本(ben)公開涉及一種(zhong)(zhong)mems器(qi)(qi)(qi)件(jian)，尤其是(shi)反射鏡型(xing)mems器(qi)(qi)(qi)件(jian)，其具有對mems器(qi)(qi)(qi)件(jian)的(de)(de)可(ke)(ke)變(bian)(bian)(bian)(bian)形(xing)(xing)(xing)結構的(de)(de)變(bian)(bian)(bian)(bian)形(xing)(xing)(xing)的(de)(de)改善檢測，并且涉及一種(zhong)(zhong)用于mems器(qi)(qi)(qi)件(jian)的(de)(de)制造工藝(yi)。具體來說，本(ben)公開涉及一種(zhong)(zhong)mems器(qi)(qi)(qi)件(jian)，其包(bao)括(kuo)可(ke)(ke)變(bian)(bian)(bian)(bian)形(xing)(xing)(xing)結構，所(suo)述(shu)可(ke)(ke)變(bian)(bian)(bian)(bian)形(xing)(xing)(xing)結構包(bao)括(kuo)用于控制所(suo)述(shu)可(ke)(ke)變(bian)(bian)(bian)(bian)形(xing)(xing)(xing)結構的(de)(de)變(bian)(bian)(bian)(bian)形(xing)(xing)(xing)的(de)(de)壓電致動器(qi)(qi)(qi)和用于改善對所(suo)述(shu)可(ke)(ke)變(bian)(bian)(bian)(bian)形(xing)(xing)(xing)結構的(de)(de)變(bian)(bian)(bian)(bian)形(xing)(xing)(xing)的(de)(de)檢測的(de)(de)應變(bian)(bian)(bian)(bian)傳感器(qi)(qi)(qi)。本(ben)公開還涉及mems器(qi)(qi)(qi)件(jian)的(de)(de)制造工藝(yi)，mems器(qi)(qi)(qi)件(jian)的(de)(de)操作方法(fa)，以及包(bao)括(kuo)mems器(qi)(qi)(qi)件(jian)的(de)(de)電子裝(zhuang)置。

背景技術：

1、眾所周知，微機電系統(mems)器(qi)件通(tong)常被使用(yong)和銷售，這種mems器(qi)件包括用(yong)半導(dao)體材料技術形成的可傾(qing)斜結構(gou)，例如反射鏡結構(gou)。

2、例如(ru)，具有反射(she)(she)鏡結構的(de)(de)(de)mems器(qi)件例如(ru)用(yong)(yong)在便攜式設備中(zhong)，例如(ru)用(yong)(yong)于光(guang)學應(ying)用(yong)(yong)的(de)(de)(de)便攜式計(ji)(ji)算(suan)(suan)機、膝上型計(ji)(ji)算(suan)(suan)機、筆記本(ben)(包(bao)括超薄(bo)筆記本(ben))、pda、平板計(ji)(ji)算(suan)(suan)機、智能電(dian)話。特別(bie)地，它們可(ke)以用(yong)(yong)于以期望(wang)的(de)(de)(de)模(mo)式引導(dao)由屏(ping)幕上或lidar型顯示器(qi)應(ying)用(yong)(yong)中(zhong)的(de)(de)(de)光(guang)源生成的(de)(de)(de)光(guang)輻射(she)(she)束。

3、由于(yu)它們的小(xiao)尺寸，這(zhe)些(xie)器件(jian)允(yun)許在面積和厚度(du)方面滿足(zu)關于(yu)器件(jian)尺寸的嚴格要求。

4、例如，mems反射鏡器(qi)件被(bei)用(yong)在(zai)小型化的(de)投(tou)影(ying)儀(yi)(yi)模(mo)塊(所(suo)謂(wei)的(de)微微投(tou)影(ying)儀(yi)(yi))中，其(qi)能(neng)夠在(zai)一定距離(li)處投(tou)影(ying)圖(tu)像或生成期望的(de)光圖(tu)案。

5、mems反(fan)(fan)射(she)(she)鏡(jing)裝置通(tong)常(chang)包(bao)括懸置在腔體(ti)上方的(de)(de)(de)(de)反(fan)(fan)射(she)(she)鏡(jing)元(yuan)件和將反(fan)(fan)射(she)(she)鏡(jing)元(yuan)件彈性(xing)地耦合到(dao)mems反(fan)(fan)射(she)(she)鏡(jing)裝置的(de)(de)(de)(de)錨定結(jie)構(gou)的(de)(de)(de)(de)可(ke)(ke)變形結(jie)構(gou)。反(fan)(fan)射(she)(she)鏡(jing)元(yuan)件從(cong)(cong)半導(dao)體(ti)材(cai)料體(ti)開始(shi)形成，從(cong)(cong)而使得其(qi)可(ke)(ke)移動(dong)，通(tong)常(chang)以傾(qing)斜或旋(xuan)轉(zhuan)運動(dong)，從(cong)(cong)而以期望(wang)的(de)(de)(de)(de)方式引導(dao)入射(she)(she)光束(shu)。通(tong)常(chang)，反(fan)(fan)射(she)(she)鏡(jing)元(yuan)件由壓電(dian)型或電(dian)容型致(zhi)動(dong)器控制(zhi)和旋(xuan)轉(zhuan)，所述致(zhi)動(dong)器是可(ke)(ke)變形結(jie)構(gou)的(de)(de)(de)(de)一部分。

6、為了允(yun)許(xu)更好地(di)控(kong)制該(gai)反(fan)(fan)(fan)射鏡(jing)元(yuan)(yuan)(yuan)件(jian)(jian)并(bing)且因此更好地(di)控(kong)制由此引導的(de)(de)光(guang)束，已(yi)知的(de)(de)是(shi)將被配(pei)置(zhi)為檢(jian)測(ce)(ce)該(gai)可變形(xing)結構的(de)(de)變形(xing)的(de)(de)一個或多個應(ying)變傳感器(qi)耦合到該(gai)反(fan)(fan)(fan)射鏡(jing)元(yuan)(yuan)(yuan)件(jian)(jian)上以便(bian)允(yun)許(xu)確定該(gai)反(fan)(fan)(fan)射鏡(jing)元(yuan)(yuan)(yuan)件(jian)(jian)的(de)(de)位置(zhi)。這允(yun)許(xu)例如以閉(bi)環模式控(kong)制反(fan)(fan)(fan)射鏡(jing)元(yuan)(yuan)(yuan)件(jian)(jian)，根據反(fan)(fan)(fan)射鏡(jing)元(yuan)(yuan)(yuan)件(jian)(jian)的(de)(de)檢(jian)測(ce)(ce)位置(zhi)操作致動器(qi)。因此，應(ying)變傳感器(qi)的(de)(de)使用允(yun)許(xu)更精確地(di)控(kong)制反(fan)(fan)(fan)射鏡(jing)元(yuan)(yuan)(yuan)件(jian)(jian)的(de)(de)位置(zhi)。

7、為此，已知例如使用(yong)壓(ya)(ya)阻傳(chuan)(chuan)感(gan)(gan)器(qi)來檢測(ce)反(fan)(fan)射(she)鏡元(yuan)(yuan)件(jian)(jian)的(de)(de)(de)位置。具體地，這(zhe)種壓(ya)(ya)阻傳(chuan)(chuan)感(gan)(gan)器(qi)包括(kuo)半導體材料(例如硅(gui))的(de)(de)(de)敏(min)感(gan)(gan)元(yuan)(yuan)件(jian)(jian)，其電(dian)(dian)阻是這(zhe)些敏(min)感(gan)(gan)元(yuan)(yuan)件(jian)(jian)的(de)(de)(de)機械變形(xing)的(de)(de)(de)函數。因(yin)(yin)此，當致(zhi)動(dong)(dong)器(qi)生成反(fan)(fan)射(she)鏡元(yuan)(yuan)件(jian)(jian)的(de)(de)(de)運動(dong)(dong)時(shi)，它們(men)還引(yin)起敏(min)感(gan)(gan)元(yuan)(yuan)件(jian)(jian)的(de)(de)(de)機械變形(xing)，該機械變形(xing)被檢測(ce)為敏(min)感(gan)(gan)元(yuan)(yuan)件(jian)(jian)兩端的(de)(de)(de)電(dian)(dian)壓(ya)(ya)/電(dian)(dian)流變化(hua)。然而，壓(ya)(ya)阻式傳(chuan)(chuan)感(gan)(gan)器(qi)具有(you)低(di)測(ce)量靈敏(min)度(例如，低(di)于約3mv/℃)、高電(dian)(dian)力消耗、需(xu)要額外的(de)(de)(de)制(zhi)(zhi)造步驟且(qie)因(yin)(yin)此需(xu)要較高的(de)(de)(de)生產成本(ben)和(he)時(shi)間、并(bing)且(qie)高度關聯于(dependent?on)溫度變化(hua)(例如，－0.25％/℃)。因(yin)(yin)此，使用(yong)壓(ya)(ya)阻傳(chuan)(chuan)感(gan)(gan)器(qi)需(xu)要復雜的(de)(de)(de)校準過程來平衡這(zhe)些傳(chuan)(chuan)感(gan)(gan)器(qi)可(ke)能受到的(de)(de)(de)熱效應(ying)，并(bing)且(qie)通常導致(zhi)測(ce)量精度受到限制(zhi)(zhi)。

