本發(fa)明涉及(ji)電(dian)子(zi)束曝光(guang)，具體(ti)涉及(ji)一種(zhong)電(dian)子(zi)束曝光(guang)機內部(bu)的超精(jing)密工件臺(tai)系(xi)統(tong)。

背景技術：

1、電(dian)子束曝光(guang)(guang)機主要應用(yong)(yong)于微納米加工領(ling)域。一方面(mian)電(dian)子束曝光(guang)(guang)可(ke)以在(zai)計算機控制(zhi)(zhi)下(xia)直接(jie)產(chan)生所要求(qiu)的(de)(de)圖(tu)形(xing)，且(qie)修改容(rong)易，制(zhi)(zhi)作(zuo)周(zhou)期(qi)短，因此被(bei)廣(guang)泛應用(yong)(yong)于光(guang)(guang)掩(yan)膜、x射(she)線(xian)掩(yan)膜的(de)(de)制(zhi)(zhi)作(zuo)，它(ta)已成為微電(dian)子產(chan)業制(zhi)(zhi)作(zuo)掩(yan)膜版(ban)的(de)(de)主要手(shou)段。另(ling)一方面(mian)，電(dian)子束曝光(guang)(guang)系統(tong)利(li)用(yong)(yong)標記檢測技(ji)術可(ke)以達(da)到極高的(de)(de)套刻精度，因此可(ke)進行晶(jing)片上(shang)的(de)(de)直接(jie)描畫，即無需掩(yan)膜版(ban)直接(jie)在(zai)晶(jing)片上(shang)制(zhi)(zhi)造器件。所以，它(ta)被(bei)用(yong)(yong)于新器件、新集成電(dian)路(lu)的(de)(de)研制(zhi)(zhi)和小批量器件和集成電(dian)路(lu)的(de)(de)生產(chan)。

2、電子束曝光的(de)最大特(te)點是(shi)其分辨率極高，它的(de)圖形拼接精(jing)度(du)主(zhu)要取(qu)決(jue)于束工件臺的(de)精(jing)度(du)及穩定(ding)(ding)(ding)性，其中精(jing)度(du)及穩定(ding)(ding)(ding)性的(de)關鍵是(shi)定(ding)(ding)(ding)位精(jing)度(du)和(he)十字平(ping)臺的(de)正交性。

3、正交性越好(hao)，定位精(jing)度越高(gao)，曝光圖形(xing)的(de)(de)拼接(jie)誤差就(jiu)越小，圖形(xing)精(jing)度也(ye)就(jiu)越高(gao)。由此可見，高(gao)的(de)(de)正交性和好(hao)的(de)(de)定位精(jing)度是大場(chang)曝光指標(biao)的(de)(de)關鍵。一(yi)套好(hao)的(de)(de)工(gong)件臺系統可以(yi)保證電子束曝光機在大場(chang)曝光中良好(hao)的(de)(de)拼接(jie)精(jing)度。

技術實現思路

1、本發明要解決的技(ji)(ji)術問(wen)題是克服現有(you)技(ji)(ji)術的不足，提供一(yi)種結構緊(jin)湊、操作(zuo)簡(jian)單、運動精(jing)度高(gao)的電子束曝光(guang)機的工件(jian)臺(tai)系統。

