本發明涉(she)及(ji)一種樹脂密封裝(zhuang)置及(ji)樹脂密封方法。

背景技術：

1、在對(dui)半導(dao)體(ti)元件(jian)等電(dian)(dian)子零件(jian)進行(xing)樹脂(zhi)密封的(de)(de)情況(kuang)下，有時基于電(dian)(dian)子零件(jian)的(de)(de)搭(da)載(zai)狀況(kuang)來調整樹脂(zhi)的(de)(de)供給量。例如，在專(zhuan)利文(wen)獻1中(zhong)，公開有根據電(dian)(dian)子零件(jian)的(de)(de)搭(da)載(zai)狀況(kuang)去(qu)除剩余(yu)的(de)(de)片狀樹脂(zhi)的(de)(de)樹脂(zhi)模塑裝(zhuang)置(zhi)。

2、現有技術文獻

3、專利文獻

4、專利文獻1：日本專利特開號公報

技術實現思路

1、發明所要解決(jue)的問題

2、但是，認為(wei)在專利文獻1中(zhong)所公開的(de)樹脂(zhi)模(mo)塑裝置(zhi)中(zhong)，為(wei)了去除相對(dui)于工件而言剩(sheng)余的(de)片(pian)狀(zhuang)樹脂(zhi)，會產生不(bu)需(xu)要的(de)片(pian)狀(zhuang)樹脂(zhi)。而且，認為(wei)，為(wei)了搬送或(huo)保管不(bu)需(xu)要的(de)片(pian)狀(zhuang)樹脂(zhi)，裝置(zhi)或(huo)工序會復雜化。

3、本(ben)發明是鑒于此種(zhong)情況而(er)成，本(ben)發明的(de)(de)目(mu)的(de)(de)在于提(ti)供(gong)一種(zhong)可在消(xiao)除樹(shu)脂的(de)(de)浪費的(de)(de)同時向各(ge)工件供(gong)給適當量的(de)(de)樹(shu)脂的(de)(de)樹(shu)脂密封裝(zhuang)置及(ji)樹(shu)脂密封方(fang)法(fa)。

