本發明(ming)涉及一種吸盤及其吸附方法，在光刻過(guo)程中用于(yu)(yu)吸附基底(di)特別是翹曲基底(di)，屬于(yu)(yu)半導(dao)體器(qi)件制造領域。

背景技術：

光(guang)(guang)(guang)刻(ke)(ke)是(shi)一(yi)種將(jiang)掩(yan)模(mo)圖案曝光(guang)(guang)(guang)成(cheng)像到(dao)基(ji)底(di)上(shang)的(de)(de)(de)(de)(de)(de)(de)工藝技術(shu)，是(shi)半(ban)導(dao)體器件制造工藝中(zhong)(zhong)的(de)(de)(de)(de)(de)(de)(de)一(yi)個重要步驟。已(yi)知的(de)(de)(de)(de)(de)(de)(de)光(guang)(guang)(guang)刻(ke)(ke)設備(bei)包括步進重復式(shi)和(he)(he)步進掃(sao)描式(shi)。在(zai)(zai)上(shang)述的(de)(de)(de)(de)(de)(de)(de)光(guang)(guang)(guang)刻(ke)(ke)設備(bei)中(zhong)(zhong)，需具有(you)相應的(de)(de)(de)(de)(de)(de)(de)裝置(zhi)作為(wei)掩(yan)模(mo)版(ban)和(he)(he)基(ji)底(di)的(de)(de)(de)(de)(de)(de)(de)載(zai)體，裝載(zai)有(you)掩(yan)模(mo)版(ban)/基(ji)底(di)的(de)(de)(de)(de)(de)(de)(de)載(zai)體產生精確的(de)(de)(de)(de)(de)(de)(de)相互(hu)運(yun)(yun)動(dong)來滿足光(guang)(guang)(guang)刻(ke)(ke)需要。在(zai)(zai)掩(yan)模(mo)版(ban)和(he)(he)基(ji)底(di)的(de)(de)(de)(de)(de)(de)(de)相互(hu)運(yun)(yun)動(dong)中(zhong)(zhong)，須保(bao)證掩(yan)模(mo)版(ban)和(he)(he)基(ji)底(di)始終被(bei)可靠地定位。直接用(yong)(yong)于定位基(ji)底(di)的(de)(de)(de)(de)(de)(de)(de)裝置(zhi)稱之(zhi)為(wei)吸(xi)(xi)(xi)盤。吸(xi)(xi)(xi)盤由(you)一(yi)系列驅動(dong)器驅動(dong)，可產生多個自(zi)由(you)度(du)(du)的(de)(de)(de)(de)(de)(de)(de)運(yun)(yun)動(dong)，從而完成(cheng)對基(ji)底(di)的(de)(de)(de)(de)(de)(de)(de)調平調焦，使(shi)基(ji)底(di)進行必(bi)需的(de)(de)(de)(de)(de)(de)(de)位置(zhi)調整(zheng)。吸(xi)(xi)(xi)盤的(de)(de)(de)(de)(de)(de)(de)精度(du)(du)對光(guang)(guang)(guang)刻(ke)(ke)設備(bei)的(de)(de)(de)(de)(de)(de)(de)focus(焦深)和(he)(he)overlay(套刻(ke)(ke)精度(du)(du))有(you)很(hen)大(da)的(de)(de)(de)(de)(de)(de)(de)影響，體現在(zai)(zai)其上(shang)下表(biao)面(mian)的(de)(de)(de)(de)(de)(de)(de)面(mian)型精度(du)(du)，以(yi)及自(zi)身的(de)(de)(de)(de)(de)(de)(de)夾持變(bian)形(xing)(xing)量(liang)。現有(you)技術(shu)中(zhong)(zhong)提出(chu)(chu)采用(yong)(yong)真空吸(xi)(xi)(xi)附(fu)的(de)(de)(de)(de)(de)(de)(de)方式(shi)使(shi)基(ji)底(di)定位在(zai)(zai)吸(xi)(xi)(xi)盤上(shang)表(biao)面(mian)，提出(chu)(chu)了(le)吸(xi)(xi)(xi)盤上(shang)表(biao)面(mian)若干(gan)形(xing)(xing)態(tai)的(de)(de)(de)(de)(de)(de)(de)分布(bu)，以(yi)優化(hua)在(zai)(zai)真空吸(xi)(xi)(xi)附(fu)時對基(ji)底(di)產生的(de)(de)(de)(de)(de)(de)(de)變(bian)形(xing)(xing)、熱應力等影響。但現有(you)專利和(he)(he)文獻資料中(zhong)(zhong)并未涉及針對翹(qiao)曲基(ji)底(di)的(de)(de)(de)(de)(de)(de)(de)吸(xi)(xi)(xi)附(fu)設計。

現有技術提供的吸盤，包括吸盤主(zhu)體(ti)(ti)01、用于基(ji)(ji)(ji)底02交接的通(tong)(tong)(tong)孔015、與外部真空源連(lian)通(tong)(tong)(tong)的真空孔014，真空孔014與密封環012和(he)基(ji)(ji)(ji)底02產(chan)生(sheng)真空腔(qiang)011，通(tong)(tong)(tong)過外部大(da)氣(qi)壓與真空腔(qiang)011之間的壓力差產(chan)生(sheng)吸附(fu)(fu)力將基(ji)(ji)(ji)底02牢固可靠的壓附(fu)(fu)在吸盤主(zhu)體(ti)(ti)01上(shang)，同時，在真空腔(qiang)011中(zhong)均勻的分布(bu)有若干凸(tu)點013特(te)征，對基(ji)(ji)(ji)底02起到支(zhi)撐作用，防止基(ji)(ji)(ji)底02因為吸附(fu)(fu)力而產(chan)生(sheng)變形(xing)，影響光刻精度。

對(dui)于(yu)面型比較好的基(ji)(ji)(ji)(ji)(ji)(ji)底(di)(di)，現(xian)有(you)(you)技(ji)術的吸(xi)盤(pan)可以有(you)(you)效的吸(xi)附(fu)(fu)住，但對(dui)于(yu)翹曲(qu)(qu)(qu)基(ji)(ji)(ji)(ji)(ji)(ji)底(di)(di)則不能有(you)(you)效吸(xi)附(fu)(fu)，原(yuan)因(yin)分(fen)析如圖3所示，吸(xi)盤(pan)主體01、密封環012與(yu)翹曲(qu)(qu)(qu)基(ji)(ji)(ji)(ji)(ji)(ji)底(di)(di)04一(yi)起形(xing)成(cheng)(cheng)真(zhen)空(kong)(kong)腔(qiang)011，預(yu)期通過真(zhen)空(kong)(kong)腔(qiang)011與(yu)外部(bu)大(da)氣(qi)壓力(li)差(cha)產(chan)生吸(xi)附(fu)(fu)力(li)將翹曲(qu)(qu)(qu)基(ji)(ji)(ji)(ji)(ji)(ji)底(di)(di)04吸(xi)附(fu)(fu)在吸(xi)盤(pan)01上。但是(shi)由(you)于(yu)翹曲(qu)(qu)(qu)基(ji)(ji)(ji)(ji)(ji)(ji)底(di)(di)04主要翹曲(qu)(qu)(qu)形(xing)狀為圖示的“碗狀”，該基(ji)(ji)(ji)(ji)(ji)(ji)底(di)(di)04與(yu)吸(xi)盤(pan)01形(xing)成(cheng)(cheng)的真(zhen)空(kong)(kong)腔(qiang)011右(you)側具(ju)有(you)(you)比較大(da)的間隙(間隙大(da)小(xiao)受基(ji)(ji)(ji)(ji)(ji)(ji)底(di)(di)翹曲(qu)(qu)(qu)程度影(ying)響)，因(yin)而導(dao)致(zhi)真(zhen)空(kong)(kong)腔(qiang)011與(yu)外部(bu)大(da)氣(qi)相通進而不能形(xing)成(cheng)(cheng)其與(yu)外部(bu)大(da)氣(qi)有(you)(you)效的壓力(li)差(cha)，也就不能產(chan)生有(you)(you)效的吸(xi)附(fu)(fu)力(li)將基(ji)(ji)(ji)(ji)(ji)(ji)底(di)(di)04吸(xi)附(fu)(fu)在吸(xi)盤(pan)01上。現(xian)有(you)(you)專利和文獻資料中(zhong)也未涉及針(zhen)對(dui)翹曲(qu)(qu)(qu)基(ji)(ji)(ji)(ji)(ji)(ji)底(di)(di)04的吸(xi)附(fu)(fu)設計。