2、為解決上述技術(shu)(shu)問(wen)題，本發明采用(yong)以下技術(shu)(shu)方案：

3、一種(zhong)電(dian)子束曝光機的(de)工件(jian)(jian)(jian)(jian)臺系(xi)統，包括：調節(jie)支(zhi)座、安(an)(an)(an)裝(zhuang)(zhuang)(zhuang)底(di)(di)板(ban)(ban)(ban)(ban)、導軌(gui)(gui)、傳(chuan)(chuan)(chuan)動(dong)(dong)(dong)(dong)(dong)(dong)組(zu)件(jian)(jian)(jian)(jian)、連(lian)接(jie)(jie)(jie)板(ban)(ban)(ban)(ban)和(he)(he)運(yun)(yun)動(dong)(dong)(dong)(dong)(dong)(dong)頂(ding)(ding)(ding)(ding)板(ban)(ban)(ban)(ban)，所(suo)述(shu)(shu)(shu)運(yun)(yun)動(dong)(dong)(dong)(dong)(dong)(dong)頂(ding)(ding)(ding)(ding)板(ban)(ban)(ban)(ban)用于承載工件(jian)(jian)(jian)(jian)；多(duo)個所(suo)述(shu)(shu)(shu)調節(jie)支(zhi)座均布(bu)在(zai)安(an)(an)(an)裝(zhuang)(zhuang)(zhuang)底(di)(di)板(ban)(ban)(ban)(ban)底(di)(di)部，所(suo)述(shu)(shu)(shu)傳(chuan)(chuan)(chuan)動(dong)(dong)(dong)(dong)(dong)(dong)組(zu)件(jian)(jian)(jian)(jian)包括x軸(zhou)(zhou)(zhou)(zhou)傳(chuan)(chuan)(chuan)動(dong)(dong)(dong)(dong)(dong)(dong)組(zu)件(jian)(jian)(jian)(jian)和(he)(he)y軸(zhou)(zhou)(zhou)(zhou)轉(zhuan)動(dong)(dong)(dong)(dong)(dong)(dong)組(zu)件(jian)(jian)(jian)(jian)，所(suo)述(shu)(shu)(shu)x軸(zhou)(zhou)(zhou)(zhou)傳(chuan)(chuan)(chuan)動(dong)(dong)(dong)(dong)(dong)(dong)組(zu)件(jian)(jian)(jian)(jian)安(an)(an)(an)裝(zhuang)(zhuang)(zhuang)在(zai)安(an)(an)(an)裝(zhuang)(zhuang)(zhuang)底(di)(di)板(ban)(ban)(ban)(ban)上(shang)(shang)(shang)，x軸(zhou)(zhou)(zhou)(zhou)傳(chuan)(chuan)(chuan)動(dong)(dong)(dong)(dong)(dong)(dong)組(zu)件(jian)(jian)(jian)(jian)的(de)輸出端(duan)與(yu)連(lian)接(jie)(jie)(jie)板(ban)(ban)(ban)(ban)連(lian)接(jie)(jie)(jie)，y軸(zhou)(zhou)(zhou)(zhou)轉(zhuan)動(dong)(dong)(dong)(dong)(dong)(dong)組(zu)件(jian)(jian)(jian)(jian)安(an)(an)(an)裝(zhuang)(zhuang)(zhuang)在(zai)連(lian)接(jie)(jie)(jie)板(ban)(ban)(ban)(ban)上(shang)(shang)(shang)，y軸(zhou)(zhou)(zhou)(zhou)轉(zhuan)動(dong)(dong)(dong)(dong)(dong)(dong)組(zu)件(jian)(jian)(jian)(jian)的(de)輸出端(duan)與(yu)運(yun)(yun)動(dong)(dong)(dong)(dong)(dong)(dong)頂(ding)(ding)(ding)(ding)板(ban)(ban)(ban)(ban)連(lian)接(jie)(jie)(jie)；所(suo)述(shu)(shu)(shu)連(lian)接(jie)(jie)(jie)板(ban)(ban)(ban)(ban)的(de)底(di)(di)部設(she)有(you)x軸(zhou)(zhou)(zhou)(zhou)基(ji)準槽(cao)，連(lian)接(jie)(jie)(jie)板(ban)(ban)(ban)(ban)的(de)頂(ding)(ding)(ding)(ding)部設(she)有(you)y軸(zhou)(zhou)(zhou)(zhou)基(ji)準槽(cao)，所(suo)述(shu)(shu)(shu)導軌(gui)(gui)包括x軸(zhou)(zhou)(zhou)(zhou)導軌(gui)(gui)和(he)(he)y軸(zhou)(zhou)(zhou)(zhou)導軌(gui)(gui)，所(suo)述(shu)(shu)(shu)x軸(zhou)(zhou)(zhou)(zhou)導軌(gui)(gui)安(an)(an)(an)裝(zhuang)(zhuang)(zhuang)在(zai)安(an)(an)(an)裝(zhuang)(zhuang)(zhuang)底(di)(di)板(ban)(ban)(ban)(ban)上(shang)(shang)(shang)，并(bing)(bing)與(yu)x軸(zhou)(zhou)(zhou)(zhou)基(ji)準槽(cao)滑動(dong)(dong)(dong)(dong)(dong)(dong)配(pei)合，所(suo)述(shu)(shu)(shu)y軸(zhou)(zhou)(zhou)(zhou)導軌(gui)(gui)安(an)(an)(an)裝(zhuang)(zhuang)(zhuang)在(zai)運(yun)(yun)動(dong)(dong)(dong)(dong)(dong)(dong)頂(ding)(ding)(ding)(ding)板(ban)(ban)(ban)(ban)上(shang)(shang)(shang)，并(bing)(bing)與(yu)y軸(zhou)(zhou)(zhou)(zhou)基(ji)準槽(cao)滑動(dong)(dong)(dong)(dong)(dong)(dong)配(pei)合；在(zai)x軸(zhou)(zhou)(zhou)(zhou)傳(chuan)(chuan)(chuan)動(dong)(dong)(dong)(dong)(dong)(dong)組(zu)件(jian)(jian)(jian)(jian)的(de)驅動(dong)(dong)(dong)(dong)(dong)(dong)下(xia)，連(lian)接(jie)(jie)(jie)板(ban)(ban)(ban)(ban)帶動(dong)(dong)(dong)(dong)(dong)(dong)運(yun)(yun)動(dong)(dong)(dong)(dong)(dong)(dong)頂(ding)(ding)(ding)(ding)板(ban)(ban)(ban)(ban)在(zai)安(an)(an)(an)裝(zhuang)(zhuang)(zhuang)底(di)(di)板(ban)(ban)(ban)(ban)上(shang)(shang)(shang)沿著x軸(zhou)(zhou)(zhou)(zhou)方向上(shang)(shang)(shang)移動(dong)(dong)(dong)(dong)(dong)(dong)，在(zai)y軸(zhou)(zhou)(zhou)(zhou)轉(zhuan)動(dong)(dong)(dong)(dong)(dong)(dong)組(zu)件(jian)(jian)(jian)(jian)的(de)驅動(dong)(dong)(dong)(dong)(dong)(dong)下(xia)，運(yun)(yun)動(dong)(dong)(dong)(dong)(dong)(dong)頂(ding)(ding)(ding)(ding)板(ban)(ban)(ban)(ban)在(zai)連(lian)接(jie)(jie)(jie)板(ban)(ban)(ban)(ban)上(shang)(shang)(shang)沿著y軸(zhou)(zhou)(zhou)(zhou)方向上(shang)(shang)(shang)移動(dong)(dong)(dong)(dong)(dong)(dong)。

4、作為本發明的(de)進(jin)一步改進(jin)，所述安裝底板(ban)上設有(you)光柵尺測量組件，以用于(yu)測量連接板(ban)和(he)運動(dong)頂板(ban)的(de)位移，并將位置信號反饋至外置的(de)控制(zhi)系(xi)。

5、作為本(ben)發明的進一步(bu)改進，所述安裝底(di)板(ban)上設(she)有輔助組件，以用于(yu)線纜和拖鏈的支撐。

6、作為本(ben)發明(ming)的(de)進一步改進，所(suo)(suo)述(shu)x軸基(ji)準槽兩(liang)兩(liang)平(ping)(ping)行設(she)置(zhi)(zhi)在連(lian)接板(ban)的(de)底部(bu)，所(suo)(suo)述(shu)y軸基(ji)準槽兩(liang)兩(liang)平(ping)(ping)行設(she)置(zhi)(zhi)在連(lian)接板(ban)的(de)頂部(bu)，x軸基(ji)準槽與y軸基(ji)準槽呈(cheng)十(shi)字交叉狀布置(zhi)(zhi)。

7、作為本發(fa)明的(de)進一步改進，兩(liang)兩(liang)平行設置的(de)基準(zhun)(zhun)槽之間(jian)，平行度誤(wu)差(cha)(cha)小(xiao)于5μm；連(lian)接板底部和頂部的(de)基準(zhun)(zhun)槽的(de)平行度誤(wu)差(cha)(cha)小(xiao)于3μm。

