)(zu)合(he)物均(jun)含(han)有(you)0.5重(zhong)量(liang)％的(de)(de)(de)(de)具有(you)70nm平均(jun)粒(li)度(du)的(de)(de)(de)(de)濕法氧化硅(gui)(自日本fusochemicalco.獲得的(de)(de)(de)(de)氧化硅(gui))、ph為(wei)(wei)5至(zhi)(zhi)(zhi)7的(de)(de)(de)(de)1重(zhong)量(liang)％的(de)(de)(de)(de)過氧化氫、以(yi)及(ji)濃度(du)為(wei)(wei)約40mm的(de)(de)(de)(de)促進(jin)劑(ji)。所(suo)(suo)述(shu)促進(jin)劑(ji)是如(ru)表(biao)1中(zhong)所(suo)(suo)闡(chan)述(shu)的(de)(de)(de)(de)。在拋(pao)(pao)(pao)(pao)光(guang)(guang)之(zhi)后，測定鈷(gu)的(de)(de)(de)(de)移除(chu)速(su)率(lv)，且結果(guo)闡(chan)述(shu)在表(biao)1中(zhong)。相(xiang)對(dui)于針對(dui)含(han)有(you)甘氨酸(suan)的(de)(de)(de)(de)拋(pao)(pao)(pao)(pao)光(guang)(guang)組(zu)(zu)合(he)物1r所(suo)(suo)觀測到的(de)(de)(de)(de)移除(chu)速(su)率(lv)計算(suan)相(xiang)對(dui)速(su)率(lv)。

表1

如自表1中所闡述的(de)結果明(ming)晰的(de)，含(han)有40mm促(cu)進劑的(de)本發明(ming)拋光(guang)組合物(wu)1a至1q展(zhan)現出這樣的(de)鈷移除速(su)率，其(qi)為含(han)有甘氨酸(suan)的(de)對比拋光(guang)組合物(wu)1r的(de)鈷移除速(su)率的(de)約1.9-4.0倍。

實施例2

該實施(shi)例表(biao)明(ming)了由(you)包含鈷促(cu)進劑的拋(pao)光(guang)組合物在具(ju)有及不具(ju)有鈷腐(fu)蝕抑(yi)制劑的兩種情(qing)況下展(zhan)現出的鈷移除速率(lv)。

運(yun)用16種(zhong)不(bu)同的(de)拋(pao)(pao)光組(zu)合物在一側上分別地拋(pao)(pao)光十六個包含鈷毯覆(fu)層的(de)相似(si)基(ji)板。拋(pao)(pao)光組(zu)合物中的(de)每(mei)一者(zhe)均包含1重(zhong)量％的(de)濕法氧(yang)化硅及1重(zhong)量％的(de)過(guo)氧(yang)化氫。單個的(de)拋(pao)(pao)光組(zu)合物進(jin)一步(bu)含有作為鈷促進(jin)劑的(de)二(er)羥(qian)乙基(ji)甘(gan)氨酸(suan)、hepes((4-(2-羥(qian)基(ji)乙基(ji))-1-哌嗪乙磺(huang)酸(suan)))、乙醇(chun)胺、n-甲基(ji)咪(mi)唑、三乙醇(chun)胺、次(ci)氨基(ji)三乙酸(suan)、二(er)吡啶甲酸(suan)或亞氨基(ji)二(er)乙酸(suan)，而且，在以(yi)下二(er)者(zhe)中擇一：無鈷腐(fu)(fu)蝕抑(yi)(yi)制劑，或者(zhe)，75ppm的(de)n-椰油酰(xian)基(ji)肌氨酸(suan)(即，鈷腐(fu)(fu)蝕抑(yi)(yi)制劑)。

在(zai)拋光之后(hou)，針對(dui)每個(ge)基板，測定(ding)鈷移(yi)除(chu)速率(lv)。結果闡(chan)述在(zai)表2中。表2進一步闡(chan)述了在(zai)存(cun)在(zai)鈷腐蝕抑(yi)制劑的(de)(de)情(qing)況下所(suo)觀測到的(de)(de)移(yi)除(chu)速率(lv)與在(zai)不存(cun)在(zai)鈷腐蝕抑(yi)制劑的(de)(de)情(qing)況下的(de)(de)移(yi)除(chu)速率(lv)相比較的(de)(de)變化百(bai)分數，以及在(zai)所(suo)指示的(de)(de)ph下的(de)(de)鈷腐蝕抑(yi)制劑的(de)(de)凈(jing)電荷。