技術實現要素：

本發(fa)明所(suo)要(yao)解決的(de)技術問題是提(ti)供(gong)一種(zhong)可以(yi)有效吸(xi)(xi)附(fu)翹曲基底的(de)吸(xi)(xi)盤，還提(ti)供(gong)一種(zhong)采用上述吸(xi)(xi)盤進行基底吸(xi)(xi)附(fu)的(de)方法。

為(wei)了實現(xian)上(shang)(shang)述(shu)(shu)目(mu)的(de)(de)(de)，本發明采用如(ru)下技術(shu)方案予以實現(xian)：一種吸(xi)(xi)盤，包括吸(xi)(xi)盤主體(ti)，所(suo)述(shu)(shu)吸(xi)(xi)盤主體(ti)的(de)(de)(de)中(zhong)心設(she)有(you)用于基(ji)(ji)(ji)底交接(jie)的(de)(de)(de)通孔(kong)(kong)，所(suo)述(shu)(shu)吸(xi)(xi)盤主體(ti)上(shang)(shang)設(she)有(you)至少一個凸出吸(xi)(xi)盤主體(ti)且與所(suo)述(shu)(shu)通孔(kong)(kong)同(tong)心分布的(de)(de)(de)密(mi)封環(huan)，所(suo)述(shu)(shu)密(mi)封環(huan)上(shang)(shang)開設(she)有(you)環(huan)形(xing)凹槽(cao)，所(suo)述(shu)(shu)環(huan)形(xing)凹槽(cao)內設(she)有(you)若(ruo)干與外部真空(kong)源連通的(de)(de)(de)真空(kong)孔(kong)(kong)，吸(xi)(xi)附(fu)所(suo)述(shu)(shu)基(ji)(ji)(ji)底時，從所(suo)述(shu)(shu)真空(kong)孔(kong)(kong)通入真空(kong)，位(wei)于所(suo)述(shu)(shu)密(mi)封環(huan)與所(suo)述(shu)(shu)基(ji)(ji)(ji)底之間的(de)(de)(de)環(huan)形(xing)凹槽(cao)形(xing)成為(wei)真空(kong)腔。

采用上述技術，通過(guo)內(nei)圈(quan)(quan)的環形(xing)真空腔(qiang)(qiang)(qiang)(qiang)先吸附，然后(hou)(hou)外圈(quan)(quan)的環形(xing)真空腔(qiang)(qiang)(qiang)(qiang)依次吸附的方式(shi)，能夠逐步改善(shan)基底與(yu)環形(xing)真空腔(qiang)(qiang)(qiang)(qiang)之間的間隙，內(nei)圈(quan)(quan)的環形(xing)真空腔(qiang)(qiang)(qiang)(qiang)吸附后(hou)(hou)會減小相鄰(lin)外圈(quan)(quan)環形(xing)真空腔(qiang)(qiang)(qiang)(qiang)與(yu)基底之間的間隙，有利于外圈(quan)(quan)的環形(xing)真空腔(qiang)(qiang)(qiang)(qiang)的吸附，最終(zhong)實(shi)現對翹曲基底的有效(xiao)吸附。

作為(wei)本發明的一種改進，所述吸(xi)盤主體上(shang)還(huan)均勻分布有若干(gan)凸點。

優選(xuan)地，所述凸點呈環形分布。

優選地，所(suo)述密封(feng)環的高(gao)度與所(suo)述凸點的高(gao)度相同。

優選(xuan)地，所述密(mi)封(feng)環(huan)與所述凸點的(de)高度為50um～100um。

優選地，所述凸(tu)點(dian)為(wei)圓柱形。

優選(xuan)地，所述凸點的直(zhi)徑為0.1mm～0.3mm。

優選地，所述凸(tu)點與(yu)凸(tu)點之間的間隔(ge)為3mm～6mm。

優(you)選地，所述環形凹槽(cao)的(de)寬度為1mm～1.5mm。

優選地(di)，一(yi)個所(suo)述環形凹槽內的所(suo)述真空孔(kong)的數(shu)量為3～4個。

采用(yong)上述(shu)技術，所(suo)述(shu)凸(tu)(tu)點(dian)可以對基(ji)底起到支撐作用(yong)，防止(zhi)基(ji)底因(yin)為吸附力而產生變形，影(ying)響光刻精度。所(suo)述(shu)凸(tu)(tu)點(dian)還可以減小顆粒等污染對基(ji)底吸附面(mian)型的影(ying)響和減小吸盤的磨損，使吸盤具(ju)有更高(gao)的工況適應性。

作為本發明的(de)一種(zhong)改進，一個(ge)密封環與另(ling)一個(ge)密封環上(shang)的(de)真空(kong)孔(kong)所(suo)連通(tong)的(de)真空(kong)源的(de)控制(zhi)彼此獨立。

采用上(shang)述(shu)技術，環形真(zhen)空(kong)腔的氣(qi)路控(kong)制彼(bi)此(ci)獨立，可(ke)以由內向(xiang)外依次控(kong)制環形真(zhen)空(kong)腔的吸(xi)附操作，實現更好的吸(xi)附效果。

優選地(di)，所(suo)述(shu)吸盤主(zhu)體為(wei)碳(tan)化硅陶(tao)瓷材(cai)料。

優選地，所述吸盤主體為鋁合金材料(liao)。

與(yu)現(xian)有技術相比，采(cai)用多(duo)個環形(xing)(xing)真空腔(qiang)(qiang)的(de)(de)(de)結(jie)(jie)構，能夠逐步改(gai)善基底與(yu)環形(xing)(xing)真空腔(qiang)(qiang)之間(jian)的(de)(de)(de)間(jian)隙(xi)(xi)，內圈的(de)(de)(de)環形(xing)(xing)真空腔(qiang)(qiang)吸附(fu)(fu)后(hou)會(hui)減(jian)小相鄰外圈環形(xing)(xing)真空腔(qiang)(qiang)與(yu)基底之間(jian)的(de)(de)(de)間(jian)隙(xi)(xi)，有利于外圈的(de)(de)(de)環形(xing)(xing)真空腔(qiang)(qiang)的(de)(de)(de)吸附(fu)(fu)，最終實現(xian)對翹曲基底的(de)(de)(de)有效(xiao)吸附(fu)(fu)。采(cai)用凸點結(jie)(jie)構對基底起到(dao)支(zhi)撐作用，可(ke)以減(jian)小顆粒等污(wu)染對基底吸附(fu)(fu)面型的(de)(de)(de)影響和減(jian)小吸盤(pan)的(de)(de)(de)磨(mo)損，使吸盤(pan)具有更高(gao)的(de)(de)(de)工(gong)況適(shi)應性(xing)。

優選地，兩(liang)相鄰的(de)所述密封環之間(jian)(jian)的(de)間(jian)(jian)距優選范(fan)圍為10mm～20mm。

本發明還提供一種采用上(shang)(shang)述(shu)吸(xi)盤進(jin)行基(ji)底吸(xi)附的(de)(de)方法(fa)，一個密(mi)封環(huan)與另(ling)一個密(mi)封環(huan)上(shang)(shang)的(de)(de)真空孔所連通(tong)(tong)(tong)的(de)(de)真空源的(de)(de)控制彼(bi)此獨立，在進(jin)行基(ji)底吸(xi)附時，沿所述(shu)通(tong)(tong)(tong)孔徑向由內向外依次(ci)打開所述(shu)密(mi)封環(huan)上(shang)(shang)的(de)(de)真空孔所連通(tong)(tong)(tong)的(de)(de)真空源，進(jin)行分時吸(xi)附。

采用上述技術，由內到外依(yi)次控制環(huan)形(xing)(xing)真(zhen)空(kong)(kong)(kong)腔(qiang)的(de)(de)吸(xi)(xi)附(fu)(fu)操作，內圈的(de)(de)環(huan)形(xing)(xing)真(zhen)空(kong)(kong)(kong)腔(qiang)吸(xi)(xi)附(fu)(fu)后會減小相(xiang)鄰(lin)外圈環(huan)形(xing)(xing)真(zhen)空(kong)(kong)(kong)腔(qiang)與基底之間的(de)(de)間隙，有利于(yu)外圈的(de)(de)環(huan)形(xing)(xing)真(zhen)空(kong)(kong)(kong)腔(qiang)的(de)(de)吸(xi)(xi)附(fu)(fu)，可以實現更(geng)好的(de)(de)吸(xi)(xi)附(fu)(fu)效果。