8、作為本發明的(de)進一(yi)步改進，所(suo)述(shu)(shu)調(diao)節(jie)(jie)(jie)支座(zuo)包括：安裝(zhuang)(zhuang)底(di)座(zuo)、安裝(zhuang)(zhuang)滑(hua)(hua)塊、調(diao)節(jie)(jie)(jie)螺(luo)母和中心(xin)鎖(suo)(suo)緊螺(luo)釘；所(suo)述(shu)(shu)調(diao)節(jie)(jie)(jie)螺(luo)母底(di)部(bu)與(yu)安裝(zhuang)(zhuang)底(di)座(zuo)頂部(bu)進行螺(luo)紋配合，以(yi)用于(yu)調(diao)節(jie)(jie)(jie)工(gong)作臺系統的(de)水(shui)平(ping)高度和平(ping)面度；所(suo)述(shu)(shu)安裝(zhuang)(zhuang)滑(hua)(hua)塊頂部(bu)與(yu)安裝(zhuang)(zhuang)底(di)板連(lian)接，安裝(zhuang)(zhuang)滑(hua)(hua)塊底(di)部(bu)與(yu)調(diao)節(jie)(jie)(jie)螺(luo)母頂部(bu)通(tong)過弧形凹(ao)槽進行配合，以(yi)實(shi)現(xian)安裝(zhuang)(zhuang)底(di)板具備偏擺角度；所(suo)述(shu)(shu)安裝(zhuang)(zhuang)滑(hua)(hua)塊與(yu)安裝(zhuang)(zhuang)底(di)座(zuo)通(tong)過中心(xin)鎖(suo)(suo)緊螺(luo)釘連(lian)接固定。

9、作(zuo)為本發明的進(jin)一(yi)步改進(jin)，所述調(diao)節(jie)支座(zuo)(zuo)還(huan)包括：鎖(suo)(suo)緊(jin)螺母(mu)(mu)、底(di)(di)座(zuo)(zuo)鎖(suo)(suo)緊(jin)螺釘和(he)滑(hua)(hua)塊(kuai)(kuai)鎖(suo)(suo)緊(jin)螺釘；所述鎖(suo)(suo)緊(jin)螺母(mu)(mu)位于(yu)調(diao)節(jie)螺母(mu)(mu)與(yu)安裝(zhuang)底(di)(di)座(zuo)(zuo)之間，用于(yu)鎖(suo)(suo)緊(jin)調(diao)節(jie)螺母(mu)(mu)；所述底(di)(di)座(zuo)(zuo)鎖(suo)(suo)緊(jin)螺釘位于(yu)安裝(zhuang)底(di)(di)座(zuo)(zuo)底(di)(di)部，用于(yu)鎖(suo)(suo)緊(jin)安裝(zhuang)底(di)(di)座(zuo)(zuo)；所述滑(hua)(hua)塊(kuai)(kuai)鎖(suo)(suo)緊(jin)螺釘位于(yu)安裝(zhuang)滑(hua)(hua)塊(kuai)(kuai)頂部，用于(yu)實現安裝(zhuang)滑(hua)(hua)塊(kuai)(kuai)與(yu)安裝(zhuang)底(di)(di)板鎖(suo)(suo)緊(jin)固定(ding)。

10、作(zuo)為(wei)本發(fa)明的(de)(de)(de)進(jin)一步改進(jin)，所(suo)述(shu)x軸(zhou)(zhou)(zhou)(zhou)傳動(dong)組件(jian)(jian)(jian)(jian)(jian)(jian)(jian)和y軸(zhou)(zhou)(zhou)(zhou)轉動(dong)組件(jian)(jian)(jian)(jian)(jian)(jian)(jian)具有相同的(de)(de)(de)結構設置；所(suo)述(shu)x軸(zhou)(zhou)(zhou)(zhou)傳動(dong)組件(jian)(jian)(jian)(jian)(jian)(jian)(jian)包括驅(qu)動(dong)電(dian)機、聯軸(zhou)(zhou)(zhou)(zhou)器、成(cheng)組角接(jie)觸軸(zhou)(zhou)(zhou)(zhou)承(cheng)、滾(gun)珠(zhu)(zhu)絲(si)桿(gan)(gan)組件(jian)(jian)(jian)(jian)(jian)(jian)(jian)、深(shen)溝(gou)球軸(zhou)(zhou)(zhou)(zhou)承(cheng)、軸(zhou)(zhou)(zhou)(zhou)承(cheng)座(zuo)固(gu)定組件(jian)(jian)(jian)(jian)(jian)(jian)(jian)、絲(si)桿(gan)(gan)滑塊和支(zhi)撐軸(zhou)(zhou)(zhou)(zhou)承(cheng)座(zuo)；所(suo)述(shu)滾(gun)珠(zhu)(zhu)絲(si)桿(gan)(gan)組件(jian)(jian)(jian)(jian)(jian)(jian)(jian)的(de)(de)(de)一端延伸至(zhi)軸(zhou)(zhou)(zhou)(zhou)承(cheng)座(zuo)固(gu)定組件(jian)(jian)(jian)(jian)(jian)(jian)(jian)內，并(bing)通過(guo)聯軸(zhou)(zhou)(zhou)(zhou)器與驅(qu)動(dong)電(dian)機的(de)(de)(de)輸出端連(lian)接(jie)，軸(zhou)(zhou)(zhou)(zhou)承(cheng)座(zuo)固(gu)定組件(jian)(jian)(jian)(jian)(jian)(jian)(jian)與滾(gun)珠(zhu)(zhu)絲(si)桿(gan)(gan)組件(jian)(jian)(jian)(jian)(jian)(jian)(jian)的(de)(de)(de)連(lian)接(jie)處(chu)設有成(cheng)組角接(jie)觸軸(zhou)(zhou)(zhou)(zhou)承(cheng)；所(suo)述(shu)滾(gun)珠(zhu)(zhu)絲(si)桿(gan)(gan)組件(jian)(jian)(jian)(jian)(jian)(jian)(jian)的(de)(de)(de)另一端通過(guo)深(shen)溝(gou)球軸(zhou)(zhou)(zhou)(zhou)承(cheng)與支(zhi)撐軸(zhou)(zhou)(zhou)(zhou)承(cheng)座(zuo)連(lian)接(jie)，所(suo)述(shu)軸(zhou)(zhou)(zhou)(zhou)承(cheng)座(zuo)固(gu)定組件(jian)(jian)(jian)(jian)(jian)(jian)(jian)和支(zhi)撐軸(zhou)(zhou)(zhou)(zhou)承(cheng)座(zuo)均固(gu)定在安(an)裝(zhuang)底板上；所(suo)述(shu)絲(si)桿(gan)(gan)滑塊滑動(dong)設置在滾(gun)珠(zhu)(zhu)絲(si)桿(gan)(gan)組件(jian)(jian)(jian)(jian)(jian)(jian)(jian)上，并(bing)與連(lian)接(jie)板的(de)(de)(de)底部(bu)連(lian)接(jie)。