表2

如自表1中所闡述的(de)(de)(de)(de)結果明晰的(de)(de)(de)(de)，帶有在拋(pao)(pao)光組(zu)合物的(de)(de)(de)(de)ph下(xia)具有負凈(jing)電荷(he)的(de)(de)(de)(de)鈷(gu)促(cu)進劑(ji)(ji)的(de)(de)(de)(de)拋(pao)(pao)光組(zu)合物展(zhan)現出(chu)這樣的(de)(de)(de)(de)鈷(gu)移(yi)除速率，其范圍為：約(yue)-27％的(de)(de)(de)(de)降(jiang)(jiang)低～約(yue)+3％的(de)(de)(de)(de)輕微提高。帶有在拋(pao)(pao)光組(zu)合物的(de)(de)(de)(de)ph下(xia)具有中性或正凈(jing)電荷(he)的(de)(de)(de)(de)鈷(gu)促(cu)進劑(ji)(ji)的(de)(de)(de)(de)拋(pao)(pao)光組(zu)合物展(zhan)現出(chu)顯著降(jiang)(jiang)低的(de)(de)(de)(de)鈷(gu)移(yi)除速率，其范圍為：約(yue)-82％的(de)(de)(de)(de)降(jiang)(jiang)低～約(yue)-99％的(de)(de)(de)(de)降(jiang)(jiang)低。

實施例3

該實施(shi)(shi)例(li)表明了由包含(han)亞氨基(ji)二乙酸作為鈷促(cu)進劑的(de)根據本發明實施(shi)(shi)方式(shi)的(de)拋光(guang)組合物展現出(chu)的(de)鈷移除速率。