附圖說明

圖(tu)1為現有技術中一種吸盤的結構示意圖(tu)；

圖2為(wei)現有(you)技術中吸盤凸點(dian)分布的(de)俯視圖；

圖3為現有技術吸盤不能(neng)吸附翹曲基底的原理示意圖；

圖(tu)4為本發明一具體(ti)實(shi)施方式(shi)中吸盤的剖視結構示意圖(tu)；

圖(tu)(tu)5為本發(fa)明一具體實(shi)施方式中吸盤的(de)俯視圖(tu)(tu)；

圖(tu)6為(wei)本發明一(yi)具體實施方式(shi)中吸(xi)盤的吸(xi)附原理示意圖(tu)。

圖(tu)1～3中(zhong)：01是(shi)(shi)吸盤主體(ti)，011是(shi)(shi)真(zhen)空(kong)腔，012是(shi)(shi)密封環，013是(shi)(shi)凸點，014是(shi)(shi)真(zhen)空(kong)孔(kong)，015是(shi)(shi)通孔(kong)，02是(shi)(shi)基底，04是(shi)(shi)翹曲基底；

圖4～6中：03是(shi)(shi)(shi)(shi)(shi)吸盤(pan)主(zhu)體，031是(shi)(shi)(shi)(shi)(shi)環(huan)形凹槽(cao)，032是(shi)(shi)(shi)(shi)(shi)密封環(huan)，033是(shi)(shi)(shi)(shi)(shi)凸點，034是(shi)(shi)(shi)(shi)(shi)真空孔，035是(shi)(shi)(shi)(shi)(shi)通孔，04是(shi)(shi)(shi)(shi)(shi)翹曲(qu)基(ji)底。

具體實施方式

下面結合附圖對發(fa)明的具體實施方式作進一(yi)步(bu)詳(xiang)細說明。

如圖(tu)4和圖(tu)5所(suo)(suo)(suo)(suo)示，本(ben)發明(ming)提(ti)供一(yi)種吸(xi)(xi)盤(pan)(pan)，包(bao)括吸(xi)(xi)盤(pan)(pan)主(zhu)體(ti)03，其中，所(suo)(suo)(suo)(suo)述(shu)(shu)(shu)吸(xi)(xi)盤(pan)(pan)主(zhu)體(ti)03的中心設(she)置有(you)(you)用于基底交接的通(tong)孔035，所(suo)(suo)(suo)(suo)述(shu)(shu)(shu)吸(xi)(xi)盤(pan)(pan)主(zhu)體(ti)03上設(she)有(you)(you)至少一(yi)個凸(tu)出于吸(xi)(xi)盤(pan)(pan)主(zhu)體(ti)03且與通(tong)孔035同心分布的密封(feng)環(huan)032，所(suo)(suo)(suo)(suo)述(shu)(shu)(shu)密封(feng)環(huan)032上開設(she)有(you)(you)環(huan)形凹(ao)(ao)槽(cao)031，所(suo)(suo)(suo)(suo)述(shu)(shu)(shu)環(huan)形凹(ao)(ao)槽(cao)031內設(she)有(you)(you)若干(gan)與外部真(zhen)(zhen)空(kong)源(yuan)連通(tong)的真(zhen)(zhen)空(kong)孔034，相應地所(suo)(suo)(suo)(suo)述(shu)(shu)(shu)真(zhen)(zhen)空(kong)孔034貫穿與所(suo)(suo)(suo)(suo)述(shu)(shu)(shu)環(huan)形凹(ao)(ao)槽(cao)031對應位置處的吸(xi)(xi)盤(pan)(pan)主(zhu)體(ti)03與真(zhen)(zhen)空(kong)源(yuan)連通(tong)。吸(xi)(xi)附基底04時，從所(suo)(suo)(suo)(suo)述(shu)(shu)(shu)真(zhen)(zhen)空(kong)孔034通(tong)入真(zhen)(zhen)空(kong)，位于所(suo)(suo)(suo)(suo)述(shu)(shu)(shu)密封(feng)環(huan)032與基底之(zhi)間的環(huan)形凹(ao)(ao)槽(cao)031形成為(wei)環(huan)形真(zhen)(zhen)空(kong)腔。

繼續(xu)參照圖5，在環形真(zhen)空腔周(zhou)圍(wei)的(de)吸(xi)(xi)盤主體(ti)03上均勻(yun)分(fen)布(bu)有若干凸點(dian)033，對基底(di)起到支撐作用，防(fang)止基底(di)因為吸(xi)(xi)附(fu)力而產生變(bian)形，影響(xiang)光(guang)刻精度。凸點(dian)033具體(ti)的(de)分(fen)布(bu)方(fang)式不固(gu)定，最終均勻(yun)分(fen)布(bu)即可(ke)，優選地(di)可(ke)為環形分(fen)布(bu)。吸(xi)(xi)盤主體(ti)03的(de)材(cai)質一般為碳化硅陶瓷(ci)(SiC)材(cai)料，也可(ke)為鋁合金或其他材(cai)料。

本發明采(cai)用(yong)的(de)環(huan)(huan)形真(zhen)(zhen)(zhen)空腔(qiang)(qiang)與凸點(dian)(dian)(dian)033相(xiang)結合的(de)方案，即在(zai)(zai)保留部(bu)分凸點(dian)(dian)(dian)033的(de)情(qing)(qing)況(kuang)下將現有技(ji)術中原本面(mian)(mian)(mian)積(ji)較大的(de)真(zhen)(zhen)(zhen)空腔(qiang)(qiang)011變(bian)為分開的(de)呈同(tong)(tong)心圓分布的(de) 面(mian)(mian)(mian)積(ji)較小的(de)環(huan)(huan)形真(zhen)(zhen)(zhen)空腔(qiang)(qiang)，環(huan)(huan)形真(zhen)(zhen)(zhen)空腔(qiang)(qiang)面(mian)(mian)(mian)積(ji)雖然變(bian)小，但(dan)其產(chan)生(sheng)的(de)壓力也足(zu)以(yi)將基(ji)(ji)(ji)(ji)底(di)(di)(di)牢固(gu)可靠的(de)吸(xi)(xi)(xi)附(fu)(fu)在(zai)(zai)吸(xi)(xi)(xi)盤上(shang)。凸點(dian)(dian)(dian)033具(ju)有以(yi)下作用(yong)，首先，凸點(dian)(dian)(dian)033可以(yi)對基(ji)(ji)(ji)(ji)底(di)(di)(di)起(qi)到支撐(cheng)作用(yong)，防(fang)止(zhi)基(ji)(ji)(ji)(ji)底(di)(di)(di)因(yin)為吸(xi)(xi)(xi)附(fu)(fu)力而(er)產(chan)生(sheng)變(bian)形，影(ying)響(xiang)光刻精度；其次，在(zai)(zai)同(tong)(tong)樣(yang)大小的(de)基(ji)(ji)(ji)(ji)底(di)(di)(di)情(qing)(qing)況(kuang)下，相(xiang)鄰密封環(huan)(huan)032之間形成的(de)未布設(she)凸點(dian)(dian)(dian)033的(de)環(huan)(huan)狀(zhuang)特(te)(te)征(zheng)結構(gou)與凸點(dian)(dian)(dian)033相(xiang)比，其與基(ji)(ji)(ji)(ji)底(di)(di)(di)的(de)接觸(chu)面(mian)(mian)(mian)積(ji)要遠遠大于(yu)凸點(dian)(dian)(dian)033，顆(ke)粒等污染(ran)情(qing)(qing)況(kuang)更(geng)容易(yi)發生(sheng)在(zai)(zai)環(huan)(huan)狀(zhuang)特(te)(te)征(zheng)與基(ji)(ji)(ji)(ji)底(di)(di)(di)的(de)接觸(chu)面(mian)(mian)(mian)上(shang)，進而(er)影(ying)響(xiang)基(ji)(ji)(ji)(ji)底(di)(di)(di)的(de)面(mian)(mian)(mian)型以(yi)及加速吸(xi)(xi)(xi)盤的(de)磨損過程，因(yin)而(er)在(zai)(zai)環(huan)(huan)狀(zhuang)特(te)(te)征(zheng)上(shang)設(she)置(zhi)凸點(dian)(dian)(dian)033進行基(ji)(ji)(ji)(ji)底(di)(di)(di)支撐(cheng)在(zai)(zai)基(ji)(ji)(ji)(ji)底(di)(di)(di)面(mian)(mian)(mian)型保護上(shang)會(hui)優(you)于(yu)直接用(yong)環(huan)(huan)狀(zhuang)特(te)(te)征(zheng)接觸(chu)基(ji)(ji)(ji)(ji)底(di)(di)(di)。因(yin)此，采(cai)用(yong)環(huan)(huan)形真(zhen)(zhen)(zhen)空腔(qiang)(qiang)與凸點(dian)(dian)(dian)033兩(liang)者相(xiang)互結合后更(geng)能(neng)實(shi)現對基(ji)(ji)(ji)(ji)底(di)(di)(di)特(te)(te)別是翹曲基(ji)(ji)(ji)(ji)底(di)(di)(di)的(de)有效吸(xi)(xi)(xi)附(fu)(fu)，同(tong)(tong)時擁有比密封環(huan)(huan)032之間采(cai)用(yong)環(huan)(huan)狀(zhuang)特(te)(te)征(zheng)結構(gou)進行基(ji)(ji)(ji)(ji)底(di)(di)(di)支撐(cheng)更(geng)高(gao)的(de)工況(kuang)適應性，減小顆(ke)粒等污染(ran)對基(ji)(ji)(ji)(ji)底(di)(di)(di)吸(xi)(xi)(xi)附(fu)(fu)面(mian)(mian)(mian)型的(de)影(ying)響(xiang)和減小吸(xi)(xi)(xi)盤的(de)磨損。