11、作為(wei)本發明(ming)的進一步改進，所述(shu)x軸(zhou)傳動(dong)組件(jian)(jian)還(huan)包括(kuo)密(mi)(mi)(mi)封(feng)殼體(ti)和(he)差(cha)(cha)抽(chou)組件(jian)(jian)；所述(shu)密(mi)(mi)(mi)封(feng)殼體(ti)與軸(zhou)承座固(gu)定組件(jian)(jian)連接固(gu)定，驅動(dong)電機(ji)密(mi)(mi)(mi)封(feng)設置(zhi)在密(mi)(mi)(mi)封(feng)殼體(ti)中，密(mi)(mi)(mi)封(feng)殼體(ti)內(nei)填充(chong)惰性氣體(ti)；所述(shu)密(mi)(mi)(mi)封(feng)殼體(ti)上設有(you)多個(ge)差(cha)(cha)抽(chou)組件(jian)(jian)，所述(shu)差(cha)(cha)抽(chou)組件(jian)(jian)用于降低密(mi)(mi)(mi)封(feng)殼體(ti)內(nei)外的壓差(cha)(cha)。

12、作為(wei)本(ben)發明的進一步改(gai)進，所述運動頂板上設有(you)屏(ping)蔽(bi)(bi)層，以實現磁性(xing)屏(ping)蔽(bi)(bi)。