運(yun)用(yong)五(wu)種不(bu)同(tong)的(de)(de)(de)拋(pao)光(guang)(guang)(guang)組(zu)(zu)合(he)物(wu)(wu)(拋(pao)光(guang)(guang)(guang)組(zu)(zu)合(he)物(wu)(wu)3a至(zhi)3e)在一(yi)(yi)側上分別地拋(pao)光(guang)(guang)(guang)五(wu)個包含(han)(han)鈷毯(tan)覆層的(de)(de)(de)不(bu)同(tong)的(de)(de)(de)基(ji)板。所有(you)(you)的(de)(de)(de)拋(pao)光(guang)(guang)(guang)組(zu)(zu)合(he)物(wu)(wu)均(jun)(jun)(jun)含(han)(han)有(you)(you)2重(zhong)(zhong)量(liang)％的(de)(de)(de)具(ju)有(you)(you)70nm平(ping)(ping)(ping)均(jun)(jun)(jun)粒(li)度(du)(du)(du)(du)的(de)(de)(de)濕法(fa)(fa)氧(yang)(yang)(yang)(yang)化(hua)(hua)(hua)(hua)硅(gui)(gui)或(huo)具(ju)有(you)(you)100nm平(ping)(ping)(ping)均(jun)(jun)(jun)粒(li)度(du)(du)(du)(du)的(de)(de)(de)濕法(fa)(fa)氧(yang)(yang)(yang)(yang)化(hua)(hua)(hua)(hua)硅(gui)(gui)(這兩種氧(yang)(yang)(yang)(yang)化(hua)(hua)(hua)(hua)硅(gui)(gui)均(jun)(jun)(jun)自(zi)日本fusochemicalco.獲得(de))以(yi)(yi)及1重(zhong)(zhong)量(liang)％的(de)(de)(de)過氧(yang)(yang)(yang)(yang)化(hua)(hua)(hua)(hua)氫(在ph為(wei)(wei)(wei)7至(zhi)8下(xia))。拋(pao)光(guang)(guang)(guang)組(zu)(zu)合(he)物(wu)(wu)3a(本發(fa)明(ming))進(jin)一(yi)(yi)步(bu)(bu)含(han)(han)有(you)(you)濃(nong)(nong)度(du)(du)(du)(du)為(wei)(wei)(wei)41mm的(de)(de)(de)亞(ya)氨(an)基(ji)二乙(yi)酸(suan)以(yi)(yi)及具(ju)有(you)(you)70nm平(ping)(ping)(ping)均(jun)(jun)(jun)粒(li)度(du)(du)(du)(du)的(de)(de)(de)濕法(fa)(fa)氧(yang)(yang)(yang)(yang)化(hua)(hua)(hua)(hua)硅(gui)(gui)。拋(pao)光(guang)(guang)(guang)組(zu)(zu)合(he)物(wu)(wu)3b(本發(fa)明(ming))進(jin)一(yi)(yi)步(bu)(bu)含(han)(han)有(you)(you)濃(nong)(nong)度(du)(du)(du)(du)為(wei)(wei)(wei)41mm的(de)(de)(de)亞(ya)氨(an)基(ji)二乙(yi)酸(suan)以(yi)(yi)及具(ju)有(you)(you)100nm平(ping)(ping)(ping)均(jun)(jun)(jun)粒(li)度(du)(du)(du)(du)的(de)(de)(de)濕法(fa)(fa)氧(yang)(yang)(yang)(yang)化(hua)(hua)(hua)(hua)硅(gui)(gui)。拋(pao)光(guang)(guang)(guang)組(zu)(zu)合(he)物(wu)(wu)3c(本發(fa)明(ming))進(jin)一(yi)(yi)步(bu)(bu)含(han)(han)有(you)(you)濃(nong)(nong)度(du)(du)(du)(du)為(wei)(wei)(wei)100mm的(de)(de)(de)亞(ya)氨(an)基(ji)二乙(yi)酸(suan)以(yi)(yi)及具(ju)有(you)(you)100nm平(ping)(ping)(ping)均(jun)(jun)(jun)粒(li)度(du)(du)(du)(du)的(de)(de)(de)濕法(fa)(fa)氧(yang)(yang)(yang)(yang)化(hua)(hua)(hua)(hua)硅(gui)(gui)。拋(pao)光(guang)(guang)(guang)組(zu)(zu)合(he)物(wu)(wu)3d(對比(bi)(bi))進(jin)一(yi)(yi)步(bu)(bu)含(han)(han)有(you)(you)濃(nong)(nong)度(du)(du)(du)(du)為(wei)(wei)(wei)41mm的(de)(de)(de)甘(gan)氨(an)酸(suan)以(yi)(yi)及具(ju)有(you)(you)70nm平(ping)(ping)(ping)均(jun)(jun)(jun)粒(li)度(du)(du)(du)(du)的(de)(de)(de)濕法(fa)(fa)氧(yang)(yang)(yang)(yang)化(hua)(hua)(hua)(hua)硅(gui)(gui)。拋(pao)光(guang)(guang)(guang)組(zu)(zu)合(he)物(wu)(wu)3e(對比(bi)(bi))進(jin)一(yi)(yi)步(bu)(bu)含(han)(han)有(you)(you)濃(nong)(nong)度(du)(du)(du)(du)為(wei)(wei)(wei)100mm的(de)(de)(de)甘(gan)氨(an)酸(suan)以(yi)(yi)及具(ju)有(you)(you)100nm平(ping)(ping)(ping)均(jun)(jun)(jun)粒(li)度(du)(du)(du)(du)的(de)(de)(de)濕法(fa)(fa)氧(yang)(yang)(yang)(yang)化(hua)(hua)(hua)(hua)硅(gui)(gui)。

在(zai)(zai)拋光之后，針對每個(ge)基(ji)板，測定鈷移(yi)除速率。結果闡述在(zai)(zai)表3中。

表3

如(ru)自表3中所闡述的結果明(ming)晰的，含(han)有亞(ya)氨基二乙(yi)酸(suan)的本發明(ming)拋光(guang)組合物3a至(zhi)3c展(zhan)現出這樣的鈷移除速(su)(su)率(lv)，其為(wei)含(han)有甘氨酸(suan)的對比(bi)拋光(guang)組合物3d及3e的鈷移除速(su)(su)率(lv)的約(yue)1.93-2.26倍。

將本文(wen)(wen)中引(yin)用的所有參(can)(can)考(kao)(kao)文(wen)(wen)獻(xian)(包括出版物、專利(li)(li)申請(qing)和專利(li)(li))在此引(yin)入作為參(can)(can)考(kao)(kao)，其參(can)(can)考(kao)(kao)程度如同各參(can)(can)考(kao)(kao)文(wen)(wen)獻(xian)被單獨(du)和具體說(shuo)明以引(yin)入作為參(can)(can)考(kao)(kao)并且(qie)各參(can)(can)考(kao)(kao)文(wen)(wen)獻(xian)在本文(wen)(wen)中全(quan)部闡述一(yi)般。