為(wei)(wei)了可以(yi)牢固可靠的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)吸(xi)附(fu)基(ji)底(di)(di)特(te)別(bie)是翹曲(qu)基(ji)底(di)(di)，以(yi)及獲得較(jiao)高(gao)(gao)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)工(gong)況適應(ying)(ying)性，上述密(mi)(mi)(mi)封(feng)環(huan)(huan)032、凸(tu)點(dian)(dian)033、環(huan)(huan)形(xing)(xing)(xing)凹(ao)槽(cao)031及真空孔(kong)(kong)034的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)設計和分(fen)布(bu)都必(bi)須滿足一(yi)定(ding)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)條件。具(ju)體地(di)，密(mi)(mi)(mi)封(feng)環(huan)(huan)032和凸(tu)點(dian)(dian)033高(gao)(gao)度h應(ying)(ying)當一(yi)致，優(you)(you)(you)選(xuan)(xuan)尺(chi)寸為(wei)(wei)50um～100um，這(zhe)樣有(you)(you)利于(yu)環(huan)(huan)形(xing)(xing)(xing)真空腔中(zhong)均勻氣壓的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)快速建(jian)立；凸(tu)點(dian)(dian)033為(wei)(wei)圓柱形(xing)(xing)(xing)，凸(tu)點(dian)(dian)033上表面(mian)(mian)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)直徑(jing)a優(you)(you)(you)選(xuan)(xuan)尺(chi)寸為(wei)(wei)0.1mm～0.3mm，既(ji)避(bi)免與(yu)基(ji)底(di)(di)有(you)(you)較(jiao)大接觸(chu)面(mian)(mian)積，進而不(bu)能(neng)達到(dao)高(gao)(gao)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)工(gong)況適應(ying)(ying)性，也(ye)(ye)防(fang)止加速凸(tu)點(dian)(dian)磨損；兩(liang)相鄰(lin)凸(tu)點(dian)(dian)033之(zhi)間(jian)(jian)(jian)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)間(jian)(jian)(jian)隔S優(you)(you)(you)選(xuan)(xuan)尺(chi)寸為(wei)(wei)3mm～6mm，既(ji)防(fang)止基(ji)底(di)(di)由于(yu)吸(xi)附(fu)力而變形(xing)(xing)(xing)，也(ye)(ye)避(bi)免與(yu)基(ji)底(di)(di)有(you)(you)較(jiao)大接觸(chu)面(mian)(mian)積而不(bu)能(neng)達到(dao)高(gao)(gao)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)工(gong)況適應(ying)(ying)性；環(huan)(huan)形(xing)(xing)(xing)凹(ao)槽(cao)031的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)寬(kuan)度d優(you)(you)(you)選(xuan)(xuan)尺(chi)寸為(wei)(wei)1mm～1.5mm，以(yi)利于(yu)環(huan)(huan)形(xing)(xing)(xing)真空腔的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)順(shun)利建(jian)立；真空孔(kong)(kong)034的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)數(shu)(shu)量(liang)優(you)(you)(you)選(xuan)(xuan)為(wei)(wei)每個(ge)環(huan)(huan)形(xing)(xing)(xing)凹(ao)槽(cao)031中(zhong)含有(you)(you)3～4個(ge)真空孔(kong)(kong)034，這(zhe)樣吸(xi)盤結構不(bu)至于(yu)太復雜(za)，同(tong)時有(you)(you)利于(yu)環(huan)(huan)形(xing)(xing)(xing)真空腔中(zhong)均勻氣壓的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)建(jian)立；密(mi)(mi)(mi)封(feng)環(huan)(huan)032的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)數(shu)(shu)量(liang)可根(gen)據實(shi)際(ji)應(ying)(ying)用中(zhong)基(ji)底(di)(di)大小而定(ding)，一(yi)般基(ji)底(di)(di)越(yue)大，吸(xi)盤主體03上密(mi)(mi)(mi)封(feng)環(huan)(huan)032的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)數(shu)(shu)量(liang)越(yue)多，較(jiao)佳地(di)，兩(liang)相鄰(lin)密(mi)(mi)(mi)封(feng)環(huan)(huan)032之(zhi)間(jian)(jian)(jian)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)間(jian)(jian)(jian)距(ju)優(you)(you)(you)選(xuan)(xuan)范圍為(wei)(wei)10mm～20mm，兩(liang)相鄰(lin)密(mi)(mi)(mi)封(feng)環(huan)(huan)032之(zhi)間(jian)(jian)(jian)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)間(jian)(jian)(jian)距(ju)太小，凸(tu)點(dian)(dian)033的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)作用不(bu)明(ming)顯；間(jian)(jian)(jian)距(ju)太大的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)話(hua)對于(yu)基(ji)底(di)(di)特(te)別(bie)是翹曲(qu)基(ji)底(di)(di)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)吸(xi)附(fu)能(neng)力就會降低。本申請采(cai)用環(huan)(huan)形(xing)(xing)(xing)真空腔與(yu)凸(tu)點(dian)(dian)033相結合的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)方式 對基(ji)底(di)(di)進行吸(xi)附(fu)，同(tong)時也(ye)(ye)是在凸(tu)點(dian)(dian)033與(yu)密(mi)(mi)(mi)封(feng)環(huan)(huan)032之(zhi)間(jian)(jian)(jian)尋找一(yi)個(ge)平(ping)衡點(dian)(dian)，選(xuan)(xuan)擇合適的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)凸(tu)點(dian)(dian)033的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)數(shu)(shu)量(liang)和分(fen)布(bu)，以(yi)及選(xuan)(xuan)擇合適的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)密(mi)(mi)(mi)封(feng)環(huan)(huan)032的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)數(shu)(shu)量(liang)和分(fen)布(bu)，通過(guo)兩(liang)者的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)合理結合，在對基(ji)底(di)(di)進行很好地(di)吸(xi)附(fu)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)同(tong)時保護基(ji)底(di)(di)面(mian)(mian)型。