13、與(yu)現(xian)有(you)技(ji)術相比，本發(fa)明的優點(dian)在于(yu)：

14、1、本發明的(de)(de)(de)電子束曝光(guang)(guang)(guang)機的(de)(de)(de)工件(jian)(jian)臺系(xi)(xi)統(tong)(tong)，通過調節支座、安(an)(an)(an)裝(zhuang)(zhuang)(zhuang)底(di)(di)(di)板(ban)、導(dao)軌(gui)、傳動(dong)(dong)(dong)(dong)(dong)(dong)(dong)組(zu)(zu)(zu)件(jian)(jian)、連接(jie)板(ban)和(he)(he)用(yong)于承(cheng)載工件(jian)(jian)的(de)(de)(de)運(yun)(yun)(yun)動(dong)(dong)(dong)(dong)(dong)(dong)(dong)頂(ding)板(ban)組(zu)(zu)(zu)成了(le)(le)工件(jian)(jian)臺系(xi)(xi)統(tong)(tong)的(de)(de)(de)主(zhu)體結(jie)構，具有(you)(you)結(jie)構緊(jin)湊、拆裝(zhuang)(zhuang)(zhuang)便捷的(de)(de)(de)特(te)點；具體地，在(zai)(zai)安(an)(an)(an)裝(zhuang)(zhuang)(zhuang)底(di)(di)(di)板(ban)底(di)(di)(di)部(bu)均(jun)布(bu)了(le)(le)多(duo)個調節支座，利(li)用(yong)調節支座實(shi)現了(le)(le)工件(jian)(jian)臺系(xi)(xi)統(tong)(tong)的(de)(de)(de)水(shui)平高(gao)度和(he)(he)平面度調整，提高(gao)了(le)(le)工件(jian)(jian)臺系(xi)(xi)統(tong)(tong)的(de)(de)(de)支撐(cheng)平穩性；進(jin)一步(bu)地，傳動(dong)(dong)(dong)(dong)(dong)(dong)(dong)組(zu)(zu)(zu)件(jian)(jian)包(bao)括(kuo)了(le)(le)x軸(zhou)(zhou)(zhou)(zhou)傳動(dong)(dong)(dong)(dong)(dong)(dong)(dong)組(zu)(zu)(zu)件(jian)(jian)和(he)(he)y軸(zhou)(zhou)(zhou)(zhou)轉動(dong)(dong)(dong)(dong)(dong)(dong)(dong)組(zu)(zu)(zu)件(jian)(jian)，x軸(zhou)(zhou)(zhou)(zhou)傳動(dong)(dong)(dong)(dong)(dong)(dong)(dong)組(zu)(zu)(zu)件(jian)(jian)安(an)(an)(an)裝(zhuang)(zhuang)(zhuang)在(zai)(zai)安(an)(an)(an)裝(zhuang)(zhuang)(zhuang)底(di)(di)(di)板(ban)上(shang)，其輸出端與(yu)(yu)連接(jie)板(ban)連接(jie)，y軸(zhou)(zhou)(zhou)(zhou)轉動(dong)(dong)(dong)(dong)(dong)(dong)(dong)組(zu)(zu)(zu)件(jian)(jian)安(an)(an)(an)裝(zhuang)(zhuang)(zhuang)在(zai)(zai)連接(jie)板(ban)上(shang)，其輸出端與(yu)(yu)運(yun)(yun)(yun)動(dong)(dong)(dong)(dong)(dong)(dong)(dong)頂(ding)板(ban)連接(jie)；與(yu)(yu)此同時(shi)，連接(jie)板(ban)的(de)(de)(de)底(di)(di)(di)部(bu)和(he)(he)頂(ding)部(bu)分別設(she)有(you)(you)x軸(zhou)(zhou)(zhou)(zhou)基(ji)準槽(cao)和(he)(he)y軸(zhou)(zhou)(zhou)(zhou)基(ji)準槽(cao)，導(dao)軌(gui)包(bao)括(kuo)了(le)(le)x軸(zhou)(zhou)(zhou)(zhou)導(dao)軌(gui)和(he)(he)y軸(zhou)(zhou)(zhou)(zhou)導(dao)軌(gui)，x軸(zhou)(zhou)(zhou)(zhou)導(dao)軌(gui)安(an)(an)(an)裝(zhuang)(zhuang)(zhuang)在(zai)(zai)安(an)(an)(an)裝(zhuang)(zhuang)(zhuang)底(di)(di)(di)板(ban)上(shang)，并與(yu)(yu)x軸(zhou)(zhou)(zhou)(zhou)基(ji)準槽(cao)滑(hua)(hua)動(dong)(dong)(dong)(dong)(dong)(dong)(dong)配合(he)，y軸(zhou)(zhou)(zhou)(zhou)導(dao)軌(gui)安(an)(an)(an)裝(zhuang)(zhuang)(zhuang)在(zai)(zai)運(yun)(yun)(yun)動(dong)(dong)(dong)(dong)(dong)(dong)(dong)頂(ding)板(ban)上(shang)，并與(yu)(yu)y軸(zhou)(zhou)(zhou)(zhou)基(ji)準槽(cao)滑(hua)(hua)動(dong)(dong)(dong)(dong)(dong)(dong)(dong)配合(he)；利(li)用(yong)x軸(zhou)(zhou)(zhou)(zhou)傳動(dong)(dong)(dong)(dong)(dong)(dong)(dong)組(zu)(zu)(zu)件(jian)(jian)的(de)(de)(de)驅(qu)動(dong)(dong)(dong)(dong)(dong)(dong)(dong)，連接(jie)板(ban)帶動(dong)(dong)(dong)(dong)(dong)(dong)(dong)運(yun)(yun)(yun)動(dong)(dong)(dong)(dong)(dong)(dong)(dong)頂(ding)板(ban)在(zai)(zai)安(an)(an)(an)裝(zhuang)(zhuang)(zhuang)底(di)(di)(di)板(ban)上(shang)沿(yan)著x軸(zhou)(zhou)(zhou)(zhou)方向上(shang)移(yi)動(dong)(dong)(dong)(dong)(dong)(dong)(dong)，利(li)用(yong)y軸(zhou)(zhou)(zhou)(zhou)轉動(dong)(dong)(dong)(dong)(dong)(dong)(dong)組(zu)(zu)(zu)件(jian)(jian)的(de)(de)(de)驅(qu)動(dong)(dong)(dong)(dong)(dong)(dong)(dong)，運(yun)(yun)(yun)動(dong)(dong)(dong)(dong)(dong)(dong)(dong)頂(ding)板(ban)在(zai)(zai)連接(jie)板(ban)上(shang)沿(yan)著y軸(zhou)(zhou)(zhou)(zhou)方向上(shang)移(yi)動(dong)(dong)(dong)(dong)(dong)(dong)(dong)，通過基(ji)準槽(cao)與(yu)(yu)導(dao)軌(gui)進(jin)行配合(he)的(de)(de)(de)形式，實(shi)現了(le)(le)2μm的(de)(de)(de)定位精度，1μm的(de)(de)(de)重復定位精度，200行程范圍(wei)內，1角秒(miao)的(de)(de)(de)正交性，很好(hao)地滿足了(le)(le)曝光(guang)(guang)(guang)機大(da)場曝光(guang)(guang)(guang)的(de)(de)(de)拼接(jie)精度需求。

15、2、本發明的(de)電子束曝光機的(de)工件臺系統，通過將雙v交(jiao)叉滾子導軌固定(ding)在十字交(jiao)叉結構的(de)連接(jie)板(ban)上(shang)(shang)(shang)，具有支撐(cheng)長度長、運行剛度高(gao)、穩(wen)定(ding)性好(hao)等(deng)優(you)點，而且對外界的(de)振動(dong)激勵抑(yi)制(zhi)性好(hao)；與此同時，采用四根導軌的(de)基(ji)準(zhun)(zhun)槽集(ji)中在連接(jie)板(ban)這一(yi)個零件上(shang)(shang)(shang)，這四個基(ji)準(zhun)(zhun)槽采用一(yi)次裝(zhuang)夾加工，可(ke)以很好(hao)的(de)保(bao)(bao)證及形位(wei)公(gong)差，及相(xiang)對位(wei)置，保(bao)(bao)證連接(jie)板(ban)與運動(dong)頂板(ban)上(shang)(shang)(shang)下兩層平臺的(de)正交(jiao)性，確(que)保(bao)(bao)了(le)連接(jie)板(ban)和(he)運動(dong)頂板(ban)位(wei)移的(de)精準(zhun)(zhun)度，消(xiao)除了(le)重(zhong)復裝(zhuang)夾帶(dai)來(lai)的(de)誤差。

16、3、本發明(ming)的(de)(de)電(dian)子束(shu)曝光機的(de)(de)工(gong)件臺(tai)系統，通(tong)過采(cai)用激光光柵尺測量組(zu)件對連(lian)接板和運動頂(ding)板組(zu)成的(de)(de)運動平臺(tai)進行預先補償，使之成為系統的(de)(de)固有屬性，后期(qi)運行無需再進行補償；本發明(ming)的(de)(de)工(gong)件臺(tai)系統結構組(zu)成簡單、尺寸(cun)小巧，可方便安裝在曝光腔(qiang)內(nei)，節省(sheng)了曝光腔(qiang)的(de)(de)尺寸(cun)。