在(zai)描述本(ben)(ben)發明(ming)(ming)(ming)的(de)(de)(de)(de)范(fan)圍(wei)(特(te)別是所(suo)(suo)附權利要(yao)求的(de)(de)(de)(de)范(fan)圍(wei))中(zhong)(zhong)使用(yong)術(shu)語(yu)(yu)“一(yi)個(ge)(ge)(ge)”和“一(yi)種(zhong)”和“該”和“至少一(yi)個(ge)(ge)(ge)(種(zhong))”以(yi)及類似的(de)(de)(de)(de)指示物應理解(jie)(jie)為(wei)(wei)包(bao)括(kuo)單數和復(fu)數，除非本(ben)(ben)文(wen)(wen)(wen)中(zhong)(zhong)另有(you)說(shuo)(shuo)(shuo)明(ming)(ming)(ming)或(huo)(huo)(huo)(huo)(huo)上下文(wen)(wen)(wen)明(ming)(ming)(ming)顯矛(mao)盾。在(zai)一(yi)個(ge)(ge)(ge)或(huo)(huo)(huo)(huo)(huo)多個(ge)(ge)(ge)項目的(de)(de)(de)(de)列(lie)表后(hou)使用(yong)術(shu)語(yu)(yu)“至少一(yi)個(ge)(ge)(ge)(種(zhong))”(例(li)如，“a和b中(zhong)(zhong)的(de)(de)(de)(de)至少一(yi)個(ge)(ge)(ge)(種(zhong))”)解(jie)(jie)釋為(wei)(wei)意(yi)指選自(zi)所(suo)(suo)列(lie)項目中(zhong)(zhong)的(de)(de)(de)(de)一(yi)個(ge)(ge)(ge)(種(zhong))項目(a或(huo)(huo)(huo)(huo)(huo)b)或(huo)(huo)(huo)(huo)(huo)所(suo)(suo)列(lie)項目中(zhong)(zhong)的(de)(de)(de)(de)兩(liang)個(ge)(ge)(ge)(種(zhong))或(huo)(huo)(huo)(huo)(huo)更多個(ge)(ge)(ge)(種(zhong))項目的(de)(de)(de)(de)任何(he)組合(a和b)，除非本(ben)(ben)文(wen)(wen)(wen)中(zhong)(zhong)另有(you)說(shuo)(shuo)(shuo)明(ming)(ming)(ming)或(huo)(huo)(huo)(huo)(huo)上下文(wen)(wen)(wen)明(ming)(ming)(ming)顯矛(mao)盾。術(shu)語(yu)(yu)“包(bao)含”、“具(ju)有(you)”、“包(bao)括(kuo)”、和“含有(you)”應理解(jie)(jie)為(wei)(wei)開放式(shi)術(shu)語(yu)(yu)(即，意(yi)味著“包(bao)括(kuo)，但不限于”)，除非另有(you)說(shuo)(shuo)(shuo)明(ming)(ming)(ming)。本(ben)(ben)文(wen)(wen)(wen)中(zhong)(zhong)數值范(fan)圍(wei)的(de)(de)(de)(de)列(lie)舉僅(jin)僅(jin)用(yong)作單獨(du)提及落在(zai)該范(fan)圍(wei)內的(de)(de)(de)(de)每個(ge)(ge)(ge)獨(du)立值的(de)(de)(de)(de)簡寫方(fang)法，除非本(ben)(ben)文(wen)(wen)(wen)中(zhong)(zhong)另有(you)說(shuo)(shuo)(shuo)明(ming)(ming)(ming)，并且在(zai)說(shuo)(shuo)(shuo)明(ming)(ming)(ming)書中(zhong)(zhong)引入每個(ge)(ge)(ge)獨(du)立值，就如同其在(zai)這里被單獨(du)列(lie)舉一(yi)樣。本(ben)(ben)文(wen)(wen)(wen)描述的(de)(de)(de)(de)所(suo)(suo)有(you)方(fang)法可以(yi)任何(he)適宜的(de)(de)(de)(de)順序(xu)進行(xing)，除非本(ben)(ben)文(wen)(wen)(wen)另有(you)說(shuo)(shuo)(shuo)明(ming)(ming)(ming)或(huo)(huo)(huo)(huo)(huo)與上下文(wen)(wen)(wen)明(ming)(ming)(ming)顯矛(mao)盾。本(ben)(ben)文(wen)(wen)(wen)中(zhong)(zhong)提供的(de)(de)(de)(de)任何(he)和所(suo)(suo)有(you)實(shi)(shi)例(li)、或(huo)(huo)(huo)(huo)(huo)示例(li)性語(yu)(yu)言(yan)(yan)(如，“例(li)如”)的(de)(de)(de)(de)使用(yong)僅(jin)用(yong)來(lai)更好地說(shuo)(shuo)(shuo)明(ming)(ming)(ming)本(ben)(ben)發明(ming)(ming)(ming)，而不是對本(ben)(ben)發明(ming)(ming)(ming)的(de)(de)(de)(de)范(fan)圍(wei)加以(yi)限定，除非另有(you)說(shuo)(shuo)(shuo)明(ming)(ming)(ming)。說(shuo)(shuo)(shuo)明(ming)(ming)(ming)書中(zhong)(zhong)沒有(you)語(yu)(yu)言(yan)(yan)應被理解(jie)(jie)為(wei)(wei)是在(zai)將任何(he)非要(yao)求保(bao)護的(de)(de)(de)(de)要(yao)素表明(ming)(ming)(ming)為(wei)(wei)是本(ben)(ben)發明(ming)(ming)(ming)的(de)(de)(de)(de)實(shi)(shi)踐所(suo)(suo)必需的(de)(de)(de)(de)。