4、解決問題的技術手段

5、本(ben)發明的(de)(de)(de)一形態的(de)(de)(de)樹(shu)(shu)(shu)(shu)脂(zhi)(zhi)(zhi)(zhi)(zhi)密封(feng)裝(zhuang)置是(shi)對包(bao)括基材(cai)及(ji)電(dian)(dian)子零(ling)件(jian)(jian)的(de)(de)(de)工件(jian)(jian)的(de)(de)(de)電(dian)(dian)子零(ling)件(jian)(jian)進行樹(shu)(shu)(shu)(shu)脂(zhi)(zhi)(zhi)(zhi)(zhi)密封(feng)的(de)(de)(de)壓縮成形型的(de)(de)(de)樹(shu)(shu)(shu)(shu)脂(zhi)(zhi)(zhi)(zhi)(zhi)密封(feng)裝(zhuang)置，包(bao)括：樹(shu)(shu)(shu)(shu)脂(zhi)(zhi)(zhi)(zhi)(zhi)密封(feng)模具，將樹(shu)(shu)(shu)(shu)脂(zhi)(zhi)(zhi)(zhi)(zhi)材(cai)料壓縮成形于(yu)工件(jian)(jian)來對電(dian)(dian)子零(ling)件(jian)(jian)進行樹(shu)(shu)(shu)(shu)脂(zhi)(zhi)(zhi)(zhi)(zhi)密封(feng)；以(yi)(yi)及(ji)樹(shu)(shu)(shu)(shu)脂(zhi)(zhi)(zhi)(zhi)(zhi)量算出(chu)部(bu)，基于(yu)工件(jian)(jian)中的(de)(de)(de)電(dian)(dian)子零(ling)件(jian)(jian)的(de)(de)(de)搭載狀(zhuang)(zhuang)(zhuang)況，以(yi)(yi)工件(jian)(jian)為(wei)(wei)單位(wei)算出(chu)應向(xiang)工件(jian)(jian)供給(gei)的(de)(de)(de)樹(shu)(shu)(shu)(shu)脂(zhi)(zhi)(zhi)(zhi)(zhi)材(cai)料的(de)(de)(de)樹(shu)(shu)(shu)(shu)脂(zhi)(zhi)(zhi)(zhi)(zhi)量，樹(shu)(shu)(shu)(shu)脂(zhi)(zhi)(zhi)(zhi)(zhi)材(cai)料包(bao)含第(di)(di)一樹(shu)(shu)(shu)(shu)脂(zhi)(zhi)(zhi)(zhi)(zhi)及(ji)第(di)(di)二(er)樹(shu)(shu)(shu)(shu)脂(zhi)(zhi)(zhi)(zhi)(zhi)，第(di)(di)一樹(shu)(shu)(shu)(shu)脂(zhi)(zhi)(zhi)(zhi)(zhi)為(wei)(wei)片狀(zhuang)(zhuang)(zhuang)樹(shu)(shu)(shu)(shu)脂(zhi)(zhi)(zhi)(zhi)(zhi)，第(di)(di)二(er)樹(shu)(shu)(shu)(shu)脂(zhi)(zhi)(zhi)(zhi)(zhi)為(wei)(wei)顆粒狀(zhuang)(zhuang)(zhuang)樹(shu)(shu)(shu)(shu)脂(zhi)(zhi)(zhi)(zhi)(zhi)、粉狀(zhuang)(zhuang)(zhuang)樹(shu)(shu)(shu)(shu)脂(zhi)(zhi)(zhi)(zhi)(zhi)、或液狀(zhuang)(zhuang)(zhuang)樹(shu)(shu)(shu)(shu)脂(zhi)(zhi)(zhi)(zhi)(zhi)，第(di)(di)一樹(shu)(shu)(shu)(shu)脂(zhi)(zhi)(zhi)(zhi)(zhi)及(ji)第(di)(di)二(er)樹(shu)(shu)(shu)(shu)脂(zhi)(zhi)(zhi)(zhi)(zhi)中至少第(di)(di)二(er)樹(shu)(shu)(shu)(shu)脂(zhi)(zhi)(zhi)(zhi)(zhi)的(de)(de)(de)供給(gei)量是(shi)基于(yu)通過樹(shu)(shu)(shu)(shu)脂(zhi)(zhi)(zhi)(zhi)(zhi)量算出(chu)部(bu)而算出(chu)的(de)(de)(de)樹(shu)(shu)(shu)(shu)脂(zhi)(zhi)(zhi)(zhi)(zhi)量并以(yi)(yi)工件(jian)(jian)為(wei)(wei)單位(wei)來決定。

6、通過所(suo)述形(xing)態，根據工(gong)件的搭載狀況，以(yi)工(gong)件為(wei)單位算出應向(xiang)工(gong)件供(gong)(gong)給(gei)的樹脂(zhi)(zhi)材料的樹脂(zhi)(zhi)量，并(bing)基于所(suo)述樹脂(zhi)(zhi)量以(yi)工(gong)件為(wei)單位決(jue)定第二樹脂(zhi)(zhi)的供(gong)(gong)給(gei)量。因此，例如可在向(xiang)工(gong)件供(gong)(gong)給(gei)第一樹脂(zhi)(zhi)的同時，通過第二樹脂(zhi)(zhi)將(jiang)余下的樹脂(zhi)(zhi)量調整為(wei)適(shi)當(dang)量。因此，可在消除供(gong)(gong)給(gei)樹脂(zhi)(zhi)的浪費的同時向(xiang)各(ge)工(gong)件供(gong)(gong)給(gei)適(shi)當(dang)量的樹脂(zhi)(zhi)。