技術特征：

1.一種電子束(shu)曝光機(ji)的(de)(de)(de)工件(jian)(jian)臺系統，其(qi)特征在(zai)(zai)(zai)于，包括(kuo)(kuo)(kuo)：調節(jie)支(zhi)座(1)、安(an)(an)裝(zhuang)(zhuang)(zhuang)(zhuang)底板(ban)(ban)(ban)(ban)(2)、導(dao)軌(gui)(3)、傳(chuan)動(dong)(dong)(dong)組(zu)(zu)(zu)件(jian)(jian)(4)、連(lian)接(jie)板(ban)(ban)(ban)(ban)(5)和運(yun)(yun)(yun)動(dong)(dong)(dong)頂(ding)(ding)板(ban)(ban)(ban)(ban)(6)，所(suo)(suo)述(shu)運(yun)(yun)(yun)動(dong)(dong)(dong)頂(ding)(ding)板(ban)(ban)(ban)(ban)(6)用于承載工件(jian)(jian)；多(duo)個所(suo)(suo)述(shu)調節(jie)支(zhi)座(1)均(jun)布在(zai)(zai)(zai)安(an)(an)裝(zhuang)(zhuang)(zhuang)(zhuang)底板(ban)(ban)(ban)(ban)(2)底部，所(suo)(suo)述(shu)傳(chuan)動(dong)(dong)(dong)組(zu)(zu)(zu)件(jian)(jian)(4)包括(kuo)(kuo)(kuo)x軸(zhou)(zhou)(zhou)傳(chuan)動(dong)(dong)(dong)組(zu)(zu)(zu)件(jian)(jian)(401)和y軸(zhou)(zhou)(zhou)轉動(dong)(dong)(dong)組(zu)(zu)(zu)件(jian)(jian)(402)，所(suo)(suo)述(shu)x軸(zhou)(zhou)(zhou)傳(chuan)動(dong)(dong)(dong)組(zu)(zu)(zu)件(jian)(jian)(401)安(an)(an)裝(zhuang)(zhuang)(zhuang)(zhuang)在(zai)(zai)(zai)安(an)(an)裝(zhuang)(zhuang)(zhuang)(zhuang)底板(ban)(ban)(ban)(ban)(2)上，x軸(zhou)(zhou)(zhou)傳(chuan)動(dong)(dong)(dong)組(zu)(zu)(zu)件(jian)(jian)(401)的(de)(de)(de)輸(shu)(shu)出端(duan)與連(lian)接(jie)板(ban)(ban)(ban)(ban)(5)連(lian)接(jie)，y軸(zhou)(zhou)(zhou)轉動(dong)(dong)(dong)組(zu)(zu)(zu)件(jian)(jian)(402)安(an)(an)裝(zhuang)(zhuang)(zhuang)(zhuang)在(zai)(zai)(zai)連(lian)接(jie)板(ban)(ban)(ban)(ban)(5)上，y軸(zhou)(zhou)(zhou)轉動(dong)(dong)(dong)組(zu)(zu)(zu)件(jian)(jian)(402)的(de)(de)(de)輸(shu)(shu)出端(duan)與運(yun)(yun)(yun)動(dong)(dong)(dong)頂(ding)(ding)板(ban)(ban)(ban)(ban)(6)連(lian)接(jie)；所(suo)(suo)述(shu)連(lian)接(jie)板(ban)(ban)(ban)(ban)(5)的(de)(de)(de)底部設有(you)x軸(zhou)(zhou)(zhou)基準槽(cao)(cao)(51)，連(lian)接(jie)板(ban)(ban)(ban)(ban)(5)的(de)(de)(de)頂(ding)(ding)部設有(you)y軸(zhou)(zhou)(zhou)基準槽(cao)(cao)(52)，所(suo)(suo)述(shu)導(dao)軌(gui)(3)包括(kuo)(kuo)(kuo)x軸(zhou)(zhou)(zhou)導(dao)軌(gui)(31)和y軸(zhou)(zhou)(zhou)導(dao)軌(gui)(32)，所(suo)(suo)述(shu)x軸(zhou)(zhou)(zhou)導(dao)軌(gui)(31)安(an)(an)裝(zhuang)(zhuang)(zhuang)(zhuang)在(zai)(zai)(zai)安(an)(an)裝(zhuang)(zhuang)(zhuang)(zhuang)底板(ban)(ban)(ban)(ban)(2)上，并(bing)(bing)與x軸(zhou)(zhou)(zhou)基準槽(cao)(cao)(51)滑動(dong)(dong)(dong)配合，所(suo)(suo)述(shu)y軸(zhou)(zhou)(zhou)導(dao)軌(gui)(32)安(an)(an)裝(zhuang)(zhuang)(zhuang)(zhuang)在(zai)(zai)(zai)運(yun)(yun)(yun)動(dong)(dong)(dong)頂(ding)(ding)板(ban)(ban)(ban)(ban)(6)上，并(bing)(bing)與y軸(zhou)(zhou)(zhou)基準槽(cao)(cao)(52)滑動(dong)(dong)(dong)配合；在(zai)(zai)(zai)x軸(zhou)(zhou)(zhou)傳(chuan)動(dong)(dong)(dong)組(zu)(zu)(zu)件(jian)(jian)(401)的(de)(de)(de)驅(qu)動(dong)(dong)(dong)下，連(lian)接(jie)板(ban)(ban)(ban)(ban)(5)帶動(dong)(dong)(dong)運(yun)(yun)(yun)動(dong)(dong)(dong)頂(ding)(ding)板(ban)(ban)(ban)(ban)(6)在(zai)(zai)(zai)安(an)(an)裝(zhuang)(zhuang)(zhuang)(zhuang)底板(ban)(ban)(ban)(ban)(2)上沿著x軸(zhou)(zhou)(zhou)方向(xiang)上移動(dong)(dong)(dong)，在(zai)(zai)(zai)y軸(zhou)(zhou)(zhou)轉動(dong)(dong)(dong)組(zu)(zu)(zu)件(jian)(jian)(402)的(de)(de)(de)驅(qu)動(dong)(dong)(dong)下，運(yun)(yun)(yun)動(dong)(dong)(dong)頂(ding)(ding)板(ban)(ban)(ban)(ban)(6)在(zai)(zai)(zai)連(lian)接(jie)板(ban)(ban)(ban)(ban)(5)上沿著y軸(zhou)(zhou)(zhou)方向(xiang)上移動(dong)(dong)(dong)。