8、其(qi)它已(yi)知的(de)方法(fa)基于(yu)使用(yong)具有“單(dan)端”讀(du)數的(de)壓電(dian)(dian)(dian)(dian)傳感器(qi)來檢測反(fan)(fan)射(she)鏡元件的(de)位(wei)(wei)(wei)置。壓電(dian)(dian)(dian)(dian)傳感器(qi)可(ke)以包括壓電(dian)(dian)(dian)(dian)絕緣(yuan)材料(例如，鋯(gao)鈦酸鉛、pzt或氮化鋁、鋁)的(de)相應敏(min)感元件，當(dang)經(jing)受由致動器(qi)生(sheng)成(cheng)(cheng)用(yong)以控(kong)制(zhi)反(fan)(fan)射(she)鏡元件的(de)機械變形時，該(gai)(gai)敏(min)感元件被偏置，從而在其(qi)間生(sheng)成(cheng)(cheng)電(dian)(dian)(dian)(dian)勢(shi)差。已(yi)知的(de)方法(fa)包括以“單(dan)端”模式讀(du)取(qu)該(gai)(gai)電(dian)(dian)(dian)(dian)勢(shi)差，即(ji)放大該(gai)(gai)電(dian)(dian)(dian)(dian)勢(shi)差，從而通過adc轉換(huan)器(qi)將其(qi)轉換(huan)為相應的(de)數字(zi)信號，并且使用(yong)該(gai)(gai)數字(zi)信號來確定(ding)反(fan)(fan)射(she)鏡元件的(de)位(wei)(wei)(wei)置和/或控(kong)制(zhi)其(qi)“閉環”位(wei)(wei)(wei)置。

9、類似地，還存在基于(yu)(yu)使用具(ju)(ju)有差分讀(du)數的(de)多(duo)個壓(ya)電傳(chuan)感器(qi)來檢(jian)測反(fan)射鏡(jing)元(yuan)(yuan)件的(de)位置的(de)已(yi)知方(fang)法。例如，這(zhe)些壓(ya)電傳(chuan)感器(qi)具(ju)(ju)有類似于(yu)(yu)針(zhen)對“單(dan)端”讀(du)取情況所描(miao)述的(de)結構，并(bing)且相對于(yu)(yu)反(fan)射鏡(jing)元(yuan)(yuan)件對稱地布(bu)置，從而在使用中(zhong)分別在“單(dan)端”情況下(xia)測量彼此相位相反(fan)并(bing)且因此可以(yi)以(yi)差分模式采集的(de)電信號，以(yi)便提高測量靈敏度和增(zeng)加snr。

10、然(ran)而，在這兩種(zhong)情(qing)況下，通(tong)過相對于(yu)(yu)用(yong)于(yu)(yu)形成(cheng)致(zhi)動(dong)器的(de)制(zhi)造(zao)(zao)工藝步(bu)驟(zou)(zou)附加的(de)制(zhi)造(zao)(zao)工藝步(bu)驟(zou)(zou)，或者通(tong)過用(yong)于(yu)(yu)形成(cheng)致(zhi)動(dong)器的(de)相同制(zhi)造(zao)(zao)工藝步(bu)驟(zou)(zou)，壓電(dian)(dian)傳(chuan)(chuan)感器通(tong)常被形成(cheng)為橫(heng)向于(yu)(yu)通(tong)常為壓電(dian)(dian)類型的(de)致(zhi)動(dong)器以便更容(rong)易(yi)在制(zhi)造(zao)(zao)步(bu)驟(zou)(zou)中(zhong)與壓電(dian)(dian)傳(chuan)(chuan)感器集(ji)成(cheng)。

11、在第一種情況下，由于(yu)用于(yu)形成(cheng)器件的光刻掩(yan)模和(he)制造步驟的數量更多(duo)，這需(xu)要(yao)制造工藝(yi)的更大復(fu)雜性。

12、在(zai)(zai)第二種情況下，這使(shi)得應變(bian)傳感(gan)器(qi)(qi)和(he)(he)(he)致(zhi)(zhi)動(dong)(dong)(dong)(dong)(dong)器(qi)(qi)具(ju)有類似的(de)(de)(de)(de)(de)(de)物(wu)理(li)結(jie)構(即(ji)，形(xing)成(cheng)它(ta)(ta)們的(de)(de)(de)(de)(de)(de)層(ceng)(ceng)的(de)(de)(de)(de)(de)(de)垂直連續對于(yu)(yu)應變(bian)傳感(gan)器(qi)(qi)和(he)(he)(he)致(zhi)(zhi)動(dong)(dong)(dong)(dong)(dong)器(qi)(qi)是(shi)相(xiang)(xiang)同(tong)的(de)(de)(de)(de)(de)(de))。此(ci)外，由(you)致(zhi)(zhi)動(dong)(dong)(dong)(dong)(dong)器(qi)(qi)用(yong)(yong)來生(sheng)成(cheng)反(fan)射鏡元(yuan)件(jian)(jian)(jian)的(de)(de)(de)(de)(de)(de)運動(dong)(dong)(dong)(dong)(dong)的(de)(de)(de)(de)(de)(de)壓電(dian)(dian)(dian)絕(jue)(jue)緣(yuan)(yuan)(yuan)材(cai)(cai)(cai)料(liao)部(bu)分(fen)(fen)(fen)和(he)(he)(he)由(you)壓電(dian)(dian)(dian)傳感(gan)器(qi)(qi)用(yong)(yong)來檢測反(fan)射鏡元(yuan)件(jian)(jian)(jian)的(de)(de)(de)(de)(de)(de)運動(dong)(dong)(dong)(dong)(dong)的(de)(de)(de)(de)(de)(de)壓電(dian)(dian)(dian)絕(jue)(jue)緣(yuan)(yuan)(yuan)材(cai)(cai)(cai)料(liao)部(bu)分(fen)(fen)(fen)是(shi)同(tong)一(yi)壓電(dian)(dian)(dian)絕(jue)(jue)緣(yuan)(yuan)(yuan)材(cai)(cai)(cai)料(liao)層(ceng)(ceng)的(de)(de)(de)(de)(de)(de)一(yi)部(bu)分(fen)(fen)(fen)，即(ji)從同(tong)一(yi)壓電(dian)(dian)(dian)絕(jue)(jue)緣(yuan)(yuan)(yuan)材(cai)(cai)(cai)料(liao)(例如pzt)層(ceng)(ceng)開始形(xing)成(cheng)，該壓電(dian)(dian)(dian)絕(jue)(jue)緣(yuan)(yuan)(yuan)材(cai)(cai)(cai)料(liao)層(ceng)(ceng)首先被沉積，然后被圖案化以形(xing)成(cheng)用(yong)(yong)于(yu)(yu)不(bu)同(tong)檢測或致(zhi)(zhi)動(dong)(dong)(dong)(dong)(dong)用(yong)(yong)途的(de)(de)(de)(de)(de)(de)不(bu)同(tong)部(bu)分(fen)(fen)(fen)。這在(zai)(zai)裝置設計中(zhong)生(sheng)成(cheng)了額外的(de)(de)(de)(de)(de)(de)限制(zhi)(zhi)，因為(wei)(wei)用(yong)(yong)于(yu)(yu)檢測和(he)(he)(he)致(zhi)(zhi)動(dong)(dong)(dong)(dong)(dong)的(de)(de)(de)(de)(de)(de)壓電(dian)(dian)(dian)絕(jue)(jue)緣(yuan)(yuan)(yuan)材(cai)(cai)(cai)料(liao)對于(yu)(yu)致(zhi)(zhi)動(dong)(dong)(dong)(dong)(dong)器(qi)(qi)和(he)(he)(he)壓電(dian)(dian)(dian)傳感(gan)器(qi)(qi)是(shi)相(xiang)(xiang)同(tong)的(de)(de)(de)(de)(de)(de)。當選擇壓電(dian)(dian)(dian)絕(jue)(jue)緣(yuan)(yuan)(yuan)材(cai)(cai)(cai)料(liao)例如pzt時(shi)，該限制(zhi)(zhi)是(shi)特別(bie)相(xiang)(xiang)關的(de)(de)(de)(de)(de)(de)，因為(wei)(wei)這防止獲得其(qi)中(zhong)致(zhi)(zhi)動(dong)(dong)(dong)(dong)(dong)和(he)(he)(he)檢測都被優化的(de)(de)(de)(de)(de)(de)裝置。事實(shi)上，已知(zhi)pzt由(you)于(yu)(yu)諸(zhu)如壓電(dian)(dian)(dian)疲勞和(he)(he)(he)“去(qu)極化(depoling)”的(de)(de)(de)(de)(de)(de)現(xian)象(xiang)而隨時(shi)間(jian)變(bian)得不(bu)穩(wen)定，這可(ke)能顯著影響(xiang)反(fan)射鏡元(yuan)件(jian)(jian)(jian)位置的(de)(de)(de)(de)(de)(de)檢測。此(ci)外，pzt具(ju)有磁滯現(xian)象(xiang)并且(qie)還(huan)具(ju)有高介電(dian)(dian)(dian)常(chang)數(shu)(例如，包括在(zai)(zai)約(yue)1000c2/(n·m2)和(he)(he)(he)約(yue)1200c2/(n·m2)之間(jian))。因此(ci)，盡管pzt在(zai)(zai)用(yong)(yong)于(yu)(yu)致(zhi)(zhi)動(dong)(dong)(dong)(dong)(dong)目的(de)(de)(de)(de)(de)(de)(其(qi)中(zhong)pzt和(he)(he)(he)相(xiang)(xiang)應電(dian)(dian)(dian)極之間(jian)的(de)(de)(de)(de)(de)(de)接觸面積通(tong)常(chang)較大)時(shi)沒(mei)有相(xiang)(xiang)關的(de)(de)(de)(de)(de)(de)問題(ti)，但是(shi)這種材(cai)(cai)(cai)料(liao)在(zai)(zai)用(yong)(yong)于(yu)(yu)檢測目的(de)(de)(de)(de)(de)(de)(其(qi)中(zhong)pzt和(he)(he)(he)相(xiang)(xiang)應電(dian)(dian)(dian)極之間(jian)的(de)(de)(de)(de)(de)(de)接觸面積通(tong)常(chang)減小(xiao))時(shi)可(ke)能受到限制(zhi)(zhi)，因為(wei)(wei)它(ta)(ta)可(ke)能導致(zhi)(zhi)噪(zao)聲過大和(he)(he)(he)測量不(bu)準確，并且(qie)導致(zhi)(zhi)由(you)應變(bian)傳感(gan)器(qi)(qi)生(sheng)成(cheng)的(de)(de)(de)(de)(de)(de)輸出信號的(de)(de)(de)(de)(de)(de)snr和(he)(he)(he)振幅的(de)(de)(de)(de)(de)(de)過度減小(xiao)。