本(ben)(ben)(ben)(ben)(ben)文(wen)中(zhong)描述(shu)了(le)本(ben)(ben)(ben)(ben)(ben)發(fa)(fa)(fa)明(ming)(ming)的(de)(de)(de)(de)優選(xuan)實施(shi)方式(shi)，包(bao)括本(ben)(ben)(ben)(ben)(ben)發(fa)(fa)(fa)明(ming)(ming)人(ren)已知的(de)(de)(de)(de)進行(xing)本(ben)(ben)(ben)(ben)(ben)發(fa)(fa)(fa)明(ming)(ming)的(de)(de)(de)(de)最佳模式(shi)。通過閱讀上述(shu)說(shuo)明(ming)(ming)書，那些優選(xuan)實施(shi)方式(shi)的(de)(de)(de)(de)變(bian)(bian)化對于本(ben)(ben)(ben)(ben)(ben)領域的(de)(de)(de)(de)普通技術人(ren)員來說(shuo)將變(bian)(bian)得明(ming)(ming)晰。本(ben)(ben)(ben)(ben)(ben)發(fa)(fa)(fa)明(ming)(ming)人(ren)希望(wang)技術人(ren)員適(shi)當地采(cai)用(yong)這種變(bian)(bian)化，且本(ben)(ben)(ben)(ben)(ben)發(fa)(fa)(fa)明(ming)(ming)人(ren)希望(wang)本(ben)(ben)(ben)(ben)(ben)發(fa)(fa)(fa)明(ming)(ming)用(yong)不同于本(ben)(ben)(ben)(ben)(ben)文(wen)具體描述(shu)的(de)(de)(de)(de)方式(shi)進行(xing)實踐。因此，本(ben)(ben)(ben)(ben)(ben)發(fa)(fa)(fa)明(ming)(ming)包(bao)括適(shi)用(yong)法律所允許的(de)(de)(de)(de)、所附權利要求書中(zhong)所列舉的(de)(de)(de)(de)主(zhu)題的(de)(de)(de)(de)所有(you)修改和(he)等價物(wu)。此外(wai)，在(zai)(zai)其(qi)所有(you)可(ke)能(neng)變(bian)(bian)化中(zhong)的(de)(de)(de)(de)上述(shu)要素(su)的(de)(de)(de)(de)任意組合包(bao)括在(zai)(zai)本(ben)(ben)(ben)(ben)(ben)發(fa)(fa)(fa)明(ming)(ming)中(zhong)，除非(fei)本(ben)(ben)(ben)(ben)(ben)文(wen)另有(you)說(shuo)明(ming)(ming)或與上下(xia)文(wen)明(ming)(ming)顯矛盾(dun)。