2.根據權利(li)要(yao)求1所(suo)述的電子束曝光機的工件臺系統，其(qi)特(te)征在于，所(suo)述安裝底板(ban)(2)上(shang)設(she)有光柵尺測(ce)量組(zu)件(7)，以(yi)用于測(ce)量連接板(ban)(5)和(he)運(yun)動頂板(ban)(6)的位移，并將位置(zhi)(zhi)信(xin)號反(fan)饋至外置(zhi)(zhi)的控制(zhi)系。

3.根據權利要(yao)求2所述的(de)(de)電(dian)子束(shu)曝光機的(de)(de)工件臺系統，其特征在于，所述安裝底板(ban)(2)上設有(you)輔助組件(8)，以用于線纜和拖鏈(lian)的(de)(de)支撐。

4.根據(ju)權(quan)利要(yao)求3所述(shu)(shu)的電子(zi)束(shu)曝光(guang)機的工件臺系統，其特征在(zai)于，所述(shu)(shu)x軸(zhou)基(ji)準(zhun)(zhun)(zhun)槽(51)兩(liang)(liang)兩(liang)(liang)平(ping)行設置在(zai)連(lian)(lian)接(jie)板(5)的底部(bu)，所述(shu)(shu)y軸(zhou)基(ji)準(zhun)(zhun)(zhun)槽(52)兩(liang)(liang)兩(liang)(liang)平(ping)行設置在(zai)連(lian)(lian)接(jie)板(5)的頂(ding)部(bu)，x軸(zhou)基(ji)準(zhun)(zhun)(zhun)槽(51)與(yu)y軸(zhou)基(ji)準(zhun)(zhun)(zhun)槽(52)呈十字交(jiao)叉(cha)狀布置。

5.根據權(quan)利要求4所述(shu)的(de)(de)(de)電子束曝光(guang)機的(de)(de)(de)工(gong)件臺系統，其特征在于，兩(liang)兩(liang)平行設置的(de)(de)(de)基(ji)準(zhun)槽之間，平行度誤差小(xiao)于5μm；連接板(5)底(di)部(bu)和(he)頂部(bu)的(de)(de)(de)基(ji)準(zhun)槽的(de)(de)(de)平行度誤差小(xiao)于3μm。

6.根據權利(li)要求3所述的(de)電子(zi)束曝光機的(de)工件臺系統(tong)，其特征在于，所述調節(jie)支座(1)包(bao)括：安(an)裝(zhuang)(zhuang)底(di)座(11)、安(an)裝(zhuang)(zhuang)滑(hua)(hua)塊(kuai)(13)、調節(jie)螺母(14)和中心(xin)鎖(suo)緊螺釘(17)；所述調節(jie)螺母(14)底(di)部(bu)與(yu)安(an)裝(zhuang)(zhuang)底(di)座(11)頂部(bu)進行(xing)螺紋配合，以(yi)用于調節(jie)工作臺系統(tong)的(de)水平高度(du)和平面度(du)；所述安(an)裝(zhuang)(zhuang)滑(hua)(hua)塊(kuai)(13)頂部(bu)與(yu)安(an)裝(zhuang)(zhuang)底(di)板(2)連接(jie)，安(an)裝(zhuang)(zhuang)滑(hua)(hua)塊(kuai)(13)底(di)部(bu)與(yu)調節(jie)螺母(14)頂部(bu)通(tong)過弧形(xing)凹槽(cao)進行(xing)配合，以(yi)實現安(an)裝(zhuang)(zhuang)底(di)板(2)具備偏擺角(jiao)度(du)；所述安(an)裝(zhuang)(zhuang)滑(hua)(hua)塊(kuai)(13)與(yu)安(an)裝(zhuang)(zhuang)底(di)座(11)通(tong)過中心(xin)鎖(suo)緊螺釘(17)連接(jie)固(gu)定。

7.根據權利要求(qiu)6所述的電子束曝光機的工件(jian)臺(tai)系統，其特(te)征在于(yu)，所述調(diao)節支座(zuo)(1)還包括：鎖(suo)緊(jin)螺(luo)(luo)母(mu)(mu)(12)、底(di)(di)座(zuo)鎖(suo)緊(jin)螺(luo)(luo)釘(ding)(15)和滑塊(kuai)鎖(suo)緊(jin)螺(luo)(luo)釘(ding)(16)；所述鎖(suo)緊(jin)螺(luo)(luo)母(mu)(mu)(12)位于(yu)調(diao)節螺(luo)(luo)母(mu)(mu)(14)與(yu)(yu)安(an)(an)裝底(di)(di)座(zuo)(11)之(zhi)間，用于(yu)鎖(suo)緊(jin)調(diao)節螺(luo)(luo)母(mu)(mu)(14)；所述底(di)(di)座(zuo)鎖(suo)緊(jin)螺(luo)(luo)釘(ding)(15)位于(yu)安(an)(an)裝底(di)(di)座(zuo)(11)底(di)(di)部，用于(yu)鎖(suo)緊(jin)安(an)(an)裝底(di)(di)座(zuo)(11)；所述滑塊(kuai)鎖(suo)緊(jin)螺(luo)(luo)釘(ding)(16)位于(yu)安(an)(an)裝滑塊(kuai)(13)頂部，用于(yu)實現安(an)(an)裝滑塊(kuai)(13)與(yu)(yu)安(an)(an)裝底(di)(di)板(2)鎖(suo)緊(jin)固(gu)定。