13、在(zai)本領域中需要提供一種(zhong)克(ke)服(fu)了現有技術(shu)的(de)缺點的(de)mems器件、該mems器件的(de)制造(zao)工藝、該mems器件的(de)操作方法以及包括該mems器件的(de)電(dian)子裝置。

技術實現思路

1、提供了一種mems器(qi)件(jian)，該mems器(qi)件(jian)的制(zhi)造工藝，該mems器(qi)件(jian)的操(cao)作(zuo)方法以(yi)及包(bao)括該mems器(qi)件(jian)的電子裝置。

2、為(wei)此，本(ben)文公開了一種mems器件，包括：具有固定(ding)結(jie)構(gou)(gou)和(he)可變(bian)(bian)形(xing)(xing)主體(ti)(ti)的(de)半導(dao)體(ti)(ti)本(ben)體(ti)(ti)，固定(ding)結(jie)構(gou)(gou)在(zai)半導(dao)體(ti)(ti)本(ben)體(ti)(ti)中限定(ding)腔體(ti)(ti)，可變(bian)(bian)形(xing)(xing)主體(ti)(ti)固定(ding)到固定(ding)結(jie)構(gou)(gou)并懸置在(zai)腔體(ti)(ti)上(shang)方；在(zai)可變(bian)(bian)形(xing)(xing)主體(ti)(ti)上(shang)方延伸(shen)的(de)壓電致動器；以及壓電傳(chuan)感(gan)器元件，其(qi)在(zai)可變(bian)(bian)形(xing)(xing)主體(ti)(ti)上(shang)橫向(xiang)于(yu)壓電致動器延伸(shen)，并且與可變(bian)(bian)形(xing)(xing)主體(ti)(ti)一起形(xing)(xing)成(cheng)應變(bian)(bian)傳(chuan)感(gan)器。

3、壓(ya)電(dian)傳感器元件(jian)包括：氮化鋁的檢(jian)測(ce)壓(ya)電(dian)區(qu)域(yu)，其在(zai)可變形主體上(shang)(shang)方延(yan)(yan)伸；以及在(zai)檢(jian)測(ce)壓(ya)電(dian)區(qu)域(yu)上(shang)(shang)方延(yan)(yan)伸的中(zhong)間檢(jian)測(ce)電(dian)極(ji)。

4、可變(bian)形(xing)(xing)(xing)主(zhu)體、檢測(ce)(ce)(ce)壓(ya)(ya)電(dian)(dian)(dian)(dian)(dian)區域和中間(jian)檢測(ce)(ce)(ce)電(dian)(dian)(dian)(dian)(dian)極形(xing)(xing)(xing)成(cheng)應變(bian)傳感器(qi)的(de)(de)有源檢測(ce)(ce)(ce)結(jie)構的(de)(de)第(di)一檢測(ce)(ce)(ce)電(dian)(dian)(dian)(dian)(dian)容器(qi)，可變(bian)形(xing)(xing)(xing)主(zhu)體被配置(zhi)為(wei)(wei)作(zuo)為(wei)(wei)第(di)一檢測(ce)(ce)(ce)電(dian)(dian)(dian)(dian)(dian)容器(qi)的(de)(de)底部檢測(ce)(ce)(ce)電(dian)(dian)(dian)(dian)(dian)極操作(zuo)。可變(bian)形(xing)(xing)(xing)主(zhu)體、壓(ya)(ya)電(dian)(dian)(dian)(dian)(dian)致(zhi)動(dong)器(qi)和壓(ya)(ya)電(dian)(dian)(dian)(dian)(dian)傳感器(qi)元件形(xing)(xing)(xing)成(cheng)懸置(zhi)在腔體上的(de)(de)可變(bian)形(xing)(xing)(xing)結(jie)構。壓(ya)(ya)電(dian)(dian)(dian)(dian)(dian)致(zhi)動(dong)器(qi)是電(dian)(dian)(dian)(dian)(dian)可控(kong)的(de)(de)，以生(sheng)成(cheng)可變(bian)形(xing)(xing)(xing)結(jie)構的(de)(de)變(bian)形(xing)(xing)(xing)。

5、應變(bian)傳感器(qi)的有源(yuan)檢測(ce)(ce)結(jie)構(gou)被配置為(wei)響應于(yu)可(ke)變(bian)形結(jie)構(gou)的變(bian)形而在第(di)一檢測(ce)(ce)電容器(qi)的底部(bu)檢測(ce)(ce)電極與(yu)中(zhong)間檢測(ce)(ce)電極之間生成第(di)一檢測(ce)(ce)電壓(ya)，第(di)一檢測(ce)(ce)電壓(ya)指示(shi)可(ke)變(bian)形結(jie)構(gou)的變(bian)形。

6、壓(ya)電傳感(gan)(gan)器元件還(huan)可包括(kuo)：絕緣(yuan)材料鈍化(hua)區(qu)域(yu)，其在中(zhong)間(jian)檢(jian)(jian)(jian)測(ce)電極上方延伸(shen)；導電材料的第(di)一(yi)檢(jian)(jian)(jian)測(ce)電連(lian)接(jie)，其延伸(shen)穿(chuan)過壓(ya)電傳感(gan)(gan)器元件的鈍化(hua)區(qu)域(yu)并(bing)且與(yu)(yu)中(zhong)間(jian)檢(jian)(jian)(jian)測(ce)電極電接(jie)觸；以及導電材料的第(di)二檢(jian)(jian)(jian)測(ce)電連(lian)接(jie)，其延伸(shen)穿(chuan)過壓(ya)電傳感(gan)(gan)器元件的鈍化(hua)區(qu)域(yu)，與(yu)(yu)可變(bian)形(xing)主(zhu)體電接(jie)觸并(bing)且與(yu)(yu)第(di)一(yi)檢(jian)(jian)(jian)測(ce)電連(lian)接(jie)電絕緣(yuan)。

7、鈍化(hua)區域可以是(shi)單片的并(bing)且由(you)氮化(hua)鋁形成(cheng)。

8、壓電傳感器元件還可以(yi)包(bao)括在(zai)鈍(dun)化區域上方延伸的頂部檢測電極。

9、頂部檢測(ce)(ce)電(dian)(dian)極、鈍化區域和中間檢測(ce)(ce)電(dian)(dian)極可以形成應變(bian)傳(chuan)感器的有源檢測(ce)(ce)結構的第(di)二(er)(er)檢測(ce)(ce)電(dian)(dian)容(rong)器、第(di)一檢測(ce)(ce)電(dian)(dian)容(rong)器和第(di)二(er)(er)檢測(ce)(ce)電(dian)(dian)容(rong)器彼此串聯電(dian)(dian)連接。

10、應變(bian)傳感器(qi)的有(you)源檢(jian)測結構(gou)還可(ke)以被(bei)配置(zhi)為響應于可(ke)變(bian)形(xing)結構(gou)的變(bian)形(xing)而在第二(er)檢(jian)測電容器(qi)的中間檢(jian)測電極與頂(ding)部檢(jian)測電極之間生成第二(er)檢(jian)測電壓，第二(er)檢(jian)測電壓指示可(ke)變(bian)形(xing)結構(gou)的變(bian)形(xing)。

11、可變形主體可以由摻雜半(ban)導體材(cai)料形成并且具(ju)有不超過30mω·cm的電阻率。

12、壓(ya)電(dian)(dian)(dian)致(zhi)(zhi)(zhi)動(dong)(dong)器可(ke)(ke)以(yi)包括：氮化鋁(lv)的(de)絕(jue)緣壓(ya)電(dian)(dian)(dian)區域(yu)，其在(zai)可(ke)(ke)變形(xing)主體(ti)上橫向延伸到檢測(ce)壓(ya)電(dian)(dian)(dian)區域(yu)；導(dao)電(dian)(dian)(dian)材(cai)料(liao)的(de)中(zhong)間致(zhi)(zhi)(zhi)動(dong)(dong)電(dian)(dian)(dian)極(ji)(ji)，其在(zai)絕(jue)緣壓(ya)電(dian)(dian)(dian)區域(yu)上方延伸；壓(ya)電(dian)(dian)(dian)材(cai)料(liao)的(de)致(zhi)(zhi)(zhi)動(dong)(dong)壓(ya)電(dian)(dian)(dian)區域(yu)，其在(zai)中(zhong)間致(zhi)(zhi)(zhi)動(dong)(dong)電(dian)(dian)(dian)極(ji)(ji)上方延伸；以(yi)及導(dao)電(dian)(dian)(dian)材(cai)料(liao)的(de)頂部(bu)致(zhi)(zhi)(zhi)動(dong)(dong)電(dian)(dian)(dian)極(ji)(ji)，其在(zai)致(zhi)(zhi)(zhi)動(dong)(dong)壓(ya)電(dian)(dian)(dian)區域(yu)上方延伸。中(zhong)間致(zhi)(zhi)(zhi)動(dong)(dong)電(dian)(dian)(dian)極(ji)(ji)、致(zhi)(zhi)(zhi)動(dong)(dong)壓(ya)電(dian)(dian)(dian)區域(yu)和頂部(bu)致(zhi)(zhi)(zhi)動(dong)(dong)電(dian)(dian)(dian)極(ji)(ji)可(ke)(ke)以(yi)形(xing)成壓(ya)電(dian)(dian)(dian)致(zhi)(zhi)(zhi)動(dong)(dong)器的(de)有源致(zhi)(zhi)(zhi)動(dong)(dong)結構的(de)致(zhi)(zhi)(zhi)動(dong)(dong)電(dian)(dian)(dian)容器。