如(ru)圖(tu)4-6所(suo)示(shi)為(wei)(wei)(wei)(wei)采(cai)用(yong)本(ben)發(fa)明(ming)吸(xi)(xi)(xi)(xi)(xi)附(fu)(fu)(fu)一(yi)(yi)翹(qiao)(qiao)(qiao)(qiao)(qiao)(qiao)曲(qu)(qu)基(ji)(ji)(ji)(ji)底(di)(di)(di)(di)04的(de)(de)(de)(de)(de)實(shi)施例。該實(shi)施例以(yi)在(zai)(zai)(zai)吸(xi)(xi)(xi)(xi)(xi)盤(pan)(pan)(pan)主體03上(shang)設(she)置3個(ge)密(mi)(mi)封(feng)(feng)(feng)環(huan)(huan)(huan)(huan)(huan)(huan)032為(wei)(wei)(wei)(wei)例對本(ben)發(fa)明(ming)加以(yi)說明(ming)，其中，三(san)(san)(san)個(ge)密(mi)(mi)封(feng)(feng)(feng)環(huan)(huan)(huan)(huan)(huan)(huan)032沿通孔035徑向(xiang)由內向(xiang)外(wai)依(yi)次設(she)置，最(zui)(zui)內圈(quan)的(de)(de)(de)(de)(de)密(mi)(mi)封(feng)(feng)(feng)環(huan)(huan)(huan)(huan)(huan)(huan)032的(de)(de)(de)(de)(de)內徑與(yu)通孔035內徑相(xiang)同(tong)，最(zui)(zui)外(wai)圈(quan)的(de)(de)(de)(de)(de)密(mi)(mi)封(feng)(feng)(feng)環(huan)(huan)(huan)(huan)(huan)(huan)032的(de)(de)(de)(de)(de)外(wai)徑與(yu)翹(qiao)(qiao)(qiao)(qiao)(qiao)(qiao)曲(qu)(qu)基(ji)(ji)(ji)(ji)底(di)(di)(di)(di)04的(de)(de)(de)(de)(de)外(wai)徑相(xiang)同(tong)，且(qie)相(xiang)鄰密(mi)(mi)封(feng)(feng)(feng)環(huan)(huan)(huan)(huan)(huan)(huan)032之間的(de)(de)(de)(de)(de)距(ju)(ju)離滿足(zu)10mm～20mm。本(ben)發(fa)明(ming)實(shi)施例吸(xi)(xi)(xi)(xi)(xi)附(fu)(fu)(fu)翹(qiao)(qiao)(qiao)(qiao)(qiao)(qiao)曲(qu)(qu)基(ji)(ji)(ji)(ji)底(di)(di)(di)(di)04的(de)(de)(de)(de)(de)原理分(fen)析如(ru)圖(tu)6所(suo)示(shi)，以(yi)通孔035一(yi)(yi)側的(de)(de)(de)(de)(de)吸(xi)(xi)(xi)(xi)(xi)盤(pan)(pan)(pan)的(de)(de)(de)(de)(de)剖面(mian)結(jie)構圖(tu)為(wei)(wei)(wei)(wei)例，吸(xi)(xi)(xi)(xi)(xi)盤(pan)(pan)(pan)主體03、3個(ge)密(mi)(mi)封(feng)(feng)(feng)環(huan)(huan)(huan)(huan)(huan)(huan)032與(yu)翹(qiao)(qiao)(qiao)(qiao)(qiao)(qiao)曲(qu)(qu)基(ji)(ji)(ji)(ji)底(di)(di)(di)(di)04預(yu)期形(xing)(xing)(xing)(xing)成(cheng)3個(ge)環(huan)(huan)(huan)(huan)(huan)(huan)形(xing)(xing)(xing)(xing)真(zhen)(zhen)(zhen)空(kong)(kong)腔(qiang)，為(wei)(wei)(wei)(wei)示(shi)區別沿通孔035徑向(xiang)從內向(xiang)外(wai)依(yi)次稱(cheng)之為(wei)(wei)(wei)(wei)第(di)(di)一(yi)(yi)環(huan)(huan)(huan)(huan)(huan)(huan)形(xing)(xing)(xing)(xing)真(zhen)(zhen)(zhen)空(kong)(kong)腔(qiang)031a、第(di)(di)二(er)(er)(er)環(huan)(huan)(huan)(huan)(huan)(huan)形(xing)(xing)(xing)(xing)真(zhen)(zhen)(zhen)空(kong)(kong)腔(qiang)031b和(he)第(di)(di)三(san)(san)(san)環(huan)(huan)(huan)(huan)(huan)(huan)形(xing)(xing)(xing)(xing)真(zhen)(zhen)(zhen)空(kong)(kong)腔(qiang)031c。同(tong)時為(wei)(wei)(wei)(wei)示(shi)區別，將翹(qiao)(qiao)(qiao)(qiao)(qiao)(qiao)曲(qu)(qu)基(ji)(ji)(ji)(ji)底(di)(di)(di)(di)04被吸(xi)(xi)(xi)(xi)(xi)附(fu)(fu)(fu)過程中呈(cheng)現的(de)(de)(de)(de)(de)三(san)(san)(san)種狀(zhuang)態(tai)分(fen)別稱(cheng)為(wei)(wei)(wei)(wei)第(di)(di)一(yi)(yi)狀(zhuang)態(tai)基(ji)(ji)(ji)(ji)底(di)(di)(di)(di)04a、第(di)(di)二(er)(er)(er)狀(zhuang)態(tai)基(ji)(ji)(ji)(ji)底(di)(di)(di)(di)04b和(he)第(di)(di)三(san)(san)(san)狀(zhuang)態(tai)基(ji)(ji)(ji)(ji)底(di)(di)(di)(di)04c。當圖(tu)示(shi)“碗狀(zhuang)”翹(qiao)(qiao)(qiao)(qiao)(qiao)(qiao)曲(qu)(qu)基(ji)(ji)(ji)(ji)底(di)(di)(di)(di)04置于(yu)(yu)吸(xi)(xi)(xi)(xi)(xi)盤(pan)(pan)(pan)上(shang)表(biao)面(mian)，真(zhen)(zhen)(zhen)空(kong)(kong)源打開后，第(di)(di)一(yi)(yi)環(huan)(huan)(huan)(huan)(huan)(huan)形(xing)(xing)(xing)(xing)真(zhen)(zhen)(zhen)空(kong)(kong)腔(qiang)031a所(suo)在(zai)(zai)(zai)的(de)(de)(de)(de)(de)密(mi)(mi)封(feng)(feng)(feng)環(huan)(huan)(huan)(huan)(huan)(huan)032上(shang)表(biao)面(mian)距(ju)(ju)離翹(qiao)(qiao)(qiao)(qiao)(qiao)(qiao)曲(qu)(qu)基(ji)(ji)(ji)(ji)底(di)(di)(di)(di)04間隙較小(xiao)，所(suo)以(yi)第(di)(di)一(yi)(yi)環(huan)(huan)(huan)(huan)(huan)(huan)形(xing)(xing)(xing)(xing)真(zhen)(zhen)(zhen)空(kong)(kong)腔(qiang)031a可以(yi)順(shun)利的(de)(de)(de)(de)(de)建立，進(jin)而(er)產(chan)生(sheng)一(yi)(yi)定的(de)(de)(de)(de)(de)吸(xi)(xi)(xi)(xi)(xi)附(fu)(fu)(fu)力(li)將翹(qiao)(qiao)(qiao)(qiao)(qiao)(qiao)曲(qu)(qu)基(ji)(ji)(ji)(ji)底(di)(di)(di)(di)04吸(xi)(xi)(xi)(xi)(xi)附(fu)(fu)(fu)到吸(xi)(xi)(xi)(xi)(xi)盤(pan)(pan)(pan)上(shang)。同(tong)時，由于(yu)(yu)第(di)(di)一(yi)(yi)環(huan)(huan)(huan)(huan)(huan)(huan)形(xing)(xing)(xing)(xing)真(zhen)(zhen)(zhen)空(kong)(kong)腔(qiang)031a的(de)(de)(de)(de)(de)吸(xi)(xi)(xi)(xi)(xi)附(fu)(fu)(fu)，使(shi)翹(qiao)(qiao)(qiao)(qiao)(qiao)(qiao)曲(qu)(qu)基(ji)(ji)(ji)(ji)底(di)(di)(di)(di)04產(chan)生(sheng)變平坦的(de)(de)(de)(de)(de)趨勢，即(ji)此(ci)時翹(qiao)(qiao)(qiao)(qiao)(qiao)(qiao)曲(qu)(qu)基(ji)(ji)(ji)(ji)底(di)(di)(di)(di)04為(wei)(wei)(wei)(wei)圖(tu)6中所(suo)示(shi)的(de)(de)(de)(de)(de)第(di)(di)一(yi)(yi)狀(zhuang)態(tai)基(ji)(ji)(ji)(ji)底(di)(di)(di)(di)04a。這樣(yang)，第(di)(di)二(er)(er)(er)環(huan)(huan)(huan)(huan)(huan)(huan)形(xing)(xing)(xing)(xing)真(zhen)(zhen)(zhen)空(kong)(kong)腔(qiang)031b所(suo)在(zai)(zai)(zai)的(de)(de)(de)(de)(de)密(mi)(mi)封(feng)(feng)(feng)環(huan)(huan)(huan)(huan)(huan)(huan)032上(shang)表(biao)面(mian)距(ju)(ju)離翹(qiao)(qiao)(qiao)(qiao)(qiao)(qiao)曲(qu)(qu)基(ji)(ji)(ji)(ji)底(di)(di)(di)(di)04間隙變小(xiao)，使(shi)第(di)(di)二(er)(er)(er)環(huan)(huan)(huan)(huan)(huan)(huan)形(xing)(xing)(xing)(xing)真(zhen)(zhen)(zhen)空(kong)(kong)腔(qiang)031b也能順(shun)利建立并(bing)(bing)產(chan)生(sheng)又一(yi)(yi)個(ge)對翹(qiao)(qiao)(qiao)(qiao)(qiao)(qiao)曲(qu)(qu)基(ji)(ji)(ji)(ji)底(di)(di)(di)(di)04的(de)(de)(de)(de)(de)吸(xi)(xi)(xi)(xi)(xi)附(fu)(fu)(fu)力(li)使(shi)翹(qiao)(qiao)(qiao)(qiao)(qiao)(qiao)曲(qu)(qu)基(ji)(ji)(ji)(ji)底(di)(di)(di)(di)04繼續(xu)變平。此(ci)時翹(qiao)(qiao)(qiao)(qiao)(qiao)(qiao)曲(qu)(qu)基(ji)(ji)(ji)(ji)底(di)(di)(di)(di)04為(wei)(wei)(wei)(wei)圖(tu)6中所(suo)示(shi)的(de)(de)(de)(de)(de)第(di)(di)二(er)(er)(er)狀(zhuang)態(tai)基(ji)(ji)(ji)(ji)底(di)(di)(di)(di)04b，同(tong)樣(yang)原理，第(di)(di)三(san)(san)(san)環(huan)(huan)(huan)(huan)(huan)(huan)形(xing)(xing)(xing)(xing)真(zhen)(zhen)(zhen)空(kong)(kong)腔(qiang)031c所(suo)在(zai)(zai)(zai)的(de)(de)(de)(de)(de)密(mi)(mi)封(feng)(feng)(feng)環(huan)(huan)(huan)(huan)(huan)(huan)032上(shang)表(biao)面(mian)距(ju)(ju)離翹(qiao)(qiao)(qiao)(qiao)(qiao)(qiao)曲(qu)(qu)基(ji)(ji)(ji)(ji)底(di)(di)(di)(di)04間隙也變小(xiao)，第(di)(di)三(san)(san)(san)環(huan)(huan)(huan)(huan)(huan)(huan)形(xing)(xing)(xing)(xing)真(zhen)(zhen)(zhen)空(kong)(kong)腔(qiang)031c也能順(shun)利建立并(bing)(bing)將翹(qiao)(qiao)(qiao)(qiao)(qiao)(qiao)曲(qu)(qu)基(ji)(ji)(ji)(ji)底(di)(di)(di)(di)04繼續(xu)壓平，使(shi)翹(qiao)(qiao)(qiao)(qiao)(qiao)(qiao)曲(qu)(qu)基(ji)(ji)(ji)(ji)底(di)(di)(di)(di)04變為(wei)(wei)(wei)(wei)圖(tu)6中所(suo)示(shi)的(de)(de)(de)(de)(de)第(di)(di)三(san)(san)(san)狀(zhuang)態(tai)基(ji)(ji)(ji)(ji)底(di)(di)(di)(di)04c，最(zui)(zui)終，3個(ge)環(huan)(huan)(huan)(huan)(huan)(huan)形(xing)(xing)(xing)(xing)真(zhen)(zhen)(zhen)空(kong)(kong)腔(qiang)使(shi)得翹(qiao)(qiao)(qiao)(qiao)(qiao)(qiao)曲(qu)(qu)基(ji)(ji)(ji)(ji)底(di)(di)(di)(di)04牢固可靠(kao)的(de)(de)(de)(de)(de)被吸(xi)(xi)(xi)(xi)(xi)附(fu)(fu)(fu)在(zai)(zai)(zai)吸(xi)(xi)(xi)(xi)(xi)盤(pan)(pan)(pan)上(shang)。經實(shi)驗(yan)證實(shi)，對于(yu)(yu)翹(qiao)(qiao)(qiao)(qiao)(qiao)(qiao)曲(qu)(qu)度小(xiao)于(yu)(yu)等于(yu)(yu)120um的(de)(de)(de)(de)(de)翹(qiao)(qiao)(qiao)(qiao)(qiao)(qiao)曲(qu)(qu)基(ji)(ji)(ji)(ji)底(di)(di)(di)(di)04，該方案(an)可以(yi)牢固可靠(kao)的(de)(de)(de)(de)(de)吸(xi)(xi)(xi)(xi)(xi)附(fu)(fu)(fu)固定。