8.根據權利要求(qiu)6所(suo)述(shu)的(de)電(dian)子束曝光機的(de)工(gong)件(jian)(jian)臺系統，其特(te)征在(zai)于，所(suo)述(shu)x軸(zhou)(zhou)(zhou)(zhou)(zhou)(zhou)傳(chuan)(chuan)動(dong)組(zu)件(jian)(jian)(401)和(he)y軸(zhou)(zhou)(zhou)(zhou)(zhou)(zhou)轉(zhuan)動(dong)組(zu)件(jian)(jian)(402)具(ju)有相同的(de)結構設(she)置(zhi)；所(suo)述(shu)x軸(zhou)(zhou)(zhou)(zhou)(zhou)(zhou)傳(chuan)(chuan)動(dong)組(zu)件(jian)(jian)(401)包括(kuo)驅動(dong)電(dian)機(41)、聯(lian)軸(zhou)(zhou)(zhou)(zhou)(zhou)(zhou)器(42)、成組(zu)角(jiao)接(jie)(jie)觸軸(zhou)(zhou)(zhou)(zhou)(zhou)(zhou)承(cheng)(43)、滾(gun)珠(zhu)絲(si)桿組(zu)件(jian)(jian)(44)、深(shen)(shen)溝球軸(zhou)(zhou)(zhou)(zhou)(zhou)(zhou)承(cheng)(45)、軸(zhou)(zhou)(zhou)(zhou)(zhou)(zhou)承(cheng)座(zuo)固定組(zu)件(jian)(jian)(48)、絲(si)桿滑塊(49)和(he)支撐(cheng)(cheng)軸(zhou)(zhou)(zhou)(zhou)(zhou)(zhou)承(cheng)座(zuo)(410)；所(suo)述(shu)滾(gun)珠(zhu)絲(si)桿組(zu)件(jian)(jian)(44)的(de)一端(duan)延(yan)伸至軸(zhou)(zhou)(zhou)(zhou)(zhou)(zhou)承(cheng)座(zuo)固定組(zu)件(jian)(jian)(48)內，并通過(guo)(guo)聯(lian)軸(zhou)(zhou)(zhou)(zhou)(zhou)(zhou)器(42)與(yu)驅動(dong)電(dian)機(41)的(de)輸出端(duan)連(lian)接(jie)(jie)，軸(zhou)(zhou)(zhou)(zhou)(zhou)(zhou)承(cheng)座(zuo)固定組(zu)件(jian)(jian)(48)與(yu)滾(gun)珠(zhu)絲(si)桿組(zu)件(jian)(jian)(44)的(de)連(lian)接(jie)(jie)處設(she)有成組(zu)角(jiao)接(jie)(jie)觸軸(zhou)(zhou)(zhou)(zhou)(zhou)(zhou)承(cheng)(43)；所(suo)述(shu)滾(gun)珠(zhu)絲(si)桿組(zu)件(jian)(jian)(44)的(de)另一端(duan)通過(guo)(guo)深(shen)(shen)溝球軸(zhou)(zhou)(zhou)(zhou)(zhou)(zhou)承(cheng)(45)與(yu)支撐(cheng)(cheng)軸(zhou)(zhou)(zhou)(zhou)(zhou)(zhou)承(cheng)座(zuo)(410)連(lian)接(jie)(jie)，所(suo)述(shu)軸(zhou)(zhou)(zhou)(zhou)(zhou)(zhou)承(cheng)座(zuo)固定組(zu)件(jian)(jian)(48)和(he)支撐(cheng)(cheng)軸(zhou)(zhou)(zhou)(zhou)(zhou)(zhou)承(cheng)座(zuo)(410)均固定在(zai)安裝底板(2)上；所(suo)述(shu)絲(si)桿滑塊(49)滑動(dong)設(she)置(zhi)在(zai)滾(gun)珠(zhu)絲(si)桿組(zu)件(jian)(jian)(44)上，并與(yu)連(lian)接(jie)(jie)板(5)的(de)底部連(lian)接(jie)(jie)。

9.根據權利(li)要求8所(suo)(suo)述的(de)電子束(shu)曝(pu)光機的(de)工件(jian)(jian)臺系統，其特征在(zai)于，所(suo)(suo)述x軸(zhou)(zhou)傳動組(zu)(zu)件(jian)(jian)(401)還(huan)包括密(mi)(mi)封(feng)殼(ke)(ke)體(ti)(46)和差(cha)抽組(zu)(zu)件(jian)(jian)(47)；所(suo)(suo)述密(mi)(mi)封(feng)殼(ke)(ke)體(ti)(46)與軸(zhou)(zhou)承座固定組(zu)(zu)件(jian)(jian)(48)連接固定，驅動電機(41)密(mi)(mi)封(feng)設置在(zai)密(mi)(mi)封(feng)殼(ke)(ke)體(ti)(46)中(zhong)，密(mi)(mi)封(feng)殼(ke)(ke)體(ti)(46)內填充(chong)惰性氣體(ti)；所(suo)(suo)述密(mi)(mi)封(feng)殼(ke)(ke)體(ti)(46)上設有(you)多個差(cha)抽組(zu)(zu)件(jian)(jian)(47)，所(suo)(suo)述差(cha)抽組(zu)(zu)件(jian)(jian)(47)用于降低密(mi)(mi)封(feng)殼(ke)(ke)體(ti)(46)內外的(de)壓(ya)差(cha)。

10.根據(ju)權利(li)要求1至9中任意(yi)一項所述(shu)的電子束(shu)曝光機的工件臺系統(tong)，其特征在于(yu)，所述(shu)運動(dong)頂板(ban)(6)上設有屏蔽層(9)，以實現磁性屏蔽。

技術總結
本發明公開了一種電子束曝光機的工件臺系統，多個調節支座均布在安裝底板底部，傳動組件包括X軸傳動組件和Y軸轉動組件，X軸傳動組件安裝在安裝底板上，其輸出端與連接板連接，Y軸轉動組件安裝在連接板上，其輸出端與用于承載工件的運動頂板連接；連接板的底部設有X軸基準槽，連接板的頂部設有Y軸基準槽，導軌包括X軸導軌和Y軸導軌，X軸導軌安裝在安裝底板上，并與X軸基準槽滑動配合，Y軸導軌安裝在運動頂板上，并與Y軸基準槽滑動配合；在X軸傳動組件的驅動下，連接板帶動運動頂板在安裝底板上沿著X軸方向上移動，在Y軸轉動組件的驅動下，運動頂板在連接板上沿著Y軸方向上移動。本發明具有結構緊湊、操作簡單、運動精度高等優點。

技術研發人員：劉千伍,葉文龍,陳李松,張超,范江華
受保護的技術使用者：中國電子科技集團公司第四十八研究所
技術研發日：
技術公布日：2024/10/10