13、壓電(dian)(dian)致(zhi)動(dong)(dong)(dong)器還可包括：絕緣材料的(de)相應鈍化(hua)區域，其(qi)在頂(ding)部(bu)(bu)致(zhi)動(dong)(dong)(dong)電(dian)(dian)極上(shang)方延伸(shen)；導電(dian)(dian)材料的(de)第(di)(di)一致(zhi)動(dong)(dong)(dong)電(dian)(dian)連(lian)(lian)接，其(qi)延伸(shen)穿(chuan)過壓電(dian)(dian)致(zhi)動(dong)(dong)(dong)器的(de)鈍化(hua)區域并與(yu)(yu)頂(ding)部(bu)(bu)致(zhi)動(dong)(dong)(dong)電(dian)(dian)極電(dian)(dian)接觸；以及導電(dian)(dian)材料的(de)第(di)(di)二(er)致(zhi)動(dong)(dong)(dong)電(dian)(dian)連(lian)(lian)接，其(qi)延伸(shen)穿(chuan)過壓電(dian)(dian)致(zhi)動(dong)(dong)(dong)器的(de)鈍化(hua)區域并與(yu)(yu)第(di)(di)一致(zhi)動(dong)(dong)(dong)電(dian)(dian)連(lian)(lian)接電(dian)(dian)絕緣。第(di)(di)二(er)致(zhi)動(dong)(dong)(dong)電(dian)(dian)連(lian)(lian)接可以與(yu)(yu)可變形(xing)主體和中間致(zhi)動(dong)(dong)(dong)電(dian)(dian)極電(dian)(dian)接觸。

14、壓(ya)(ya)電(dian)(dian)(dian)(dian)(dian)(dian)致(zhi)(zhi)動(dong)(dong)(dong)(dong)器還(huan)可包(bao)括：絕緣材(cai)(cai)料(liao)的(de)相(xiang)應鈍化區(qu)(qu)域(yu)，其在頂部致(zhi)(zhi)動(dong)(dong)(dong)(dong)電(dian)(dian)(dian)(dian)(dian)(dian)極上(shang)方延伸；導電(dian)(dian)(dian)(dian)(dian)(dian)材(cai)(cai)料(liao)的(de)第(di)(di)(di)一(yi)致(zhi)(zhi)動(dong)(dong)(dong)(dong)電(dian)(dian)(dian)(dian)(dian)(dian)連(lian)接(jie)(jie)，其延伸穿(chuan)過(guo)壓(ya)(ya)電(dian)(dian)(dian)(dian)(dian)(dian)致(zhi)(zhi)動(dong)(dong)(dong)(dong)器的(de)鈍化區(qu)(qu)域(yu)并(bing)(bing)(bing)與頂部致(zhi)(zhi)動(dong)(dong)(dong)(dong)電(dian)(dian)(dian)(dian)(dian)(dian)極電(dian)(dian)(dian)(dian)(dian)(dian)接(jie)(jie)觸(chu)；以(yi)及導電(dian)(dian)(dian)(dian)(dian)(dian)材(cai)(cai)料(liao)的(de)第(di)(di)(di)二(er)(er)致(zhi)(zhi)動(dong)(dong)(dong)(dong)電(dian)(dian)(dian)(dian)(dian)(dian)連(lian)接(jie)(jie)，其延伸穿(chuan)過(guo)壓(ya)(ya)電(dian)(dian)(dian)(dian)(dian)(dian)致(zhi)(zhi)動(dong)(dong)(dong)(dong)器的(de)鈍化區(qu)(qu)域(yu)并(bing)(bing)(bing)與第(di)(di)(di)一(yi)致(zhi)(zhi)動(dong)(dong)(dong)(dong)電(dian)(dian)(dian)(dian)(dian)(dian)連(lian)接(jie)(jie)電(dian)(dian)(dian)(dian)(dian)(dian)絕緣。第(di)(di)(di)二(er)(er)致(zhi)(zhi)動(dong)(dong)(dong)(dong)電(dian)(dian)(dian)(dian)(dian)(dian)連(lian)接(jie)(jie)可以(yi)與中(zhong)間致(zhi)(zhi)動(dong)(dong)(dong)(dong)電(dian)(dian)(dian)(dian)(dian)(dian)極電(dian)(dian)(dian)(dian)(dian)(dian)接(jie)(jie)觸(chu)，并(bing)(bing)(bing)且壓(ya)(ya)電(dian)(dian)(dian)(dian)(dian)(dian)致(zhi)(zhi)動(dong)(dong)(dong)(dong)器還(huan)可以(yi)包(bao)括導電(dian)(dian)(dian)(dian)(dian)(dian)材(cai)(cai)料(liao)的(de)第(di)(di)(di)三致(zhi)(zhi)動(dong)(dong)(dong)(dong)電(dian)(dian)(dian)(dian)(dian)(dian)連(lian)接(jie)(jie)，其延伸穿(chuan)過(guo)壓(ya)(ya)電(dian)(dian)(dian)(dian)(dian)(dian)致(zhi)(zhi)動(dong)(dong)(dong)(dong)器的(de)鈍化區(qu)(qu)域(yu)，與第(di)(di)(di)一(yi)致(zhi)(zhi)動(dong)(dong)(dong)(dong)電(dian)(dian)(dian)(dian)(dian)(dian)連(lian)接(jie)(jie)以(yi)及第(di)(di)(di)二(er)(er)致(zhi)(zhi)動(dong)(dong)(dong)(dong)電(dian)(dian)(dian)(dian)(dian)(dian)連(lian)接(jie)(jie)電(dian)(dian)(dian)(dian)(dian)(dian)絕緣，并(bing)(bing)(bing)且與可變形主體電(dian)(dian)(dian)(dian)(dian)(dian)接(jie)(jie)觸(chu)。

15、該mems器件可以(yi)是反射鏡型的(de)并且進(jin)一步(bu)包(bao)括：可傾斜(xie)結(jie)構(gou)，可傾斜(xie)結(jie)構(gou)彈性地(di)(di)懸置在腔體上方；第一支(zhi)(zhi)撐(cheng)臂(bei)(bei)(bei)和第二支(zhi)(zhi)撐(cheng)臂(bei)(bei)(bei)，第一支(zhi)(zhi)撐(cheng)臂(bei)(bei)(bei)和第二支(zhi)(zhi)撐(cheng)臂(bei)(bei)(bei)沿著可傾斜(xie)結(jie)構(gou)的(de)旋(xuan)轉軸(zhou)(zhou)線在固定(ding)結(jie)構(gou)與(yu)可傾斜(xie)結(jie)構(gou)的(de)相對(dui)側(ce)(ce)之間(jian)延伸(shen)；以(yi)及多(duo)個可變(bian)形(xing)(xing)結(jie)構(gou)，面向第一支(zhi)(zhi)撐(cheng)臂(bei)(bei)(bei)的(de)相對(dui)側(ce)(ce)，在固定(ding)結(jie)構(gou)與(yu)第一支(zhi)(zhi)撐(cheng)臂(bei)(bei)(bei)的(de)相對(dui)側(ce)(ce)之間(jian)延伸(shen)，并且可電控制(zhi)以(yi)機械地(di)(di)變(bian)形(xing)(xing)，從而生成可傾斜(xie)結(jie)構(gou)圍繞旋(xuan)轉軸(zhou)(zhou)線的(de)旋(xuan)轉。

16、可變(bian)(bian)形結構(gou)(gou)的(de)應變(bian)(bian)傳感(gan)(gan)器可以相(xiang)對(dui)于旋(xuan)轉軸(zhou)線彼此相(xiang)對(dui)。當可傾(qing)斜結構(gou)(gou)由于可變(bian)(bian)形結構(gou)(gou)而圍(wei)繞旋(xuan)轉軸(zhou)線旋(xuan)轉時，可變(bian)(bian)形結構(gou)(gou)的(de)應變(bian)(bian)傳感(gan)(gan)器可經歷相(xiang)應的(de)機(ji)械變(bian)(bian)形并(bing)且(qie)生(sheng)成相(xiang)應的(de)檢測(ce)信號(hao)，該(gai)檢測(ce)信號(hao)指示可傾(qing)斜結構(gou)(gou)圍(wei)繞旋(xuan)轉軸(zhou)線的(de)旋(xuan)轉并(bing)彼此相(xiang)位相(xiang)反。

17、該mems器件(jian)可(ke)(ke)(ke)(ke)以(yi)(yi)是反射鏡型(xing)的(de)并(bing)(bing)且進一(yi)(yi)(yi)步包括：可(ke)(ke)(ke)(ke)傾(qing)斜(xie)結(jie)(jie)構(gou)(gou)，可(ke)(ke)(ke)(ke)傾(qing)斜(xie)結(jie)(jie)構(gou)(gou)彈(dan)性(xing)地(di)懸置在腔體上；第(di)(di)一(yi)(yi)(yi)支(zhi)撐臂和(he)第(di)(di)二(er)支(zhi)撐臂，第(di)(di)一(yi)(yi)(yi)支(zhi)撐臂和(he)第(di)(di)二(er)支(zhi)撐臂沿著可(ke)(ke)(ke)(ke)傾(qing)斜(xie)結(jie)(jie)構(gou)(gou)的(de)旋(xuan)轉軸線(xian)在固定(ding)結(jie)(jie)構(gou)(gou)與可(ke)(ke)(ke)(ke)傾(qing)斜(xie)結(jie)(jie)構(gou)(gou)的(de)相對側(ce)之(zhi)間(jian)延伸；以(yi)(yi)及多(duo)個可(ke)(ke)(ke)(ke)變形結(jie)(jie)構(gou)(gou)，其(qi)面向第(di)(di)一(yi)(yi)(yi)支(zhi)撐臂的(de)相對側(ce)，在固定(ding)結(jie)(jie)構(gou)(gou)與可(ke)(ke)(ke)(ke)傾(qing)斜(xie)結(jie)(jie)構(gou)(gou)之(zhi)間(jian)延伸，并(bing)(bing)且是電可(ke)(ke)(ke)(ke)控(kong)的(de)以(yi)(yi)機械地(di)變形，從(cong)而生成可(ke)(ke)(ke)(ke)傾(qing)斜(xie)結(jie)(jie)構(gou)(gou)圍(wei)繞(rao)旋(xuan)轉軸線(xian)的(de)旋(xuan)轉。