本發(fa)明實(shi)施例通(tong)過內(nei)圈的(de)(de)環(huan)形(xing)(xing)(xing)(xing)真(zhen)空(kong)腔(qiang)(qiang)先吸(xi)附(fu)，然(ran)后(hou)外圈的(de)(de)環(huan)形(xing)(xing)(xing)(xing)真(zhen)空(kong)腔(qiang)(qiang)依次(ci)吸(xi)附(fu)的(de)(de)方式，能夠逐(zhu)步改善基(ji)底與(yu)環(huan)形(xing)(xing)(xing)(xing)真(zhen)空(kong)腔(qiang)(qiang)之間的(de)(de)間隙，內(nei)圈的(de)(de)環(huan)形(xing)(xing)(xing)(xing)真(zhen)空(kong)腔(qiang)(qiang)吸(xi)附(fu)后(hou)會(hui)減小(xiao)相(xiang)鄰外圈環(huan)形(xing)(xing)(xing)(xing)真(zhen)空(kong)腔(qiang)(qiang)與(yu)基(ji)底之間的(de)(de)間隙，有利(li)于外圈的(de)(de)環(huan)形(xing)(xing)(xing)(xing)真(zhen)空(kong)腔(qiang)(qiang)的(de)(de)吸(xi)附(fu)，最終實(shi)現對翹曲基(ji)底的(de)(de)有效吸(xi)附(fu)。