7、本發(fa)明的(de)另一(yi)形(xing)態的(de)樹(shu)脂(zhi)(zhi)(zhi)密封(feng)方法是對(dui)(dui)包括(kuo)基(ji)材(cai)(cai)及(ji)電子(zi)(zi)零(ling)件(jian)(jian)(jian)的(de)工(gong)件(jian)(jian)(jian)的(de)電子(zi)(zi)零(ling)件(jian)(jian)(jian)進(jin)行樹(shu)脂(zhi)(zhi)(zhi)密封(feng)的(de)壓縮(suo)成形(xing)型(xing)的(de)樹(shu)脂(zhi)(zhi)(zhi)密封(feng)方法，包括(kuo)：基(ji)于(yu)工(gong)件(jian)(jian)(jian)中的(de)電子(zi)(zi)零(ling)件(jian)(jian)(jian)的(de)搭載狀(zhuang)況，以(yi)工(gong)件(jian)(jian)(jian)為單(dan)位(wei)算出(chu)應(ying)向工(gong)件(jian)(jian)(jian)供(gong)給(gei)(gei)的(de)樹(shu)脂(zhi)(zhi)(zhi)材(cai)(cai)料(liao)的(de)樹(shu)脂(zhi)(zhi)(zhi)量(liang)；將(jiang)工(gong)件(jian)(jian)(jian)供(gong)給(gei)(gei)至樹(shu)脂(zhi)(zhi)(zhi)密封(feng)模(mo)具(ju)(ju)；將(jiang)樹(shu)脂(zhi)(zhi)(zhi)材(cai)(cai)料(liao)供(gong)給(gei)(gei)至樹(shu)脂(zhi)(zhi)(zhi)密封(feng)模(mo)具(ju)(ju)；以(yi)及(ji)通過樹(shu)脂(zhi)(zhi)(zhi)密封(feng)模(mo)具(ju)(ju)將(jiang)樹(shu)脂(zhi)(zhi)(zhi)材(cai)(cai)料(liao)壓縮(suo)成形(xing)于(yu)所(suo)述工(gong)件(jian)(jian)(jian)來對(dui)(dui)電子(zi)(zi)零(ling)件(jian)(jian)(jian)進(jin)行樹(shu)脂(zhi)(zhi)(zhi)密封(feng)，樹(shu)脂(zhi)(zhi)(zhi)材(cai)(cai)料(liao)包含第(di)一(yi)樹(shu)脂(zhi)(zhi)(zhi)及(ji)第(di)二(er)樹(shu)脂(zhi)(zhi)(zhi)，第(di)一(yi)樹(shu)脂(zhi)(zhi)(zhi)為片狀(zhuang)樹(shu)脂(zhi)(zhi)(zhi)，第(di)二(er)樹(shu)脂(zhi)(zhi)(zhi)為顆(ke)粒狀(zhuang)樹(shu)脂(zhi)(zhi)(zhi)、粉狀(zhuang)樹(shu)脂(zhi)(zhi)(zhi)、或液狀(zhuang)樹(shu)脂(zhi)(zhi)(zhi)，基(ji)于(yu)以(yi)工(gong)件(jian)(jian)(jian)為單(dan)位(wei)而算出(chu)的(de)樹(shu)脂(zhi)(zhi)(zhi)材(cai)(cai)料(liao)的(de)樹(shu)脂(zhi)(zhi)(zhi)量(liang)并以(yi)工(gong)件(jian)(jian)(jian)為單(dan)位(wei)來決定第(di)一(yi)樹(shu)脂(zhi)(zhi)(zhi)及(ji)第(di)二(er)樹(shu)脂(zhi)(zhi)(zhi)中至少(shao)第(di)二(er)樹(shu)脂(zhi)(zhi)(zhi)的(de)供(gong)給(gei)(gei)量(liang)。