18、可(ke)變形(xing)(xing)(xing)結(jie)(jie)構(gou)的(de)(de)(de)應變傳(chuan)感器可(ke)以相(xiang)(xiang)(xiang)對(dui)于旋轉軸(zhou)(zhou)線彼此相(xiang)(xiang)(xiang)對(dui)。當(dang)可(ke)傾(qing)斜結(jie)(jie)構(gou)由于可(ke)變形(xing)(xing)(xing)結(jie)(jie)構(gou)而(er)圍(wei)繞旋轉軸(zhou)(zhou)線旋轉時，可(ke)變形(xing)(xing)(xing)結(jie)(jie)構(gou)的(de)(de)(de)應變傳(chuan)感器可(ke)經歷相(xiang)(xiang)(xiang)應的(de)(de)(de)機(ji)械變形(xing)(xing)(xing)并生成相(xiang)(xiang)(xiang)應的(de)(de)(de)檢測(ce)信號(hao)，該(gai)檢測(ce)信號(hao)指(zhi)示可(ke)傾(qing)斜結(jie)(jie)構(gou)圍(wei)繞旋轉軸(zhou)(zhou)線的(de)(de)(de)旋轉并且彼此相(xiang)(xiang)(xiang)位相(xiang)(xiang)(xiang)反。

19、本(ben)文還公開了一(yi)(yi)種制造mems器(qi)件(jian)的(de)(de)(de)(de)(de)(de)方(fang)法，包括以下(xia)步驟：a.在工(gong)(gong)(gong)作(zuo)(zuo)(zuo)晶(jing)(jing)(jing)(jing)片(pian)(pian)(pian)的(de)(de)(de)(de)(de)(de)第(di)(di)(di)(di)(di)(di)一(yi)(yi)表面(mian)(mian)(mian)上形(xing)(xing)(xing)成(cheng)(cheng)氮化(hua)鋁的(de)(de)(de)(de)(de)(de)第(di)(di)(di)(di)(di)(di)一(yi)(yi)壓(ya)(ya)電(dian)(dian)(dian)(dian)(dian)層(ceng)，工(gong)(gong)(gong)作(zuo)(zuo)(zuo)晶(jing)(jing)(jing)(jing)片(pian)(pian)(pian)包括半(ban)(ban)(ban)(ban)導(dao)(dao)(dao)(dao)體(ti)(ti)(ti)材(cai)料(liao)的(de)(de)(de)(de)(de)(de)底部(bu)(bu)(bu)(bu)(bu)(bu)半(ban)(ban)(ban)(ban)導(dao)(dao)(dao)(dao)體(ti)(ti)(ti)區(qu)(qu)域和半(ban)(ban)(ban)(ban)導(dao)(dao)(dao)(dao)體(ti)(ti)(ti)材(cai)料(liao)的(de)(de)(de)(de)(de)(de)頂部(bu)(bu)(bu)(bu)(bu)(bu)半(ban)(ban)(ban)(ban)導(dao)(dao)(dao)(dao)體(ti)(ti)(ti)區(qu)(qu)域，第(di)(di)(di)(di)(di)(di)一(yi)(yi)壓(ya)(ya)電(dian)(dian)(dian)(dian)(dian)層(ceng)沿(yan)第(di)(di)(di)(di)(di)(di)一(yi)(yi)軸(zhou)線(xian)(xian)(xian)疊加(jia)在工(gong)(gong)(gong)作(zuo)(zuo)(zuo)晶(jing)(jing)(jing)(jing)片(pian)(pian)(pian)的(de)(de)(de)(de)(de)(de)底部(bu)(bu)(bu)(bu)(bu)(bu)半(ban)(ban)(ban)(ban)導(dao)(dao)(dao)(dao)體(ti)(ti)(ti)區(qu)(qu)域上并(bing)(bing)(bing)限(xian)定工(gong)(gong)(gong)作(zuo)(zuo)(zuo)晶(jing)(jing)(jing)(jing)片(pian)(pian)(pian)的(de)(de)(de)(de)(de)(de)第(di)(di)(di)(di)(di)(di)一(yi)(yi)表面(mian)(mian)(mian)，工(gong)(gong)(gong)作(zuo)(zuo)(zuo)晶(jing)(jing)(jing)(jing)片(pian)(pian)(pian)還具(ju)有沿(yan)第(di)(di)(di)(di)(di)(di)一(yi)(yi)軸(zhou)線(xian)(xian)(xian)與第(di)(di)(di)(di)(di)(di)一(yi)(yi)表面(mian)(mian)(mian)相對的(de)(de)(de)(de)(de)(de)第(di)(di)(di)(di)(di)(di)二表面(mian)(mian)(mian)；b.在第(di)(di)(di)(di)(di)(di)一(yi)(yi)壓(ya)(ya)電(dian)(dian)(dian)(dian)(dian)層(ceng)上形(xing)(xing)(xing)成(cheng)(cheng)導(dao)(dao)(dao)(dao)電(dian)(dian)(dian)(dian)(dian)材(cai)料(liao)的(de)(de)(de)(de)(de)(de)第(di)(di)(di)(di)(di)(di)一(yi)(yi)導(dao)(dao)(dao)(dao)電(dian)(dian)(dian)(dian)(dian)層(ceng)；f.通(tong)過化(hua)學(xue)(xue)(xue)蝕刻(ke)(ke)對第(di)(di)(di)(di)(di)(di)一(yi)(yi)導(dao)(dao)(dao)(dao)電(dian)(dian)(dian)(dian)(dian)層(ceng)進(jin)行圖案化(hua)以形(xing)(xing)(xing)成(cheng)(cheng)應變傳感(gan)器(qi)的(de)(de)(de)(de)(de)(de)中間(jian)檢測(ce)電(dian)(dian)(dian)(dian)(dian)極(ji)；i.通(tong)過化(hua)學(xue)(xue)(xue)蝕刻(ke)(ke)形(xing)(xing)(xing)成(cheng)(cheng)第(di)(di)(di)(di)(di)(di)一(yi)(yi)工(gong)(gong)(gong)作(zuo)(zuo)(zuo)溝(gou)(gou)槽，第(di)(di)(di)(di)(di)(di)一(yi)(yi)工(gong)(gong)(gong)作(zuo)(zuo)(zuo)溝(gou)(gou)槽穿過第(di)(di)(di)(di)(di)(di)一(yi)(yi)壓(ya)(ya)電(dian)(dian)(dian)(dian)(dian)層(ceng)并(bing)(bing)(bing)且直到工(gong)(gong)(gong)作(zuo)(zuo)(zuo)晶(jing)(jing)(jing)(jing)片(pian)(pian)(pian)的(de)(de)(de)(de)(de)(de)頂部(bu)(bu)(bu)(bu)(bu)(bu)半(ban)(ban)(ban)(ban)導(dao)(dao)(dao)(dao)體(ti)(ti)(ti)區(qu)(qu)域并(bing)(bing)(bing)且暴(bao)露工(gong)(gong)(gong)作(zuo)(zuo)(zuo)晶(jing)(jing)(jing)(jing)片(pian)(pian)(pian)的(de)(de)(de)(de)(de)(de)頂部(bu)(bu)(bu)(bu)(bu)(bu)半(ban)(ban)(ban)(ban)導(dao)(dao)(dao)(dao)體(ti)(ti)(ti)區(qu)(qu)域，其中第(di)(di)(di)(di)(di)(di)一(yi)(yi)工(gong)(gong)(gong)作(zuo)(zuo)(zuo)溝(gou)(gou)槽與第(di)(di)(di)(di)(di)(di)一(yi)(yi)軸(zhou)線(xian)(xian)(xian)正(zheng)交(jiao)地(di)圍(wei)繞(rao)第(di)(di)(di)(di)(di)(di)一(yi)(yi)壓(ya)(ya)電(dian)(dian)(dian)(dian)(dian)層(ceng)的(de)(de)(de)(de)(de)(de)一(yi)(yi)部(bu)(bu)(bu)(bu)(bu)(bu)分，第(di)(di)(di)(di)(di)(di)一(yi)(yi)壓(ya)(ya)電(dian)(dian)(dian)(dian)(dian)層(ceng)的(de)(de)(de)(de)(de)(de)一(yi)(yi)部(bu)(bu)(bu)(bu)(bu)(bu)分沿(yan)第(di)(di)(di)(di)(di)(di)一(yi)(yi)軸(zhou)線(xian)(xian)(xian)位于中間(jian)檢測(ce)電(dian)(dian)(dian)(dian)(dian)極(ji)下(xia)方(fang)并(bing)(bing)(bing)且形(xing)(xing)(xing)成(cheng)(cheng)檢測(ce)壓(ya)(ya)電(dian)(dian)(dian)(dian)(dian)區(qu)(qu)域；p.通(tong)過化(hua)學(xue)(xue)(xue)蝕刻(ke)(ke)形(xing)(xing)(xing)成(cheng)(cheng)穿過工(gong)(gong)(gong)作(zuo)(zuo)(zuo)晶(jing)(jing)(jing)(jing)片(pian)(pian)(pian)的(de)(de)(de)(de)(de)(de)頂部(bu)(bu)(bu)(bu)(bu)(bu)半(ban)(ban)(ban)(ban)導(dao)(dao)(dao)(dao)體(ti)(ti)(ti)區(qu)(qu)域的(de)(de)(de)(de)(de)(de)平面(mian)(mian)(mian)輪(lun)廓溝(gou)(gou)槽，平面(mian)(mian)(mian)輪(lun)廓溝(gou)(gou)槽正(zheng)交(jiao)于第(di)(di)(di)(di)(di)(di)一(yi)(yi)軸(zhou)線(xian)(xian)(xian)部(bu)(bu)(bu)(bu)(bu)(bu)分地(di)圍(wei)繞(rao)工(gong)(gong)(gong)作(zuo)(zuo)(zuo)晶(jing)(jing)(jing)(jing)片(pian)(pian)(pian)的(de)(de)(de)(de)(de)(de)頂部(bu)(bu)(bu)(bu)(bu)(bu)半(ban)(ban)(ban)(ban)導(dao)(dao)(dao)(dao)體(ti)(ti)(ti)區(qu)(qu)域的(de)(de)(de)(de)(de)(de)一(yi)(yi)部(bu)(bu)(bu)(bu)(bu)(bu)分，在檢測(ce)壓(ya)(ya)電(dian)(dian)(dian)(dian)(dian)區(qu)(qu)域下(xia)方(fang)并(bing)(bing)(bing)且適于形(xing)(xing)(xing)成(cheng)(cheng)可變形(xing)(xing)(xing)主(zhu)體(ti)(ti)(ti)，并(bing)(bing)(bing)且正(zheng)交(jiao)于第(di)(di)(di)(di)(di)(di)一(yi)(yi)軸(zhou)線(xian)(xian)(xian)地(di)將(jiang)頂部(bu)(bu)(bu)(bu)(bu)(bu)半(ban)(ban)(ban)(ban)導(dao)(dao)(dao)(dao)體(ti)(ti)(ti)區(qu)(qu)域的(de)(de)(de)(de)(de)(de)部(bu)(bu)(bu)(bu)(bu)(bu)分的(de)(de)(de)(de)(de)(de)一(yi)(yi)部(bu)(bu)(bu)(bu)(bu)(bu)分與工(gong)(gong)(gong)作(zuo)(zuo)(zuo)晶(jing)(jing)(jing)(jing)片(pian)(pian)(pian)的(de)(de)(de)(de)(de)(de)頂部(bu)(bu)(bu)(bu)(bu)(bu)半(ban)(ban)(ban)(ban)導(dao)(dao)(dao)(dao)體(ti)(ti)(ti)區(qu)(qu)域的(de)(de)(de)(de)(de)(de)剩余部(bu)(bu)(bu)(bu)(bu)(bu)分物理地(di)分隔(ge)，從(cong)而正(zheng)交(jiao)于第(di)(di)(di)(di)(di)(di)一(yi)(yi)軸(zhou)線(xian)(xian)(xian)地(di)限(xian)定可變形(xing)(xing)(xing)主(zhu)體(ti)(ti)(ti)的(de)(de)(de)(de)(de)(de)平面(mian)(mian)(mian)輪(lun)廓；以及通(tong)過從(cong)工(gong)(gong)(gong)作(zuo)(zuo)(zuo)晶(jing)(jing)(jing)(jing)片(pian)(pian)(pian)的(de)(de)(de)(de)(de)(de)第(di)(di)(di)(di)(di)(di)二表面(mian)(mian)(mian)開始(shi)執行的(de)(de)(de)(de)(de)(de)化(hua)學(xue)(xue)(xue)蝕刻(ke)(ke)，去除(chu)工(gong)(gong)(gong)作(zuo)(zuo)(zuo)晶(jing)(jing)(jing)(jing)片(pian)(pian)(pian)的(de)(de)(de)(de)(de)(de)位于可變形(xing)(xing)(xing)主(zhu)體(ti)(ti)(ti)下(xia)方(fang)的(de)(de)(de)(de)(de)(de)底部(bu)(bu)(bu)(bu)(bu)(bu)半(ban)(ban)(ban)(ban)導(dao)(dao)(dao)(dao)體(ti)(ti)(ti)區(qu)(qu)域的(de)(de)(de)(de)(de)(de)一(yi)(yi)部(bu)(bu)(bu)(bu)(bu)(bu)分，直到暴(bao)露工(gong)(gong)(gong)作(zuo)(zuo)(zuo)晶(jing)(jing)(jing)(jing)片(pian)(pian)(pian)的(de)(de)(de)(de)(de)(de)頂部(bu)(bu)(bu)(bu)(bu)(bu)半(ban)(ban)(ban)(ban)導(dao)(dao)(dao)(dao)體(ti)(ti)(ti)區(qu)(qu)域為(wei)止，從(cong)而形(xing)(xing)(xing)成(cheng)(cheng)腔體(ti)(ti)(ti)。