繼續(xu)參(can)照圖(tu)(tu)4至圖(tu)(tu)6，本發明還提供一(yi)種采用上(shang)(shang)述吸(xi)(xi)附(fu)(fu)(fu)(fu)基(ji)(ji)(ji)(ji)(ji)(ji)(ji)底(di)(di)(di)(di)(di)(di)(di)特(te)別是(shi)翹曲(qu)(qu)(qu)基(ji)(ji)(ji)(ji)(ji)(ji)(ji)底(di)(di)(di)(di)(di)(di)(di)的(de)(de)(de)(de)(de)(de)(de)(de)吸(xi)(xi)盤(pan)的(de)(de)(de)(de)(de)(de)(de)(de)吸(xi)(xi)附(fu)(fu)(fu)(fu)方法，一(yi)個密(mi)(mi)(mi)(mi)封(feng)環(huan)(huan)(huan)(huan)(huan)(huan)032與(yu)另(ling)一(yi)個密(mi)(mi)(mi)(mi)封(feng)環(huan)(huan)(huan)(huan)(huan)(huan)032上(shang)(shang)的(de)(de)(de)(de)(de)(de)(de)(de)真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)(kong)孔034所(suo)(suo)連通(tong)的(de)(de)(de)(de)(de)(de)(de)(de)真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)(kong)源的(de)(de)(de)(de)(de)(de)(de)(de)控制(zhi)彼此獨立(li)，使(shi)(shi)(shi)得密(mi)(mi)(mi)(mi)封(feng)環(huan)(huan)(huan)(huan)(huan)(huan)032上(shang)(shang)所(suo)(suo)述環(huan)(huan)(huan)(huan)(huan)(huan)形(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)(kong)腔(qiang)(qiang)(qiang)(qiang)(qiang)的(de)(de)(de)(de)(de)(de)(de)(de)氣(qi)(qi)路控制(zhi)彼此獨立(li)。在進(jin)行基(ji)(ji)(ji)(ji)(ji)(ji)(ji)底(di)(di)(di)(di)(di)(di)(di)吸(xi)(xi)附(fu)(fu)(fu)(fu)時(shi)(shi)，沿通(tong)孔035徑向由內向外依(yi)次打(da)開所(suo)(suo)述環(huan)(huan)(huan)(huan)(huan)(huan)形(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)(kong)腔(qiang)(qiang)(qiang)(qiang)(qiang)連通(tong)的(de)(de)(de)(de)(de)(de)(de)(de)真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)(kong)源，對基(ji)(ji)(ji)(ji)(ji)(ji)(ji)底(di)(di)(di)(di)(di)(di)(di)進(jin)行分時(shi)(shi)吸(xi)(xi)附(fu)(fu)(fu)(fu)。具體(ti)實(shi)施方式可(ke)(ke)(ke)參(can)考如(ru)圖(tu)(tu)6所(suo)(suo)示，吸(xi)(xi)盤(pan)主(zhu)體(ti)03、密(mi)(mi)(mi)(mi)封(feng)環(huan)(huan)(huan)(huan)(huan)(huan)032與(yu)翹曲(qu)(qu)(qu)基(ji)(ji)(ji)(ji)(ji)(ji)(ji)底(di)(di)(di)(di)(di)(di)(di)04預期形(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)成(cheng)3個環(huan)(huan)(huan)(huan)(huan)(huan)形(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)(kong)腔(qiang)(qiang)(qiang)(qiang)(qiang)，為(wei)(wei)(wei)(wei)示區(qu)別從內向外依(yi)次稱之為(wei)(wei)(wei)(wei)第(di)(di)(di)(di)(di)(di)(di)(di)(di)一(yi)環(huan)(huan)(huan)(huan)(huan)(huan)形(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)(kong)腔(qiang)(qiang)(qiang)(qiang)(qiang)031a、第(di)(di)(di)(di)(di)(di)(di)(di)(di)二(er)環(huan)(huan)(huan)(huan)(huan)(huan)形(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)(kong)腔(qiang)(qiang)(qiang)(qiang)(qiang)031b和第(di)(di)(di)(di)(di)(di)(di)(di)(di)三(san)環(huan)(huan)(huan)(huan)(huan)(huan)形(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)(kong)腔(qiang)(qiang)(qiang)(qiang)(qiang)031c。同時(shi)(shi)為(wei)(wei)(wei)(wei)示區(qu)別，將(jiang)翹曲(qu)(qu)(qu)基(ji)(ji)(ji)(ji)(ji)(ji)(ji)底(di)(di)(di)(di)(di)(di)(di)04被(bei)吸(xi)(xi)附(fu)(fu)(fu)(fu)過(guo)(guo)程(cheng)中呈現的(de)(de)(de)(de)(de)(de)(de)(de)三(san)種狀(zhuang)(zhuang)(zhuang)(zhuang)態(tai)(tai)分別稱為(wei)(wei)(wei)(wei)第(di)(di)(di)(di)(di)(di)(di)(di)(di)一(yi)狀(zhuang)(zhuang)(zhuang)(zhuang)態(tai)(tai)基(ji)(ji)(ji)(ji)(ji)(ji)(ji)底(di)(di)(di)(di)(di)(di)(di)04a、第(di)(di)(di)(di)(di)(di)(di)(di)(di)二(er)狀(zhuang)(zhuang)(zhuang)(zhuang)態(tai)(tai)基(ji)(ji)(ji)(ji)(ji)(ji)(ji)底(di)(di)(di)(di)(di)(di)(di)04b和第(di)(di)(di)(di)(di)(di)(di)(di)(di)三(san)狀(zhuang)(zhuang)(zhuang)(zhuang)態(tai)(tai)基(ji)(ji)(ji)(ji)(ji)(ji)(ji)底(di)(di)(di)(di)(di)(di)(di)04c。3個環(huan)(huan)(huan)(huan)(huan)(huan)形(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)(kong)腔(qiang)(qiang)(qiang)(qiang)(qiang)的(de)(de)(de)(de)(de)(de)(de)(de)氣(qi)(qi)路控制(zhi)彼此獨立(li)。當圖(tu)(tu)示“碗狀(zhuang)(zhuang)(zhuang)(zhuang)”翹曲(qu)(qu)(qu)基(ji)(ji)(ji)(ji)(ji)(ji)(ji)底(di)(di)(di)(di)(di)(di)(di)04置(zhi)于吸(xi)(xi)盤(pan)上(shang)(shang)表(biao)面(mian)，首先打(da)開第(di)(di)(di)(di)(di)(di)(di)(di)(di)一(yi)環(huan)(huan)(huan)(huan)(huan)(huan)形(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)(kong)腔(qiang)(qiang)(qiang)(qiang)(qiang)031a的(de)(de)(de)(de)(de)(de)(de)(de)真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)(kong)源，第(di)(di)(di)(di)(di)(di)(di)(di)(di)一(yi)環(huan)(huan)(huan)(huan)(huan)(huan)形(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)(kong)腔(qiang)(qiang)(qiang)(qiang)(qiang)031a所(suo)(suo)在的(de)(de)(de)(de)(de)(de)(de)(de)密(mi)(mi)(mi)(mi)封(feng)環(huan)(huan)(huan)(huan)(huan)(huan)032上(shang)(shang)表(biao)面(mian)距離翹曲(qu)(qu)(qu)基(ji)(ji)(ji)(ji)(ji)(ji)(ji)底(di)(di)(di)(di)(di)(di)(di)04間(jian)(jian)(jian)隙(xi)(xi)較小(xiao)，所(suo)(suo)以(yi)第(di)(di)(di)(di)(di)(di)(di)(di)(di)一(yi)環(huan)(huan)(huan)(huan)(huan)(huan)形(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)(kong)腔(qiang)(qiang)(qiang)(qiang)(qiang)031a可(ke)(ke)(ke)以(yi)順利(li)的(de)(de)(de)(de)(de)(de)(de)(de)建(jian)立(li)，進(jin)而(er)產生(sheng)一(yi)定的(de)(de)(de)(de)(de)(de)(de)(de)吸(xi)(xi)附(fu)(fu)(fu)(fu)力將(jiang)翹曲(qu)(qu)(qu)基(ji)(ji)(ji)(ji)(ji)(ji)(ji)底(di)(di)(di)(di)(di)(di)(di)04吸(xi)(xi)附(fu)(fu)(fu)(fu)到吸(xi)(xi)盤(pan)上(shang)(shang)。同時(shi)(shi)，由于第(di)(di)(di)(di)(di)(di)(di)(di)(di)一(yi)環(huan)(huan)(huan)(huan)(huan)(huan)形(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)(kong)腔(qiang)(qiang)(qiang)(qiang)(qiang)031a的(de)(de)(de)(de)(de)(de)(de)(de)吸(xi)(xi)附(fu)(fu)(fu)(fu)，使(shi)(shi)(shi)翹曲(qu)(qu)(qu)基(ji)(ji)(ji)(ji)(ji)(ji)(ji)底(di)(di)(di)(di)(di)(di)(di)04產生(sheng)變(bian)平坦(tan)的(de)(de)(de)(de)(de)(de)(de)(de)趨勢，即此時(shi)(shi)翹曲(qu)(qu)(qu)基(ji)(ji)(ji)(ji)(ji)(ji)(ji)底(di)(di)(di)(di)(di)(di)(di)04為(wei)(wei)(wei)(wei)圖(tu)(tu)6中所(suo)(suo)示的(de)(de)(de)(de)(de)(de)(de)(de)第(di)(di)(di)(di)(di)(di)(di)(di)(di)一(yi)狀(zhuang)(zhuang)(zhuang)(zhuang)態(tai)(tai)基(ji)(ji)(ji)(ji)(ji)(ji)(ji)底(di)(di)(di)(di)(di)(di)(di)04a。