8、通過所述形態(tai)，根據(ju)工(gong)(gong)件(jian)(jian)的(de)搭(da)載(zai)狀況，以(yi)工(gong)(gong)件(jian)(jian)為單位算出應(ying)向工(gong)(gong)件(jian)(jian)供(gong)(gong)(gong)給的(de)樹(shu)(shu)脂(zhi)(zhi)(zhi)(zhi)(zhi)材料的(de)樹(shu)(shu)脂(zhi)(zhi)(zhi)(zhi)(zhi)量(liang)，并基于所述樹(shu)(shu)脂(zhi)(zhi)(zhi)(zhi)(zhi)量(liang)以(yi)工(gong)(gong)件(jian)(jian)為單位決定第二(er)樹(shu)(shu)脂(zhi)(zhi)(zhi)(zhi)(zhi)的(de)供(gong)(gong)(gong)給量(liang)。因(yin)此，例如可(ke)在向工(gong)(gong)件(jian)(jian)供(gong)(gong)(gong)給第一樹(shu)(shu)脂(zhi)(zhi)(zhi)(zhi)(zhi)的(de)同時，通過第二(er)樹(shu)(shu)脂(zhi)(zhi)(zhi)(zhi)(zhi)將(jiang)余下的(de)樹(shu)(shu)脂(zhi)(zhi)(zhi)(zhi)(zhi)量(liang)調整為適當(dang)量(liang)。因(yin)此，可(ke)在消除供(gong)(gong)(gong)給樹(shu)(shu)脂(zhi)(zhi)(zhi)(zhi)(zhi)的(de)浪費的(de)同時向各工(gong)(gong)件(jian)(jian)供(gong)(gong)(gong)給適當(dang)量(liang)的(de)樹(shu)(shu)脂(zhi)(zhi)(zhi)(zhi)(zhi)。

9、發明的效果

10、通過本發(fa)明，可在消除供(gong)給樹(shu)脂的(de)浪費的(de)同(tong)時向各工(gong)件供(gong)給適當量的(de)樹(shu)脂。

技術特征：

1.一(yi)種樹脂(zhi)密(mi)封(feng)裝置(zhi)，是對(dui)包(bao)括基材及電子(zi)零(ling)件的工件的所述電子(zi)零(ling)件進行樹脂(zhi)密(mi)封(feng)的壓縮成形型的樹脂(zhi)密(mi)封(feng)裝置(zhi)，包(bao)括：

2.根據權利(li)要求1所(suo)述(shu)的樹脂密封裝置，其(qi)中

3.根據權利要求(qiu)1所述的樹脂密封裝(zhuang)置，進而(er)包括：

4.根(gen)據權利要(yao)求3所述的樹(shu)脂密(mi)封裝置，其中

5.根據權利要求(qiu)4所述的樹脂密封裝置(zhi)，進而包括(kuo)：

6.根據權利(li)要求3所述(shu)的樹脂密(mi)封裝(zhuang)置(zhi)，其(qi)中

7.根(gen)據權利要(yao)求(qiu)6所述的樹脂密封裝置，進而包(bao)括：

8.根據(ju)權利要求1所(suo)述的樹脂密封裝(zhuang)置，進而包(bao)括：

9.根據權利要(yao)求(qiu)8所述的樹脂密封裝置，進而包括(kuo)：

10.根據權利要求1至9中任一項(xiang)所述(shu)的(de)樹脂密(mi)封(feng)裝置，進而包括(kuo)：

11.根據(ju)權利要求1至(zhi)9中任一(yi)項所述的樹脂密封裝置，其中

12.根據權利要求1至9中任一項所述的樹脂密封(feng)裝置，其中

13.一種樹脂密封(feng)方法，是(shi)對包括基材及電(dian)子零(ling)件(jian)的工件(jian)的所述電(dian)子零(ling)件(jian)進行樹脂密封(feng)的壓縮成形型的樹脂密封(feng)方法，包括：

技術總結
樹脂密封裝置(1)包括：樹脂密封模具(21)，將樹脂材料壓縮成形于工件(W)來對電子零件(P)進行樹脂密封；以及樹脂量算出部(79)，基于工件(W)中的電子零件(P)的搭載狀況，以工件為單位算出應向工件(W)供給的樹脂材料的樹脂量，樹脂材料包含第一樹脂(R1)及第二樹脂(R2)，第一樹脂(R1)為片狀樹脂，第二樹脂(R2)為顆粒狀樹脂、粉狀樹脂、或液狀樹脂，第一樹脂(R1)及第二樹脂(R2)中至少第二樹脂(R2)的供給量是基于通過樹脂量算出部(79)而算出的樹脂量并以工件為單位來決定。

技術研發人員：田上秀作,柳澤誠
受保護的技術使用者：山田尖端科技株式會社
技術研發日：
技術公布日：2024/9/29