20、該(gai)方法在步(bu)驟(zou)b與(yu)f之間可以進一(yi)(yi)步(bu)包(bao)括(kuo)以下步(bu)驟(zou)：c.在第(di)(di)(di)一(yi)(yi)導電(dian)(dian)(dian)(dian)層(ceng)上(shang)形(xing)成(cheng)壓(ya)電(dian)(dian)(dian)(dian)材(cai)料的(de)(de)第(di)(di)(di)二(er)壓(ya)電(dian)(dian)(dian)(dian)層(ceng)；d.在第(di)(di)(di)二(er)壓(ya)電(dian)(dian)(dian)(dian)層(ceng)上(shang)形(xing)成(cheng)導電(dian)(dian)(dian)(dian)材(cai)料的(de)(de)第(di)(di)(di)二(er)導電(dian)(dian)(dian)(dian)層(ceng)；和e.通(tong)過化學蝕刻對第(di)(di)(di)二(er)導電(dian)(dian)(dian)(dian)層(ceng)和第(di)(di)(di)二(er)壓(ya)電(dian)(dian)(dian)(dian)層(ceng)進行圖案化，從而沿著第(di)(di)(di)一(yi)(yi)軸線分別形(xing)成(cheng)頂部致(zhi)動(dong)電(dian)(dian)(dian)(dian)極和位(wei)于(yu)頂部致(zhi)動(dong)電(dian)(dian)(dian)(dian)極下方的(de)(de)致(zhi)動(dong)壓(ya)電(dian)(dian)(dian)(dian)區。步(bu)驟(zou)f還包(bao)括(kuo)橫向(xiang)于(yu)應變(bian)傳感(gan)器的(de)(de)中(zhong)間檢測電(dian)(dian)(dian)(dian)極并且(qie)與(yu)之隔開地形(xing)成(cheng)壓(ya)電(dian)(dian)(dian)(dian)致(zhi)動(dong)器的(de)(de)中(zhong)間致(zhi)動(dong)電(dian)(dian)(dian)(dian)極。

21、在(zai)步驟(zou)f與i之間，該方(fang)法可以包括(kuo)在(zai)壓電(dian)傳(chuan)感器(qi)元件的中間檢(jian)測電(dian)極上(shang)、在(zai)第一檢(jian)測電(dian)連(lian)接(jie)上(shang)以及在(zai)穿過鈍化區域(yu)的第二檢(jian)測電(dian)連(lian)接(jie)上(shang)形成鈍化區域(yu)的步驟(zou)。

22、在(zai)所(suo)述(shu)(shu)中(zhong)間(jian)檢測(ce)電(dian)極和(he)所(suo)述(shu)(shu)第(di)一檢測(ce)電(dian)連(lian)接(jie)以及穿(chuan)過(guo)所(suo)述(shu)(shu)鈍化區(qu)(qu)域(yu)的所(suo)述(shu)(shu)第(di)二檢測(ce)電(dian)連(lian)接(jie)上(shang)(shang)(shang)形(xing)成(cheng)所(suo)述(shu)(shu)鈍化區(qu)(qu)域(yu)的步(bu)驟(zou)在(zai)步(bu)驟(zou)f與i之(zhi)間(jian)包括以下步(bu)驟(zou)：g.在(zai)應變傳感器(qi)的中(zhong)間(jian)檢測(ce)電(dian)極上(shang)(shang)(shang)和(he)第(di)一壓(ya)電(dian)層上(shang)(shang)(shang)形(xing)成(cheng)絕(jue)緣材料的第(di)一絕(jue)緣層；和(he)h.形(xing)成(cheng)穿(chuan)過(guo)第(di)一絕(jue)緣層的第(di)一電(dian)連(lian)接(jie)溝槽(cao)，從而部分暴露(lu)中(zhong)間(jian)檢測(ce)電(dian)極。

23、步驟(zou)i可以(yi)包(bao)括形(xing)成也穿(chuan)過第一(yi)絕緣(yuan)(yuan)層(ceng)(ceng)的(de)(de)第一(yi)工(gong)作(zuo)(zuo)溝槽(cao)(cao)，第一(yi)工(gong)作(zuo)(zuo)溝槽(cao)(cao)還與第一(yi)軸線(xian)(xian)正交地(di)圍繞第一(yi)絕緣(yuan)(yuan)層(ceng)(ceng)的(de)(de)一(yi)部(bu)(bu)分，該部(bu)(bu)分沿著(zhu)第一(yi)軸線(xian)(xian)疊加在(zai)中(zhong)間(jian)檢測電極上，其形(xing)成壓(ya)電傳感器元件(jian)的(de)(de)鈍化(hua)區(qu)域的(de)(de)第一(yi)絕緣(yuan)(yuan)鈍化(hua)層(ceng)(ceng)。步驟(zou)i還可以(yi)包(bao)括形(xing)成穿(chuan)過第一(yi)絕緣(yuan)(yuan)層(ceng)(ceng)和第一(yi)壓(ya)電層(ceng)(ceng)的(de)(de)第二電連(lian)接溝槽(cao)(cao)，從(cong)而(er)部(bu)(bu)分地(di)暴露工(gong)作(zuo)(zuo)晶片的(de)(de)頂部(bu)(bu)半(ban)導(dao)體(ti)區(qu)域。