這樣，第(di)(di)(di)(di)(di)(di)(di)(di)(di)二(er)環(huan)(huan)(huan)(huan)(huan)(huan)形(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)(kong)腔(qiang)(qiang)(qiang)(qiang)(qiang)031b所(suo)(suo)在的(de)(de)(de)(de)(de)(de)(de)(de)密(mi)(mi)(mi)(mi)封(feng)環(huan)(huan)(huan)(huan)(huan)(huan)032上(shang)(shang)表(biao)面(mian)距離翹曲(qu)(qu)(qu)基(ji)(ji)(ji)(ji)(ji)(ji)(ji)底(di)(di)(di)(di)(di)(di)(di)04間(jian)(jian)(jian)隙(xi)(xi)變(bian)小(xiao)，此時(shi)(shi)，再打(da)開第(di)(di)(di)(di)(di)(di)(di)(di)(di)二(er)環(huan)(huan)(huan)(huan)(huan)(huan)形(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)(kong)腔(qiang)(qiang)(qiang)(qiang)(qiang)031b的(de)(de)(de)(de)(de)(de)(de)(de)真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)(kong)源，使(shi)(shi)(shi)第(di)(di)(di)(di)(di)(di)(di)(di)(di)二(er)環(huan)(huan)(huan)(huan)(huan)(huan)形(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)(kong)腔(qiang)(qiang)(qiang)(qiang)(qiang)031b也(ye)(ye)(ye)能(neng)(neng)順利(li)建(jian)立(li)并產生(sheng)又一(yi)個對翹曲(qu)(qu)(qu)基(ji)(ji)(ji)(ji)(ji)(ji)(ji)底(di)(di)(di)(di)(di)(di)(di)04的(de)(de)(de)(de)(de)(de)(de)(de)吸(xi)(xi)附(fu)(fu)(fu)(fu)力使(shi)(shi)(shi)翹曲(qu)(qu)(qu)基(ji)(ji)(ji)(ji)(ji)(ji)(ji)底(di)(di)(di)(di)(di)(di)(di)04繼續(xu)變(bian)平。此時(shi)(shi)翹曲(qu)(qu)(qu)基(ji)(ji)(ji)(ji)(ji)(ji)(ji)底(di)(di)(di)(di)(di)(di)(di)04為(wei)(wei)(wei)(wei)圖(tu)(tu)6中所(suo)(suo)示的(de)(de)(de)(de)(de)(de)(de)(de)第(di)(di)(di)(di)(di)(di)(di)(di)(di)二(er)狀(zhuang)(zhuang)(zhuang)(zhuang)態(tai)(tai)基(ji)(ji)(ji)(ji)(ji)(ji)(ji)底(di)(di)(di)(di)(di)(di)(di)04b。然后(hou)再打(da)開第(di)(di)(di)(di)(di)(di)(di)(di)(di)三(san)環(huan)(huan)(huan)(huan)(huan)(huan)形(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)(kong)腔(qiang)(qiang)(qiang)(qiang)(qiang)031c的(de)(de)(de)(de)(de)(de)(de)(de)真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)(kong)源，第(di)(di)(di)(di)(di)(di)(di)(di)(di)三(san)環(huan)(huan)(huan)(huan)(huan)(huan)形(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)(kong)腔(qiang)(qiang)(qiang)(qiang)(qiang)031c所(suo)(suo)在的(de)(de)(de)(de)(de)(de)(de)(de)密(mi)(mi)(mi)(mi)封(feng)環(huan)(huan)(huan)(huan)(huan)(huan)032上(shang)(shang)表(biao)面(mian)距離翹曲(qu)(qu)(qu)基(ji)(ji)(ji)(ji)(ji)(ji)(ji)底(di)(di)(di)(di)(di)(di)(di)04間(jian)(jian)(jian)隙(xi)(xi)也(ye)(ye)(ye)變(bian)小(xiao)，第(di)(di)(di)(di)(di)(di)(di)(di)(di)三(san)環(huan)(huan)(huan)(huan)(huan)(huan)形(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)(kong)腔(qiang)(qiang)(qiang)(qiang)(qiang)031c也(ye)(ye)(ye)能(neng)(neng)順利(li)建(jian)立(li)并將(jiang)翹曲(qu)(qu)(qu)基(ji)(ji)(ji)(ji)(ji)(ji)(ji)底(di)(di)(di)(di)(di)(di)(di)04繼續(xu)壓平，使(shi)(shi)(shi)翹曲(qu)(qu)(qu)基(ji)(ji)(ji)(ji)(ji)(ji)(ji)底(di)(di)(di)(di)(di)(di)(di)04變(bian)為(wei)(wei)(wei)(wei)圖(tu)(tu)6中所(suo)(suo)示的(de)(de)(de)(de)(de)(de)(de)(de)第(di)(di)(di)(di)(di)(di)(di)(di)(di)三(san)狀(zhuang)(zhuang)(zhuang)(zhuang)態(tai)(tai)基(ji)(ji)(ji)(ji)(ji)(ji)(ji)底(di)(di)(di)(di)(di)(di)(di)04c。最終(zhong)，3個環(huan)(huan)(huan)(huan)(huan)(huan)形(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)(kong)腔(qiang)(qiang)(qiang)(qiang)(qiang)的(de)(de)(de)(de)(de)(de)(de)(de)相(xiang)繼開啟，使(shi)(shi)(shi)翹曲(qu)(qu)(qu)基(ji)(ji)(ji)(ji)(ji)(ji)(ji)底(di)(di)(di)(di)(di)(di)(di)04牢固(gu)可(ke)(ke)(ke)靠(kao)的(de)(de)(de)(de)(de)(de)(de)(de)吸(xi)(xi)附(fu)(fu)(fu)(fu)在吸(xi)(xi)盤(pan)上(shang)(shang)。本 實(shi)施例的(de)(de)(de)(de)(de)(de)(de)(de)改進(jin)之處(chu)在于，在初始吸(xi)(xi)附(fu)(fu)(fu)(fu)狀(zhuang)(zhuang)(zhuang)(zhuang)態(tai)(tai)時(shi)(shi)，第(di)(di)(di)(di)(di)(di)(di)(di)(di)一(yi)環(huan)(huan)(huan)(huan)(huan)(huan)形(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)(kong)腔(qiang)(qiang)(qiang)(qiang)(qiang)031a的(de)(de)(de)(de)(de)(de)(de)(de)真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)(kong)不會(hui)因(yin)為(wei)(wei)(wei)(wei)第(di)(di)(di)(di)(di)(di)(di)(di)(di)三(san)環(huan)(huan)(huan)(huan)(huan)(huan)形(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)(kong)腔(qiang)(qiang)(qiang)(qiang)(qiang)031c或者第(di)(di)(di)(di)(di)(di)(di)(di)(di)二(er)環(huan)(huan)(huan)(huan)(huan)(huan)形(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)(kong)腔(qiang)(qiang)(qiang)(qiang)(qiang)031b處(chu)與(yu)翹曲(qu)(qu)(qu)基(ji)(ji)(ji)(ji)(ji)(ji)(ji)底(di)(di)(di)(di)(di)(di)(di)04的(de)(de)(de)(de)(de)(de)(de)(de)過(guo)(guo)大間(jian)(jian)(jian)隙(xi)(xi)造成(cheng)損失，使(shi)(shi)(shi)第(di)(di)(di)(di)(di)(di)(di)(di)(di)一(yi)環(huan)(huan)(huan)(huan)(huan)(huan)形(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)(kong)腔(qiang)(qiang)(qiang)(qiang)(qiang)031a能(neng)(neng)更有(you)效的(de)(de)(de)(de)(de)(de)(de)(de)建(jian)立(li)，同理第(di)(di)(di)(di)(di)(di)(di)(di)(di)二(er)環(huan)(huan)(huan)(huan)(huan)(huan)形(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)(kong)腔(qiang)(qiang)(qiang)(qiang)(qiang)031b的(de)(de)(de)(de)(de)(de)(de)(de)真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)(kong)也(ye)(ye)(ye)不會(hui)因(yin)為(wei)(wei)(wei)(wei)第(di)(di)(di)(di)(di)(di)(di)(di)(di)三(san)環(huan)(huan)(huan)(huan)(huan)(huan)形(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)(kong)腔(qiang)(qiang)(qiang)(qiang)(qiang)031c的(de)(de)(de)(de)(de)(de)(de)(de)較大間(jian)(jian)(jian)隙(xi)(xi)而(er)造成(cheng)損失，使(shi)(shi)(shi)第(di)(di)(di)(di)(di)(di)(di)(di)(di)二(er)環(huan)(huan)(huan)(huan)(huan)(huan)形(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)(xing)真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)(kong)腔(qiang)(qiang)(qiang)(qiang)(qiang)031b也(ye)(ye)(ye)能(neng)(neng)更有(you)效的(de)(de)(de)(de)(de)(de)(de)(de)建(jian)立(li)。