24、在(zai)所述中(zhong)間(jian)檢(jian)(jian)(jian)(jian)測(ce)(ce)(ce)電(dian)(dian)(dian)(dian)(dian)(dian)(dian)極和(he)所述第(di)(di)(di)(di)(di)一(yi)(yi)檢(jian)(jian)(jian)(jian)測(ce)(ce)(ce)電(dian)(dian)(dian)(dian)(dian)(dian)(dian)連(lian)(lian)(lian)接(jie)(jie)(jie)(jie)(jie)以(yi)及(ji)穿過(guo)所述鈍(dun)(dun)化(hua)區(qu)(qu)(qu)(qu)(qu)域(yu)(yu)(yu)(yu)的(de)(de)(de)(de)(de)所述第(di)(di)(di)(di)(di)二檢(jian)(jian)(jian)(jian)測(ce)(ce)(ce)電(dian)(dian)(dian)(dian)(dian)(dian)(dian)連(lian)(lian)(lian)接(jie)(jie)(jie)(jie)(jie)上(shang)形(xing)(xing)(xing)成所述鈍(dun)(dun)化(hua)區(qu)(qu)(qu)(qu)(qu)域(yu)(yu)(yu)(yu)的(de)(de)(de)(de)(de)步(bu)驟(zou)在(zai)步(bu)驟(zou)i與(yu)p之間(jian)還可包括以(yi)下步(bu)驟(zou)：j.在(zai)壓電(dian)(dian)(dian)(dian)(dian)(dian)(dian)傳(chuan)感(gan)器(qi)元件的(de)(de)(de)(de)(de)鈍(dun)(dun)化(hua)區(qu)(qu)(qu)(qu)(qu)域(yu)(yu)(yu)(yu)的(de)(de)(de)(de)(de)第(di)(di)(di)(di)(di)一(yi)(yi)絕緣(yuan)鈍(dun)(dun)化(hua)層(ceng)上(shang)，在(zai)中(zhong)間(jian)檢(jian)(jian)(jian)(jian)測(ce)(ce)(ce)電(dian)(dian)(dian)(dian)(dian)(dian)(dian)極上(shang)和(he)在(zai)工作晶片的(de)(de)(de)(de)(de)頂部(bu)半導(dao)體區(qu)(qu)(qu)(qu)(qu)域(yu)(yu)(yu)(yu)上(shang)形(xing)(xing)(xing)成導(dao)電(dian)(dian)(dian)(dian)(dian)(dian)(dian)材(cai)料(liao)的(de)(de)(de)(de)(de)第(di)(di)(di)(di)(di)三導(dao)電(dian)(dian)(dian)(dian)(dian)(dian)(dian)層(ceng)；k.通過(guo)化(hua)學蝕刻(ke)圖案化(hua)第(di)(di)(di)(di)(di)三導(dao)電(dian)(dian)(dian)(dian)(dian)(dian)(dian)層(ceng)，從而(er)從第(di)(di)(di)(di)(di)三導(dao)電(dian)(dian)(dian)(dian)(dian)(dian)(dian)層(ceng)開始在(zai)第(di)(di)(di)(di)(di)一(yi)(yi)電(dian)(dian)(dian)(dian)(dian)(dian)(dian)連(lian)(lian)(lian)接(jie)(jie)(jie)(jie)(jie)溝槽(cao)中(zhong)形(xing)(xing)(xing)成第(di)(di)(di)(di)(di)一(yi)(yi)檢(jian)(jian)(jian)(jian)測(ce)(ce)(ce)電(dian)(dian)(dian)(dian)(dian)(dian)(dian)連(lian)(lian)(lian)接(jie)(jie)(jie)(jie)(jie)的(de)(de)(de)(de)(de)連(lian)(lian)(lian)接(jie)(jie)(jie)(jie)(jie)區(qu)(qu)(qu)(qu)(qu)域(yu)(yu)(yu)(yu)，并(bing)(bing)且(qie)在(zai)第(di)(di)(di)(di)(di)二電(dian)(dian)(dian)(dian)(dian)(dian)(dian)連(lian)(lian)(lian)接(jie)(jie)(jie)(jie)(jie)溝槽(cao)中(zhong)形(xing)(xing)(xing)成第(di)(di)(di)(di)(di)二檢(jian)(jian)(jian)(jian)測(ce)(ce)(ce)電(dian)(dian)(dian)(dian)(dian)(dian)(dian)連(lian)(lian)(lian)接(jie)(jie)(jie)(jie)(jie)的(de)(de)(de)(de)(de)連(lian)(lian)(lian)接(jie)(jie)(jie)(jie)(jie)區(qu)(qu)(qu)(qu)(qu)域(yu)(yu)(yu)(yu)l.在(zai)第(di)(di)(di)(di)(di)一(yi)(yi)絕緣(yuan)鈍(dun)(dun)化(hua)層(ceng)，第(di)(di)(di)(di)(di)一(yi)(yi)檢(jian)(jian)(jian)(jian)測(ce)(ce)(ce)電(dian)(dian)(dian)(dian)(dian)(dian)(dian)連(lian)(lian)(lian)接(jie)(jie)(jie)(jie)(jie)和(he)第(di)(di)(di)(di)(di)二檢(jian)(jian)(jian)(jian)測(ce)(ce)(ce)電(dian)(dian)(dian)(dian)(dian)(dian)(dian)連(lian)(lian)(lian)接(jie)(jie)(jie)(jie)(jie)上(shang)形(xing)(xing)(xing)成絕緣(yuan)材(cai)料(liao)的(de)(de)(de)(de)(de)第(di)(di)(di)(di)(di)二絕緣(yuan)層(ceng)，第(di)(di)(di)(di)(di)二絕緣(yuan)層(ceng)限定壓電(dian)(dian)(dian)(dian)(dian)(dian)(dian)傳(chuan)感(gan)器(qi)元件的(de)(de)(de)(de)(de)鈍(dun)(dun)化(hua)區(qu)(qu)(qu)(qu)(qu)域(yu)(yu)(yu)(yu)的(de)(de)(de)(de)(de)第(di)(di)(di)(di)(di)二絕緣(yuan)鈍(dun)(dun)化(hua)層(ceng)，并(bing)(bing)且(qie)與(yu)第(di)(di)(di)(di)(di)一(yi)(yi)絕緣(yuan)鈍(dun)(dun)化(hua)層(ceng)一(yi)(yi)起形(xing)(xing)(xing)成壓電(dian)(dian)(dian)(dian)(dian)(dian)(dian)傳(chuan)感(gan)器(qi)元件的(de)(de)(de)(de)(de)鈍(dun)(dun)化(hua)區(qu)(qu)(qu)(qu)(qu)域(yu)(yu)(yu)(yu)；m.形(xing)(xing)(xing)成穿過(guo)第(di)(di)(di)(di)(di)二絕緣(yuan)層(ceng)的(de)(de)(de)(de)(de)第(di)(di)(di)(di)(di)三電(dian)(dian)(dian)(dian)(dian)(dian)(dian)連(lian)(lian)(lian)接(jie)(jie)(jie)(jie)(jie)溝槽(cao)，從而(er)部(bu)分地暴露第(di)(di)(di)(di)(di)一(yi)(yi)檢(jian)(jian)(jian)(jian)測(ce)(ce)(ce)電(dian)(dian)(dian)(dian)(dian)(dian)(dian)連(lian)(lian)(lian)接(jie)(jie)(jie)(jie)(jie)和(he)第(di)(di)(di)(di)(di)二檢(jian)(jian)(jian)(jian)測(ce)(ce)(ce)電(dian)(dian)(dian)(dian)(dian)(dian)(dian)連(lian)(lian)(lian)接(jie)(jie)(jie)(jie)(jie)的(de)(de)(de)(de)(de)連(lian)(lian)(lian)接(jie)(jie)(jie)(jie)(jie)區(qu)(qu)(qu)(qu)(qu)域(yu)(yu)(yu)(yu)；和(he)n.在(zai)第(di)(di)(di)(di)(di)三電(dian)(dian)(dian)(dian)(dian)(dian)(dian)連(lian)(lian)(lian)接(jie)(jie)(jie)(jie)(jie)溝槽(cao)中(zhong)形(xing)(xing)(xing)成導(dao)電(dian)(dian)(dian)(dian)(dian)(dian)(dian)材(cai)料(liao)的(de)(de)(de)(de)(de)第(di)(di)(di)(di)(di)一(yi)(yi)檢(jian)(jian)(jian)(jian)測(ce)(ce)(ce)電(dian)(dian)(dian)(dian)(dian)(dian)(dian)連(lian)(lian)(lian)接(jie)(jie)(jie)(jie)(jie)和(he)第(di)(di)(di)(di)(di)二檢(jian)(jian)(jian)(jian)測(ce)(ce)(ce)電(dian)(dian)(dian)(dian)(dian)(dian)(dian)連(lian)(lian)(lian)接(jie)(jie)(jie)(jie)(jie)的(de)(de)(de)(de)(de)相應(ying)的(de)(de)(de)(de)(de)接(jie)(jie)(jie)(jie)(jie)觸(chu)焊(han)盤，并(bing)(bing)且(qie)與(yu)相應(ying)的(de)(de)(de)(de)(de)連(lian)(lian)(lian)接(jie)(jie)(jie)(jie)(jie)區(qu)(qu)(qu)(qu)(qu)域(yu)(yu)(yu)(yu)電(dian)(dian)(dian)(dian)(dian)(dian)(dian)接(jie)(jie)(jie)(jie)(jie)觸(chu)，每(mei)個接(jie)(jie)(jie)(jie)(jie)觸(chu)焊(han)盤分別與(yu)相應(ying)的(de)(de)(de)(de)(de)連(lian)(lian)(lian)接(jie)(jie)(jie)(jie)(jie)區(qu)(qu)(qu)(qu)(qu)域(yu)(yu)(yu)(yu)形(xing)(xing)(xing)成第(di)(di)(di)(di)(di)一(yi)(yi)檢(jian)(jian)(jian)(jian)測(ce)(ce)(ce)電(dian)(dian)(dian)(dian)(dian)(dian)(dian)連(lian)(lian)(lian)接(jie)(jie)(jie)(jie)(jie)或第(di)(di)(di)(di)(di)二檢(jian)(jian)(jian)(jian)測(ce)(ce)(ce)電(dian)(dian)(dian)(dian)(dian)(dian)(dian)連(lian)(lian)(lian)接(jie)(jie)(jie)(jie)(jie)。

25、在(zai)所(suo)(suo)述中(zhong)間檢(jian)測電(dian)(dian)極(ji)和所(suo)(suo)述第(di)一檢(jian)測電(dian)(dian)連接以(yi)及(ji)穿過(guo)所(suo)(suo)述鈍(dun)化(hua)(hua)(hua)區域(yu)的(de)所(suo)(suo)述第(di)二檢(jian)測電(dian)(dian)連接上形(xing)成(cheng)所(suo)(suo)述鈍(dun)化(hua)(hua)(hua)區域(yu)的(de)步驟可包括以(yi)下步驟：g.在(zai)應變傳感器的(de)中(zhong)間檢(jian)測電(dian)(dian)極(ji)上和第(di)一壓電(dian)(dian)層(ceng)上形(xing)成(cheng)氮化(hua)(hua)(hua)鋁(lv)的(de)第(di)一絕緣(yuan)層(ceng)；和h.形(xing)成(cheng)穿過(guo)第(di)一絕緣(yuan)層(ceng)的(de)第(di)一電(dian)(dian)連接溝槽(cao)，從而部(bu)分地暴(bao)露中(zhong)間檢(jian)測電(dian)(dian)極(ji)。

26、步驟i可以包括形成(cheng)也(ye)穿過第(di)一(yi)絕(jue)緣層(ceng)的第(di)一(yi)工(gong)作溝(gou)槽，第(di)一(yi)工(gong)作溝(gou)槽還與第(di)一(yi)軸(zhou)線(xian)正交地圍繞第(di)一(yi)絕(jue)緣層(ceng)的一(yi)部分，該(gai)部分沿(yan)著(zhu)第(di)一(yi)軸(zhou)線(xian)疊加在(zai)中間檢(jian)測電(dian)極上，其(qi)形成(cheng)壓電(dian)傳感器元件的鈍(dun)化(hua)區域。

27、步驟i還可以包括形成穿過第一絕(jue)緣(yuan)層和第一壓電(dian)層的(de)(de)第二電(dian)連(lian)接溝(gou)槽，從而部分地暴露工(gong)作晶片的(de)(de)頂(ding)部半導體區域。

28、在(zai)所(suo)述中(zhong)(zhong)間(jian)檢(jian)(jian)測(ce)電(dian)(dian)(dian)(dian)(dian)極(ji)和所(suo)述第(di)(di)一(yi)(yi)檢(jian)(jian)測(ce)電(dian)(dian)(dian)(dian)(dian)連(lian)接(jie)以(yi)及穿(chuan)過所(suo)述鈍化區(qu)域(yu)的(de)所(suo)述第(di)(di)二檢(jian)(jian)測(ce)電(dian)(dian)(dian)(dian)(dian)連(lian)接(jie)上(shang)形(xing)(xing)成所(suo)述鈍化區(qu)域(yu)的(de)步(bu)驟在(zai)步(bu)驟i與p之間(jian)可以(yi)進一(yi)(yi)步(bu)包括(kuo)以(yi)下步(bu)驟：j.在(zai)壓(ya)電(dian)(dian)(dian)(dian)(dian)傳感器(qi)元(yuan)件的(de)鈍化區(qu)域(yu)上(shang)，中(zhong)(zhong)間(jian)檢(jian)(jian)測(ce)電(dian)(dian)(dian)(dian)(dian)極(ji)上(shang)和工作晶片的(de)頂(ding)(ding)部半導(dao)體區(qu)域(yu)上(shang)形(xing)(xing)成導(dao)電(dian)(dian)(dian)(dian)(dian)材料(liao)的(de)第(di)(di)三導(dao)電(dian)(dian)(dian)(dian)(dian)層(ceng)；和k.通過化學(xue)蝕刻圖案化第(di)(di)三導(dao)電(dian)(dian)(dian)(dian)(dian)層(ceng)，使得(de)從第(di)(di)三導(dao)電(dian)(dian)(dian)(dian)(dian)層(ceng)開始(shi)，在(zai)第(di)(di)一(yi)(yi)電(dian)(dian)(dian)(dian)(dian)連(lian)接(jie)溝槽(cao)中(zhong)(zhong)形(xing)(xing)成第(di)(di)一(yi)(yi)檢(jian)(jian)測(ce)電(dian)(dian)(dian)(dian)(dian)連(lian)接(jie)，在(zai)第(di)(di)二電(dian)(dian)(dian)(dian)(dian)連(lian)接(jie)溝槽(cao)中(zhong)(zhong)形(xing)(xing)成第(di)(di)二檢(jian)(jian)測(ce)電(dian)(dian)(dian)(dian)(dian)連(lian)接(jie)，并(bing)且(qie)在(zai)壓(ya)電(dian)(dian)(dian)(dian)(dian)傳感器(qi)元(yuan)件的(de)鈍化區(qu)域(yu)上(shang)形(xing)(xing)成頂(ding)(ding)部檢(jian)(jian)測(ce)電(dian)(dian)(dian)(dian)(dian)極(ji)。

29、方(fang)法(fa)還可(ke)包括以(yi)下步驟：形成(cheng)彈性懸(xuan)置在(zai)(zai)腔體上(shang)方(fang)的(de)可(ke)傾斜結(jie)(jie)(jie)構(gou)(gou)(gou)(gou)；形成(cheng)第(di)一(yi)(yi)支撐臂(bei)(bei)和第(di)二支撐臂(bei)(bei)，第(di)一(yi)(yi)支撐臂(bei)(bei)和第(di)二支撐臂(bei)(bei)沿著可(ke)傾斜結(jie)(jie)(jie)構(gou)(gou)(gou)(gou)的(de)旋(xuan)轉軸線在(zai)(zai)固(gu)定(ding)(ding)結(jie)(jie)(jie)構(gou)(gou)(gou)(gou)與(yu)可(ke)傾斜結(jie)(jie)(jie)構(gou)(gou)(gou)(gou)的(de)相對側(ce)(ce)之間(jian)延伸(shen)(shen)；以(yi)及形成(cheng)多個(ge)可(ke)變(bian)形結(jie)(jie)(jie)構(gou)(gou)(gou)(gou)，可(ke)變(bian)形結(jie)(jie)(jie)構(gou)(gou)(gou)(gou)面向第(di)一(yi)(yi)支撐臂(bei)(bei)的(de)相對側(ce)(ce)，在(zai)(zai)固(gu)定(ding)(ding)結(jie)(jie)(jie)構(gou)(gou)(gou)(gou)與(yu)第(di)一(yi)(yi)支撐臂(bei)(bei)的(de)相對側(ce)(ce)之間(jian)或在(zai)(zai)固(gu)定(ding)(ding)結(jie)(jie)(jie)構(gou)(gou)(gou)(gou)與(yu)可(ke)傾斜結(jie)(jie)(jie)構(gou)(gou)(gou)(gou)之間(jian)延伸(shen)(shen)，并(bing)且是電(dian)可(ke)控的(de)以(yi)機械(xie)地變(bian)形，從而生成(cheng)可(ke)傾斜結(jie)(jie)(jie)構(gou)(gou)(gou)(gou)圍繞旋(xuan)轉軸線的(de)旋(xuan)轉。

30、可(ke)變(bian)形(xing)結(jie)(jie)構(gou)的(de)(de)應(ying)(ying)(ying)變(bian)傳感器可(ke)以相(xiang)對于(yu)旋轉(zhuan)(zhuan)軸線(xian)彼此相(xiang)對。當可(ke)傾(qing)斜結(jie)(jie)構(gou)由于(yu)可(ke)變(bian)形(xing)結(jie)(jie)構(gou)而圍(wei)繞旋轉(zhuan)(zhuan)軸線(xian)旋轉(zhuan)(zhuan)時，可(ke)變(bian)形(xing)結(jie)(jie)構(gou)的(de)(de)應(ying)(ying)(ying)變(bian)傳感器可(ke)經歷相(xiang)應(ying)(ying)(ying)的(de)(de)機械變(bian)形(xing)并(bing)生成相(xiang)應(ying)(ying)(ying)的(de)(de)檢(jian)測(ce)(ce)信(xin)號，該(gai)檢(jian)測(ce)(ce)信(xin)號指示可(ke)傾(qing)斜結(jie)(jie)構(gou)圍(wei)繞旋轉(zhuan)(zhuan)軸線(xian)的(de)(de)旋轉(zhuan)(zhuan)并(bing)彼此相(xiang)位(wei)相(xiang)反。